JP5253382B2 - 加工品の表面点に接触するための方法および装置 - Google Patents

加工品の表面点に接触するための方法および装置 Download PDF

Info

Publication number
JP5253382B2
JP5253382B2 JP2009508187A JP2009508187A JP5253382B2 JP 5253382 B2 JP5253382 B2 JP 5253382B2 JP 2009508187 A JP2009508187 A JP 2009508187A JP 2009508187 A JP2009508187 A JP 2009508187A JP 5253382 B2 JP5253382 B2 JP 5253382B2
Authority
JP
Japan
Prior art keywords
stylus
contact force
probe head
correction data
data record
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009508187A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009536325A (ja
Inventor
オベレ，オイゲーン
グルップ，ギュンター
ベルンハルト，ラルフ
ベントツーラ，クラオズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Industrielle Messtechnik GmbH
Original Assignee
Carl Zeiss Industrielle Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Industrielle Messtechnik GmbH filed Critical Carl Zeiss Industrielle Messtechnik GmbH
Publication of JP2009536325A publication Critical patent/JP2009536325A/ja
Application granted granted Critical
Publication of JP5253382B2 publication Critical patent/JP5253382B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2009508187A 2006-05-10 2007-04-28 加工品の表面点に接触するための方法および装置 Expired - Fee Related JP5253382B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006023031A DE102006023031A1 (de) 2006-05-10 2006-05-10 Verfahren und Vorrichtung zum Antasten eines Oberflächenpunktes an einem Werkstück
DE102006023031.0 2006-05-10
PCT/EP2007/003788 WO2007128444A1 (de) 2006-05-10 2007-04-28 Verfahren und vorrichtung zum antasten eines oberflächenpunktes an einem werkstück

Publications (2)

Publication Number Publication Date
JP2009536325A JP2009536325A (ja) 2009-10-08
JP5253382B2 true JP5253382B2 (ja) 2013-07-31

Family

ID=38176883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009508187A Expired - Fee Related JP5253382B2 (ja) 2006-05-10 2007-04-28 加工品の表面点に接触するための方法および装置

Country Status (5)

Country Link
US (1) US7788820B2 (de)
EP (1) EP2016368B1 (de)
JP (1) JP5253382B2 (de)
DE (2) DE102006023031A1 (de)
WO (1) WO2007128444A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7249421B2 (en) 2005-12-22 2007-07-31 Hexagon Metrology Ab Hysteresis compensation in a coordinate measurement machine
DE102006023031A1 (de) * 2006-05-10 2007-11-15 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Antasten eines Oberflächenpunktes an einem Werkstück
US8858853B2 (en) 2008-04-04 2014-10-14 The Boeing Company Formed sheet metal composite tooling
US7752003B2 (en) 2008-06-27 2010-07-06 Hexagon Metrology, Inc. Hysteresis compensation in a coordinate measurement machine
EP2327845A2 (de) * 2008-09-09 2011-06-01 Ju Tae Kim Bodenkonstruktionsgerät
DE102008063236B4 (de) 2008-12-15 2019-07-11 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Kalibrieren einer Messkraft an einem Koordinatenmessgerät
JP5371532B2 (ja) * 2009-04-23 2013-12-18 株式会社ミツトヨ 三次元測定機
DE102009020294A1 (de) * 2009-05-07 2010-11-18 Mahr Gmbh Verfahren und Vorrichtung zur Messung eines Oberflächenprofils
DE102010026892A1 (de) * 2010-04-09 2011-10-13 Stotz Feinmesstechnik Gmbh Vorrichtung zur Vermessung von Objekten
WO2013007285A1 (de) * 2011-07-08 2013-01-17 Carl Zeiss Industrielle Messtechnik Gmbh Korrektur und/oder vermeidung von fehlern bei der messung von koordinaten eines werkstücks
EP2984442B1 (de) 2013-04-02 2017-03-08 Carl Zeiss Industrielle Messtechnik GmbH Verfahren zum bestimmen einer formkontur an einem messobjekt
WO2015093244A1 (ja) * 2013-12-18 2015-06-25 コニカミノルタ株式会社 測定プローブ及び形状測定装置
DE102014220313A1 (de) * 2014-10-07 2016-04-07 Carl Zeiss Industrielle Messtechnik Gmbh Erfassung von geometrischen Abweichungen einer Bewegungsführung bei einemKoordinatenmessgerät oder einer Werkzeugmaschine
TWI786221B (zh) * 2017-12-22 2022-12-11 瑞士商謹觀股份公司 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機
CN116625242B (zh) * 2023-07-26 2023-10-03 青岛科技大学 光学三坐标测量机路径规划方法、系统、电子设备及介质

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6150007A (ja) * 1984-08-18 1986-03-12 Mitsutoyo Mfg Co Ltd 表面形状測定用トレ−サ
US5253428A (en) * 1990-02-23 1993-10-19 Renishaw Plc Touch probe
US5339535A (en) * 1990-02-23 1994-08-23 Renishaw Metrology Limited Touch probe
US5491904A (en) * 1990-02-23 1996-02-20 Mcmurtry; David R. Touch probe
GB9004117D0 (en) * 1990-02-23 1990-04-18 Renishaw Plc Touch probe
DE4027136A1 (de) 1990-08-28 1992-03-05 Leitz Messtechnik Zentriereinrichtung fuer mechanischen tastkopf
DE4204632A1 (de) * 1990-08-28 1993-08-19 Leitz Messtechnik Zentriereinrichtung fuer einen mechanischen tastkopf
JPH05506103A (ja) * 1991-02-25 1993-09-02 レニショウ　メタロジィ　リミテッド 接触プローブ
DE69201985T2 (de) * 1991-02-25 1995-08-24 Renishaw Metrology Ltd Kontaktprobe.
WO1993018525A1 (en) * 1992-03-13 1993-09-16 Park Scientific Instruments Corp. Scanning probe microscope
JPH0783650A (ja) * 1993-09-10 1995-03-28 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡の計測データ補正方法および計測角度誤差検出方法
JPH07134133A (ja) * 1993-11-12 1995-05-23 Hitachi Ltd 走査型プローブ顕微鏡
JPH08304059A (ja) * 1995-05-10 1996-11-22 Mitsutoyo Corp スタイラス支持装置
JP3153111B2 (ja) * 1995-09-18 2001-04-03 株式会社ミツトヨ 手動操作型三次元測定機
JP3502709B2 (ja) * 1995-11-20 2004-03-02 大日本スクリーン製造株式会社 スタイラス変位制御装置およびそれを用いたグラビア彫刻機
US6058618A (en) * 1997-09-09 2000-05-09 Giddings & Lewis, Inc. Coordinate measuring machine
JPH11264833A (ja) * 1998-03-18 1999-09-28 Nikon Corp 走査型プローブ顕微鏡及びそのプローブ駆動方法
JP2002350318A (ja) * 2001-05-25 2002-12-04 Olympus Optical Co Ltd スキャナ装置
JP3820357B2 (ja) * 2001-08-07 2006-09-13 株式会社ミツトヨ 計測方法および計測装置
JP2003241838A (ja) * 2002-02-20 2003-08-29 Japan Science & Technology Corp 位置決め装置
DE10229824A1 (de) * 2002-06-28 2004-01-15 Carl Zeiss Verfahren zum Betrieb eines in wenigstens zwei Betriebsarten betreibbaren Koordinatenmessgerätes
JP2005055345A (ja) * 2003-08-06 2005-03-03 Mitsutoyo Corp 変位測定装置、表面形状測定装置
DE102004007968B4 (de) * 2004-02-18 2006-02-09 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Antasten eines Werkstücks mit einem Koordinatenmessgerät
JP4652011B2 (ja) * 2004-10-13 2011-03-16 株式会社ミツトヨ 三次元座標測定システム及びそれに用いるパートプログラム
DE102006023031A1 (de) * 2006-05-10 2007-11-15 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Antasten eines Oberflächenpunktes an einem Werkstück

Also Published As

Publication number Publication date
EP2016368A1 (de) 2009-01-21
JP2009536325A (ja) 2009-10-08
EP2016368B1 (de) 2010-03-31
WO2007128444A1 (de) 2007-11-15
DE102006023031A1 (de) 2007-11-15
US7788820B2 (en) 2010-09-07
US20090172962A1 (en) 2009-07-09
DE502007003310D1 (de) 2010-05-12

Similar Documents

Publication Publication Date Title
JP5253382B2 (ja) 加工品の表面点に接触するための方法および装置
JP5400056B2 (ja) 座標測定機を校正するための方法
JP5449174B2 (ja) 座標測定機の測定値を補正するための方法および座標測定機
JP6254456B2 (ja) 三次元測定機及び三次元測定機による補正行列算出方法
JP5221004B2 (ja) 測定装置、表面性状測定方法、及び表面性状測定プログラム
US8074497B2 (en) Indentation testing instrument and indentation testing method
CN104034618B (zh) 硬度试验机
JP5816475B2 (ja) 産業機械
CN112721158A (zh) 三维打印设备的控制方法和三维打印设备
US11221201B2 (en) Profile measuring machine and profile measuring method
JP6310156B2 (ja) 粗さセンサの測定条件を決定するための方法、ワーク表面の粗さを測定するための方法、コンピュータプログラム製品、及び方法を実行するように設計された測定装置
JP2004045088A (ja) 表面形状測定装置および表面形状測定方法
CN105277148A (zh) 形状测定装置的测定误差的校正方法以及形状测定装置
CN107782223A (zh) 坐标测定装置和坐标校正方法
JP5371532B2 (ja) 三次元測定機
EP2636992B1 (de) Steuerung für ein Oberflächentexturmessgerät und Verfahren zur Steuerung davon
JP2005055282A (ja) 測定方法及び測定装置
EP2405234B1 (de) Formmessgerät
JP3820357B2 (ja) 計測方法および計測装置
JP4652011B2 (ja) 三次元座標測定システム及びそれに用いるパートプログラム
JP2007142093A (ja) ステージ装置、電子線照射装置及び露光装置
JP6474587B2 (ja) 測定値補正方法、測定値補正プログラム及び測定装置
JP5064725B2 (ja) 形状測定方法
JP2019158385A (ja) 測定装置
JP2012013426A (ja) 形状測定装置

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120412

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130321

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130416

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160426

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees