JP4909244B2 - 干渉測定装置 - Google Patents

干渉測定装置 Download PDF

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Publication number
JP4909244B2
JP4909244B2 JP2007298019A JP2007298019A JP4909244B2 JP 4909244 B2 JP4909244 B2 JP 4909244B2 JP 2007298019 A JP2007298019 A JP 2007298019A JP 2007298019 A JP2007298019 A JP 2007298019A JP 4909244 B2 JP4909244 B2 JP 4909244B2
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JP
Japan
Prior art keywords
path length
optical path
length difference
moving
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007298019A
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English (en)
Japanese (ja)
Other versions
JP2009122033A (ja
Inventor
豊彦 山内
秀直 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2007298019A priority Critical patent/JP4909244B2/ja
Priority to DE112008003129.0T priority patent/DE112008003129B4/de
Priority to PCT/JP2008/070502 priority patent/WO2009063863A1/fr
Priority to US12/742,802 priority patent/US8248593B2/en
Publication of JP2009122033A publication Critical patent/JP2009122033A/ja
Application granted granted Critical
Publication of JP4909244B2 publication Critical patent/JP4909244B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2007298019A 2007-11-16 2007-11-16 干渉測定装置 Active JP4909244B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007298019A JP4909244B2 (ja) 2007-11-16 2007-11-16 干渉測定装置
DE112008003129.0T DE112008003129B4 (de) 2007-11-16 2008-11-11 Interferenz-Messvorrichtung
PCT/JP2008/070502 WO2009063863A1 (fr) 2007-11-16 2008-11-11 Dispositif de mesure d'interférences
US12/742,802 US8248593B2 (en) 2007-11-16 2008-11-11 Interference measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007298019A JP4909244B2 (ja) 2007-11-16 2007-11-16 干渉測定装置

Publications (2)

Publication Number Publication Date
JP2009122033A JP2009122033A (ja) 2009-06-04
JP4909244B2 true JP4909244B2 (ja) 2012-04-04

Family

ID=40638712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007298019A Active JP4909244B2 (ja) 2007-11-16 2007-11-16 干渉測定装置

Country Status (4)

Country Link
US (1) US8248593B2 (fr)
JP (1) JP4909244B2 (fr)
DE (1) DE112008003129B4 (fr)
WO (1) WO2009063863A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8810904B2 (en) * 2011-02-09 2014-08-19 Northwestern University Optical contact micrometer
US10215552B2 (en) 2014-07-01 2019-02-26 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Optical coherence tomography microscopy apparatus and method for detecting a three-dimensional image of an object
JP6655888B2 (ja) 2014-08-20 2020-03-04 キヤノン株式会社 計測装置、計測方法、および物品の製造方法
US10393500B2 (en) * 2015-01-30 2019-08-27 Hamamatsu Photonics K.K. Interference observation device and interference observation method
WO2016121249A1 (fr) 2015-01-30 2016-08-04 浜松ホトニクス株式会社 Dispositif optique d'interférence, dispositif et procédé d'observation d'interférence
JP5839759B1 (ja) * 2015-07-30 2016-01-06 浜松ホトニクス株式会社 光干渉計
WO2018093637A1 (fr) * 2016-11-18 2018-05-24 Zygo Corporation Procédé et appareil d'optimisation du rendement optique d'interféromètres
WO2018194985A1 (fr) * 2017-04-19 2018-10-25 Drs Network & Imaging Systems, Llc Imageur hyper-spectral actif
JP6851301B2 (ja) * 2017-12-20 2021-03-31 浜松ホトニクス株式会社 観察対象物カバー、干渉観察用容器、干渉観察装置及び干渉観察方法
CN110057743A (zh) * 2019-05-06 2019-07-26 西安交通大学 基于光学虚拟染色的血涂片免标记细胞三维形态检测方法
JP7761129B2 (ja) * 2022-03-11 2025-10-28 株式会社ニコン 撮像装置および撮像方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818108A (en) * 1987-12-14 1989-04-04 Hughes Optical Products, Inc. Phase modulated ronchi testing of aspheric surfaces
US5166749A (en) 1991-05-22 1992-11-24 Bio-Rad Laboratories Step scanning technique for interferometer
JP3508240B2 (ja) * 1994-09-13 2004-03-22 株式会社ニコン レーザー干渉距離測定装置
JP4246326B2 (ja) 1999-08-27 2009-04-02 東レエンジニアリング株式会社 表面形状測定方法及びその装置
JP2005283387A (ja) 2004-03-30 2005-10-13 Sumitomo Osaka Cement Co Ltd 厚さ測定装置ならびに厚さ測定方法
JP4837300B2 (ja) * 2005-03-24 2011-12-14 株式会社トプコン 光画像計測装置

Also Published As

Publication number Publication date
US8248593B2 (en) 2012-08-21
US20100309479A1 (en) 2010-12-09
JP2009122033A (ja) 2009-06-04
DE112008003129B4 (de) 2024-10-17
DE112008003129T5 (de) 2010-10-14
WO2009063863A1 (fr) 2009-05-22

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