JP5123690B2 - 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム - Google Patents

画面データ処理装置、画面データ処理方法、及びコンピュータプログラム Download PDF

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Publication number
JP5123690B2
JP5123690B2 JP2008046900A JP2008046900A JP5123690B2 JP 5123690 B2 JP5123690 B2 JP 5123690B2 JP 2008046900 A JP2008046900 A JP 2008046900A JP 2008046900 A JP2008046900 A JP 2008046900A JP 5123690 B2 JP5123690 B2 JP 5123690B2
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JP
Japan
Prior art keywords
screen data
event
display
screen
unit
Prior art date
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Expired - Fee Related
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JP2008046900A
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English (en)
Japanese (ja)
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JP2009205426A (ja
JP2009205426A5 (2
Inventor
好伯 新藤
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008046900A priority Critical patent/JP5123690B2/ja
Priority to US12/371,964 priority patent/US20090217197A1/en
Publication of JP2009205426A publication Critical patent/JP2009205426A/ja
Publication of JP2009205426A5 publication Critical patent/JP2009205426A5/ja
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35291—Record history, log, journal, audit of machine operation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35502—Display picture, image of place of error

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • User Interface Of Digital Computer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2008046900A 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム Expired - Fee Related JP5123690B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008046900A JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム
US12/371,964 US20090217197A1 (en) 2008-02-27 2009-02-17 Screen data processing apparatus, screen data processing method, and computer program

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008046900A JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム

Publications (3)

Publication Number Publication Date
JP2009205426A JP2009205426A (ja) 2009-09-10
JP2009205426A5 JP2009205426A5 (2) 2011-04-07
JP5123690B2 true JP5123690B2 (ja) 2013-01-23

Family

ID=40999596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008046900A Expired - Fee Related JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム

Country Status (2)

Country Link
US (1) US20090217197A1 (2)
JP (1) JP5123690B2 (2)

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US9239846B2 (en) 2012-04-23 2016-01-19 Google Inc. Sharing and synchronizing electronically stored files
US9529818B2 (en) 2012-04-23 2016-12-27 Google Inc. Sharing and synchronizing electronically stored files
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JP6649756B2 (ja) * 2015-11-26 2020-02-19 アズビル株式会社 表示装置および方法

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US20090217197A1 (en) 2009-08-27
JP2009205426A (ja) 2009-09-10

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