JP4163766B2 - インクジェット・プリントヘッドとインクジェット・プリントヘッドの製造方法 - Google Patents
インクジェット・プリントヘッドとインクジェット・プリントヘッドの製造方法 Download PDFInfo
- Publication number
- JP4163766B2 JP4163766B2 JP04228997A JP4228997A JP4163766B2 JP 4163766 B2 JP4163766 B2 JP 4163766B2 JP 04228997 A JP04228997 A JP 04228997A JP 4228997 A JP4228997 A JP 4228997A JP 4163766 B2 JP4163766 B2 JP 4163766B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- surface portion
- defining
- chamber
- print head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 59
- 238000007373 indentation Methods 0.000 claims description 34
- 238000002347 injection Methods 0.000 claims description 15
- 239000007924 injection Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000007921 spray Substances 0.000 claims description 4
- 230000006911 nucleation Effects 0.000 description 20
- 238000010899 nucleation Methods 0.000 description 20
- 238000009835 boiling Methods 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 230000001154 acute effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000007641 inkjet printing Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910004490 TaAl Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- IZJSTXINDUKPRP-UHFFFAOYSA-N aluminum lead Chemical compound [Al].[Pb] IZJSTXINDUKPRP-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/1412—Shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60645996A | 1996-03-04 | 1996-03-04 | |
| US606,459 | 1996-03-04 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09239985A JPH09239985A (ja) | 1997-09-16 |
| JPH09239985A5 JPH09239985A5 (2) | 2005-01-27 |
| JP4163766B2 true JP4163766B2 (ja) | 2008-10-08 |
Family
ID=24428067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04228997A Expired - Fee Related JP4163766B2 (ja) | 1996-03-04 | 1997-02-26 | インクジェット・プリントヘッドとインクジェット・プリントヘッドの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6485128B1 (2) |
| EP (1) | EP0794057B1 (2) |
| JP (1) | JP4163766B2 (2) |
| DE (1) | DE69622147T2 (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8390276B2 (en) | 2010-09-27 | 2013-03-05 | Bourns Incorporated | Target magnet assembly for a sensor used with a steering gear |
| US8448528B2 (en) | 2010-09-27 | 2013-05-28 | Bourns Incorporated | Three-piece torque sensor assembly |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6293654B1 (en) | 1998-04-22 | 2001-09-25 | Hewlett-Packard Company | Printhead apparatus |
| US6331049B1 (en) | 1999-03-12 | 2001-12-18 | Hewlett-Packard Company | Printhead having varied thickness passivation layer and method of making same |
| JP4521930B2 (ja) * | 2000-04-28 | 2010-08-11 | 京セラ株式会社 | インクジェットヘッド |
| US7025894B2 (en) | 2001-10-16 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Fluid-ejection devices and a deposition method for layers thereof |
| US6755509B2 (en) * | 2002-11-23 | 2004-06-29 | Silverbrook Research Pty Ltd | Thermal ink jet printhead with suspended beam heater |
| JP2005205721A (ja) * | 2004-01-22 | 2005-08-04 | Sony Corp | 液体吐出ヘッド及び液体吐出装置 |
| US7703891B2 (en) * | 2005-12-07 | 2010-04-27 | Samsung Electronics Co., Ltd. | Heater to control bubble and inkjet printhead having the heater |
| CN105163943B (zh) * | 2013-07-29 | 2017-06-23 | 惠普发展公司,有限责任合伙企业 | 流体喷出设备 |
| WO2019017880A1 (en) * | 2017-07-17 | 2019-01-24 | Hewlett-Packard Development Company, L.P. | THERMAL FLUID EJECTION HEATING ELEMENT |
| CN115151424B (zh) * | 2020-02-24 | 2025-11-28 | 锡克拜控股有限公司 | 热喷墨打印头以及包括该打印头的打印组装件和打印设备 |
| CN116406851A (zh) * | 2021-12-30 | 2023-07-11 | 比亚迪精密制造有限公司 | 电子烟雾化器及其制备方法和电子烟 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931943B2 (ja) | 1979-04-02 | 1984-08-06 | キヤノン株式会社 | 液体噴射記録法 |
| US4336548A (en) | 1979-07-04 | 1982-06-22 | Canon Kabushiki Kaisha | Droplets forming device |
| US4490728A (en) * | 1981-08-14 | 1984-12-25 | Hewlett-Packard Company | Thermal ink jet printer |
| US4514741A (en) | 1982-11-22 | 1985-04-30 | Hewlett-Packard Company | Thermal ink jet printer utilizing a printhead resistor having a central cold spot |
| EP0124312A3 (en) | 1983-04-29 | 1985-08-28 | Hewlett-Packard Company | Resistor structures for thermal ink jet printers |
| US4513298A (en) | 1983-05-25 | 1985-04-23 | Hewlett-Packard Company | Thermal ink jet printhead |
| US4894664A (en) * | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
| DE3717294C2 (de) * | 1986-06-10 | 1995-01-26 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf |
| JPS6334144A (ja) | 1986-07-29 | 1988-02-13 | Canon Inc | 液体噴射記録ヘツド |
| US4792818A (en) * | 1987-06-12 | 1988-12-20 | International Business Machines Corporation | Thermal drop-on-demand ink jet print head |
| US4794411A (en) | 1987-10-19 | 1988-12-27 | Hewlett-Packard Company | Thermal ink-jet head structure with orifice offset from resistor |
| US4870433A (en) | 1988-07-28 | 1989-09-26 | International Business Machines Corporation | Thermal drop-on-demand ink jet print head |
| JPH02103150A (ja) | 1988-10-12 | 1990-04-16 | Rohm Co Ltd | インクジェット記録ヘッド |
| EP0428730B1 (en) | 1989-02-28 | 1995-07-12 | Canon Kabushiki Kaisha | Ink jet head having heat-generating resistor constituted of non-monocrystalline substance containing iridium, tantalum and aluminum, and ink jet device equipped with said head |
| US4935752A (en) | 1989-03-30 | 1990-06-19 | Xerox Corporation | Thermal ink jet device with improved heating elements |
| JPH03213355A (ja) * | 1990-01-19 | 1991-09-18 | Fuji Xerox Co Ltd | インクジェットプリントヘッド |
| JPH0733091B2 (ja) | 1990-03-15 | 1995-04-12 | 日本電気株式会社 | インクジェット記録方法及びそれを用いたインクジェットヘッド |
| US5041844A (en) | 1990-07-02 | 1991-08-20 | Xerox Corporation | Thermal ink jet printhead with location control of bubble collapse |
| US5169806A (en) | 1990-09-26 | 1992-12-08 | Xerox Corporation | Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers |
| JP3054450B2 (ja) | 1991-02-13 | 2000-06-19 | 株式会社リコー | 液体噴射記録ヘッド用基体及び液体噴射記録ヘッド |
| JPH04307252A (ja) * | 1991-04-05 | 1992-10-29 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
| JPH04338609A (ja) | 1991-05-16 | 1992-11-25 | Matsushita Electric Ind Co Ltd | ソレノイド駆動回路 |
| JPH06183001A (ja) * | 1992-12-18 | 1994-07-05 | Canon Inc | 熱インクジェットヘッド |
| KR970003168B1 (ko) | 1993-05-19 | 1997-03-14 | 삼성전자 주식회사 | 반도체 메모리장치의 커패시터 제조방법 |
| EP0638424A3 (en) * | 1993-08-09 | 1996-07-31 | Hewlett Packard Co | Thermal inkjet printhead and manufacturing process. |
-
1996
- 1996-09-20 DE DE69622147T patent/DE69622147T2/de not_active Expired - Lifetime
- 1996-09-20 EP EP96306875A patent/EP0794057B1/en not_active Expired - Lifetime
-
1997
- 1997-02-26 JP JP04228997A patent/JP4163766B2/ja not_active Expired - Fee Related
- 1997-10-07 US US08/946,523 patent/US6485128B1/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8390276B2 (en) | 2010-09-27 | 2013-03-05 | Bourns Incorporated | Target magnet assembly for a sensor used with a steering gear |
| US8448528B2 (en) | 2010-09-27 | 2013-05-28 | Bourns Incorporated | Three-piece torque sensor assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0794057A1 (en) | 1997-09-10 |
| JPH09239985A (ja) | 1997-09-16 |
| DE69622147T2 (de) | 2002-11-14 |
| DE69622147D1 (de) | 2002-08-08 |
| EP0794057B1 (en) | 2002-07-03 |
| US6485128B1 (en) | 2002-11-26 |
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