JP6339557B2 - ナノ構造化材料及びその作製方法 - Google Patents
ナノ構造化材料及びその作製方法 Download PDFInfo
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- JP6339557B2 JP6339557B2 JP2015503210A JP2015503210A JP6339557B2 JP 6339557 B2 JP6339557 B2 JP 6339557B2 JP 2015503210 A JP2015503210 A JP 2015503210A JP 2015503210 A JP2015503210 A JP 2015503210A JP 6339557 B2 JP6339557 B2 JP 6339557B2
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- nanostructured
- polymer matrix
- acrylate
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Classifications
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
- G02B2207/101—Nanooptics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3343—Problems associated with etching
- H01J2237/3345—Problems associated with etching anisotropy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
- Y10S977/781—Possessing nonosized surface openings that extend partially into or completely through the host material
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261615646P | 2012-03-26 | 2012-03-26 | |
| US61/615,646 | 2012-03-26 | ||
| PCT/US2013/027348 WO2013148031A1 (en) | 2012-03-26 | 2013-02-22 | Nanostructured material and method of making the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| JP2017214837A Division JP6685987B2 (ja) | 2012-03-26 | 2017-11-07 | ナノ構造化材料及びその作製方法 |
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| JP2015514231A JP2015514231A (ja) | 2015-05-18 |
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| JP6339557B2 true JP6339557B2 (ja) | 2018-06-06 |
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| JP2017214837A Active JP6685987B2 (ja) | 2012-03-26 | 2017-11-07 | ナノ構造化材料及びその作製方法 |
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| US (2) | US9651715B2 (2) |
| EP (1) | EP2831648B1 (2) |
| JP (2) | JP6339557B2 (2) |
| KR (1) | KR102047392B1 (2) |
| CN (1) | CN104335078B (2) |
| SG (1) | SG11201406122WA (2) |
| WO (1) | WO2013148031A1 (2) |
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| US20150202834A1 (en) | 2014-01-20 | 2015-07-23 | 3M Innovative Properties Company | Lamination transfer films for forming antireflective structures |
| TW201539736A (zh) | 2014-03-19 | 2015-10-16 | ３Ｍ新設資產公司 | 用於藉白光成色之 oled 裝置的奈米結構 |
| SG11201706397XA (en) * | 2015-02-04 | 2017-09-28 | Agency Science Tech & Res | Anti-reflection coating |
| CN107533286B (zh) * | 2015-04-29 | 2022-02-08 | 3M创新有限公司 | 溶胀性成膜组合物及采用所述溶胀性成膜组合物进行纳米压印光刻的方法 |
| CN108136065A (zh) | 2015-06-29 | 2018-06-08 | 3M创新有限公司 | 抗微生物制品及其使用方法 |
| JP6784487B2 (ja) | 2015-10-30 | 2020-11-11 | デクセリアルズ株式会社 | 光学体、および表示装置 |
| WO2017196721A1 (en) | 2016-05-12 | 2017-11-16 | 3M Innovative Properties Company | Protective headgear comprising a curved switchable shutter and comprising multiple antireflective layers |
| EP3694815A4 (en) * | 2017-10-10 | 2020-11-11 | Central Glass Co., Ltd. | IMPROVED ANTI-REFLECTIVE FUNCTIONAL COATING FOR GLAZING |
| US11422294B2 (en) | 2017-10-10 | 2022-08-23 | Central Glass Company, Limited | Durable functional coatings |
| US20200238667A1 (en) * | 2017-10-10 | 2020-07-30 | Central Glass Company, Limited | Use of uv-sensitive interlayer materials with nano-structured functional coating |
| CA3083615A1 (en) * | 2017-12-21 | 2019-06-27 | Brent MACINNIS | Eyewear and methods for making eyewear |
| EP3735574A1 (en) | 2018-01-05 | 2020-11-11 | 3M Innovative Properties Company | Stray light absorbing film |
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| DE112019007446T5 (de) * | 2019-06-11 | 2022-03-03 | Nalux Co., Ltd. | Verfahren zur herstellung eines kunststoffelements, das mit feineroberflächenrauigkeit bereitgestellt ist |
| DE102023111441A1 (de) * | 2023-05-03 | 2024-11-07 | Gesellschaft für angewandte Mikro- und Optoelektronik mit beschränkter Haftung - AMO GmbH | Verfahren zur Herstellung eines strukturierten Bauteils, sowie strukturiertes Bauteil |
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- 2013-02-22 KR KR1020147029907A patent/KR102047392B1/ko not_active Expired - Fee Related
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| WO2013148031A1 (en) | 2013-10-03 |
| EP2831648B1 (en) | 2016-09-14 |
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| US10126469B2 (en) | 2018-11-13 |
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| US20170221680A1 (en) | 2017-08-03 |
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| CN104335078A (zh) | 2015-02-04 |
| KR102047392B1 (ko) | 2019-11-21 |
| JP6685987B2 (ja) | 2020-04-22 |
| US9651715B2 (en) | 2017-05-16 |
| SG11201406122WA (en) | 2014-10-30 |
| JP2015514231A (ja) | 2015-05-18 |
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