JP6257574B2 - 真空装置 - Google Patents

真空装置 Download PDF

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Publication number
JP6257574B2
JP6257574B2 JP2015221114A JP2015221114A JP6257574B2 JP 6257574 B2 JP6257574 B2 JP 6257574B2 JP 2015221114 A JP2015221114 A JP 2015221114A JP 2015221114 A JP2015221114 A JP 2015221114A JP 6257574 B2 JP6257574 B2 JP 6257574B2
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JP
Japan
Prior art keywords
connection
vacuum device
organ
accessory unit
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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JP2015221114A
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English (en)
Japanese (ja)
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JP2016094940A (ja
Inventor
ヨッヘン・ベットヒャー
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2016094940A publication Critical patent/JP2016094940A/ja
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Publication of JP6257574B2 publication Critical patent/JP6257574B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
JP2015221114A 2014-11-12 2015-11-11 真空装置 Active JP6257574B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014116555.1A DE102014116555A1 (de) 2014-11-12 2014-11-12 Vakuumgerät
DE102014116555.1 2014-11-12

Publications (2)

Publication Number Publication Date
JP2016094940A JP2016094940A (ja) 2016-05-26
JP6257574B2 true JP6257574B2 (ja) 2018-01-10

Family

ID=54360004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015221114A Active JP6257574B2 (ja) 2014-11-12 2015-11-11 真空装置

Country Status (3)

Country Link
EP (1) EP3020975B1 (de)
JP (1) JP6257574B2 (de)
DE (1) DE102014116555A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617520B1 (de) * 2018-08-31 2021-05-26 Pfeiffer Vacuum Gmbh Vakuumgerät, zubehöreinheit und system
EP3647600B1 (de) * 2019-10-08 2022-05-18 Pfeiffer Vacuum Gmbh Erkennung eines elektrisch angeschlossenen zubehörs

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen
JPH10189166A (ja) * 1996-12-26 1998-07-21 Sharp Corp 電子機器接続システム
JPH1139957A (ja) * 1997-05-21 1999-02-12 Sony Corp 伝送ケーブル、この伝送ケーブルが接続されるジャック及び記録装置
DE10007105A1 (de) * 2000-02-16 2001-08-23 Wilo Gmbh Elektrisch-Hydraulische Schnittstelle
JP2001332159A (ja) * 2000-05-23 2001-11-30 Hitachi Ltd 電力供給装置及びこれを用いた機器
DE20309441U1 (de) * 2003-06-16 2003-09-11 Yen, Stanley, Taipeh/T'ai-pei Luftpumpe
JP4794236B2 (ja) * 2005-08-05 2011-10-19 三洋電機株式会社 始動リレー装置
JP3131716U (ja) * 2006-08-22 2007-05-24 光紅建聖股▲分▼有限公司 同軸ケーブルコネクタ取外し防止ブッシング
DE102009039118A1 (de) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Vakuumpumpe
US10352327B2 (en) * 2010-12-17 2019-07-16 Shimadzu Corporation Vacuum pump

Also Published As

Publication number Publication date
EP3020975A1 (de) 2016-05-18
DE102014116555A1 (de) 2016-05-12
EP3020975B1 (de) 2017-12-13
JP2016094940A (ja) 2016-05-26

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