JP6009228B2 - 電子部品内蔵基板の製造方法 - Google Patents

電子部品内蔵基板の製造方法 Download PDF

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Publication number
JP6009228B2
JP6009228B2 JP2012122588A JP2012122588A JP6009228B2 JP 6009228 B2 JP6009228 B2 JP 6009228B2 JP 2012122588 A JP2012122588 A JP 2012122588A JP 2012122588 A JP2012122588 A JP 2012122588A JP 6009228 B2 JP6009228 B2 JP 6009228B2
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JP
Japan
Prior art keywords
insulating layer
electronic component
core material
layer
auxiliary insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012122588A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013247353A (ja
JP2013247353A5 (2
Inventor
淳史 佐藤
淳史 佐藤
智弘 野村
智弘 野村
一宏 大島
一宏 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2012122588A priority Critical patent/JP6009228B2/ja
Priority to KR1020130060110A priority patent/KR102032171B1/ko
Priority to US13/904,447 priority patent/US9247646B2/en
Publication of JP2013247353A publication Critical patent/JP2013247353A/ja
Publication of JP2013247353A5 publication Critical patent/JP2013247353A5/ja
Application granted granted Critical
Publication of JP6009228B2 publication Critical patent/JP6009228B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
    • H05K1/185—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0183—Dielectric layers
    • H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10636—Leadless chip, e.g. chip capacitor or resistor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0191—Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP2012122588A 2012-05-30 2012-05-30 電子部品内蔵基板の製造方法 Active JP6009228B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012122588A JP6009228B2 (ja) 2012-05-30 2012-05-30 電子部品内蔵基板の製造方法
KR1020130060110A KR102032171B1 (ko) 2012-05-30 2013-05-28 전자 부품 내장 기판 및 그 제조 방법
US13/904,447 US9247646B2 (en) 2012-05-30 2013-05-29 Electronic component built-in substrate and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012122588A JP6009228B2 (ja) 2012-05-30 2012-05-30 電子部品内蔵基板の製造方法

Publications (3)

Publication Number Publication Date
JP2013247353A JP2013247353A (ja) 2013-12-09
JP2013247353A5 JP2013247353A5 (2) 2015-07-02
JP6009228B2 true JP6009228B2 (ja) 2016-10-19

Family

ID=49668866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012122588A Active JP6009228B2 (ja) 2012-05-30 2012-05-30 電子部品内蔵基板の製造方法

Country Status (3)

Country Link
US (1) US9247646B2 (2)
JP (1) JP6009228B2 (2)
KR (1) KR102032171B1 (2)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9711392B2 (en) * 2012-07-25 2017-07-18 Infineon Technologies Ag Field emission devices and methods of making thereof
TWI610606B (zh) * 2013-02-21 2018-01-01 味之素股份有限公司 零件內建配線基板之製造方法及半導體裝置
JP2015035497A (ja) * 2013-08-09 2015-02-19 イビデン株式会社 電子部品内蔵配線板
JP6350093B2 (ja) * 2013-12-16 2018-07-04 味の素株式会社 部品内蔵基板の製造方法および半導体装置
KR102281468B1 (ko) 2014-07-16 2021-07-27 삼성전기주식회사 칩 내장형 기판 및 이의 제조 방법
US9420693B2 (en) * 2014-09-18 2016-08-16 Intel Corporation Integration of embedded thin film capacitors in package substrates
JP6428164B2 (ja) * 2014-10-31 2018-11-28 日立化成株式会社 半導体装置及びその製造方法
KR102356810B1 (ko) * 2015-01-22 2022-01-28 삼성전기주식회사 전자부품내장형 인쇄회로기판 및 그 제조방법
JP6712764B2 (ja) 2015-05-25 2020-06-24 パナソニックＩｐマネジメント株式会社 伸縮性フレキシブル基板およびその製造方法
JP6639934B2 (ja) * 2016-02-08 2020-02-05 新光電気工業株式会社 配線基板、半導体装置及び配線基板の製造方法
US11270920B2 (en) * 2018-08-14 2022-03-08 Medtronic, Inc. Integrated circuit package and method of forming same
US10903169B2 (en) 2019-04-30 2021-01-26 Advanced Semiconductor Engineering, Inc. Conductive structure and wiring structure including the same
US11018083B2 (en) * 2019-07-17 2021-05-25 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor package and manufacturing method thereof
CN112026329B (zh) * 2020-09-15 2021-05-11 福建鑫宏华机械有限公司 一种铝基覆铜板制作方法
JP6899027B1 (ja) * 2020-10-13 2021-07-07 株式会社 ゼンショーホールディングス 可溶化物の製造方法
KR20220130916A (ko) * 2021-03-19 2022-09-27 삼성전기주식회사 전자부품 내장기판
CN117321774A (zh) 2021-05-14 2023-12-29 京瓷Avx元器件公司 可嵌入的基于半导体的电容器
WO2022240798A1 (en) * 2021-05-14 2022-11-17 KYOCERA AVX Components Corporation Embeddable semiconductor-based capacitor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4551468B2 (ja) * 2007-09-05 2010-09-29 太陽誘電株式会社 電子部品内蔵型多層基板
JP5284155B2 (ja) * 2008-03-24 2013-09-11 日本特殊陶業株式会社 部品内蔵配線基板
US8120158B2 (en) * 2009-11-10 2012-02-21 Infineon Technologies Ag Laminate electronic device
KR101084252B1 (ko) * 2010-03-05 2011-11-17 삼성전기주식회사 전자소자 내장형 인쇄회로기판 및 그 제조방법
JP5001395B2 (ja) 2010-03-31 2012-08-15 イビデン株式会社 配線板及び配線板の製造方法

Also Published As

Publication number Publication date
US20130319740A1 (en) 2013-12-05
JP2013247353A (ja) 2013-12-09
KR20130135097A (ko) 2013-12-10
KR102032171B1 (ko) 2019-10-16
US9247646B2 (en) 2016-01-26

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