JP6808839B2 - 基板保持装置、基板保持方法及び成膜装置 - Google Patents

基板保持装置、基板保持方法及び成膜装置 Download PDF

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Publication number
JP6808839B2
JP6808839B2 JP2019535965A JP2019535965A JP6808839B2 JP 6808839 B2 JP6808839 B2 JP 6808839B2 JP 2019535965 A JP2019535965 A JP 2019535965A JP 2019535965 A JP2019535965 A JP 2019535965A JP 6808839 B2 JP6808839 B2 JP 6808839B2
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Japan
Prior art keywords
support
clamp
substrates
portions
support surface
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JP2019535965A
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Japanese (ja)
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JPWO2019198537A1 (ja
Inventor
雄亮 佐藤
雄亮 佐藤
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Ulvac Inc
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Ulvac Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
JP2019535965A 2018-04-11 2019-03-28 基板保持装置、基板保持方法及び成膜装置 Active JP6808839B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018075870 2018-04-11
JP2018075870 2018-04-11
PCT/JP2019/013780 WO2019198537A1 (fr) 2018-04-11 2019-03-28 Dispositif de maintien de substrat, procédé de maintien de substrat et dispositif de formation de film

Publications (2)

Publication Number Publication Date
JPWO2019198537A1 JPWO2019198537A1 (ja) 2020-04-30
JP6808839B2 true JP6808839B2 (ja) 2021-01-06

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JP2019535965A Active JP6808839B2 (ja) 2018-04-11 2019-03-28 基板保持装置、基板保持方法及び成膜装置

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JP (1) JP6808839B2 (fr)
CN (1) CN111373523B (fr)
TW (1) TWI778250B (fr)
WO (1) WO2019198537A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102843360B1 (ko) * 2019-10-29 2025-08-06 한국알박(주) 스퍼터링 장치
JP7438018B2 (ja) * 2020-05-11 2024-02-26 東京エレクトロン株式会社 基板載置方法及び基板載置機構
JP7361080B2 (ja) * 2021-08-31 2023-10-13 キヤノントッキ株式会社 基板昇降装置及び成膜装置
TWI855425B (zh) * 2021-11-19 2024-09-11 日商芝浦機械電子裝置股份有限公司 供給裝置及成膜裝置
JP7840244B2 (ja) * 2022-09-28 2026-04-03 株式会社アルバック 基板クランプ、基板搬送トレイ及び基板搬送装置
TWI911598B (zh) 2023-02-08 2026-01-11 群創光電股份有限公司 成膜裝置及成膜方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132383A (ja) * 1992-10-21 1994-05-13 Shibaura Eng Works Co Ltd 基板用ホルダーの位置決め機構
KR100891259B1 (ko) * 2003-11-27 2009-04-01 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치, 기판 보관 유지 장비, 및 반도체 장치의 제조 방법
JP4098283B2 (ja) * 2004-07-30 2008-06-11 株式会社アルバック スパッタリング装置
CN201186950Y (zh) * 2008-02-03 2009-01-28 北儒精密股份有限公司 基板载具
JP2009280381A (ja) * 2008-05-26 2009-12-03 Panasonic Corp ディスプレイパネル製造用搬送プレートおよびディスプレイパネル製造方法
JP6151925B2 (ja) * 2013-02-06 2017-06-21 ヤマハ発動機株式会社 基板固定装置、基板作業装置および基板固定方法
JP6064684B2 (ja) * 2013-03-05 2017-01-25 三星ダイヤモンド工業株式会社 基板処理システムおよび基板反転装置
CN107110793B (zh) * 2014-12-05 2021-12-10 株式会社爱发科 基板监视装置及基板监视方法

Also Published As

Publication number Publication date
TW201944526A (zh) 2019-11-16
WO2019198537A1 (fr) 2019-10-17
JPWO2019198537A1 (ja) 2020-04-30
TWI778250B (zh) 2022-09-21
CN111373523B (zh) 2023-09-08
CN111373523A (zh) 2020-07-03

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