JP7759779B2 - Horizontal articulated robot - Google Patents

Description

The present invention relates to a horizontal articulated robot whose arm moves horizontally.

Horibarely known are horizontal articulated robots for transporting objects such as glass substrates and semiconductor wafers (see, for example, Patent Document 1). The horizontal articulated robot described in Patent Document 1 comprises a hand on which the object is placed, an arm to which the hand is rotatably connected at its tip, and a main body to which the base end of the arm is rotatably connected. The arm is composed of a first arm section and a second arm section that are rotatably connected to each other.

In the horizontal articulated robot described in Patent Document 1, the base end of the first arm is rotatably connected to the main body. The base end of the second arm is rotatably connected to the tip end of the first arm. The hand is rotatably connected to the tip end of the second arm. The first arm is positioned above the main body, the second arm is positioned above the first arm, and the hand is positioned above the second arm. The connecting portion between the main body and first arm, the connecting portion between the first arm and second arm, and the connecting portion between the second arm and hand form joints.

Japanese Patent Application Laid-Open No. 2019-118962

For example, when the horizontal articulated robot described in Patent Document 1 transports a semiconductor wafer that has undergone a predetermined process using liquid, there is a risk that the liquid remaining on the semiconductor wafer will fall from the semiconductor wafer and enter the interior of the horizontal articulated robot through the joints. Furthermore, if liquid enters the interior of the horizontal articulated robot through the joints, there is a risk of corrosion occurring inside the horizontal articulated robot.

The objective of the present invention is to provide a horizontal articulated robot whose arms move horizontally, capable of preventing liquid from entering the interior of the horizontal articulated robot through the joints.

In order to solve the above problems, the horizontal articulated robot of the present invention is a horizontal articulated robot whose arm moves horizontally, and comprises: a supporting part; and a supported part that is arranged above the supporting part and is rotatably connected to the supporting part; the supporting part comprises an annular supporting member that constitutes at least a part of the outer circumferential part of the supporting part at a joint that is the connecting part between the supporting part and the supported part; the supported part comprises a supported member that constitutes at least a part of the outer circumferential part of the supported part at the joint; the supported member comprises a cylindrical covering part that covers at least an upper part of the supporting member from the radial outside of the joint part around the entire circumference; the lower end of the cylindrical covering part is arranged below the upper end of the supporting member; the radial outer end of the joint part of a first gap, which is a gap formed between the cylindrical covering part and the supporting member, is an open opening, and the entire first gap is formed above the lower end of the opening; and if a space connected to the upper end of the first gap is formed inside the joint part, the entire space is formed above the opening .

In the horizontal articulated robot of the present invention, the supporting part includes an annular supporting member that forms at least a portion of the outer periphery of the supporting part at the joint, which is the connecting portion between the supporting part and the supported part, and the supported part, which is arranged above the supporting part, includes a supported member that forms at least a portion of the outer periphery of the supported part at the joint. Furthermore, in the present invention, the supported member includes a cylindrical covering part that covers at least the upper portion of the supporting part from the radial outside of the joint part around the entire circumference, and the lower end of the cylindrical covering part is arranged below the upper end of the supporting part. Therefore, in the present invention, if liquid passes below the cylindrical covering part at the joint part, but does not pass above the supporting part, the liquid will not penetrate into the interior of the horizontal articulated robot from the joint part. Therefore, in the present invention, it is possible to prevent liquid that has fallen from an object to be transported from penetrating into the interior of the horizontal articulated robot from the joint part.

In the present invention, for example, a horizontal articulated robot has a hand as a supported part on which an object to be transported is placed, and the arm has a tip-side arm part as a support part to which the hand is rotatably connected at the tip end.

In the present invention, for example, a horizontal articulated robot includes a hand on which an object to be transported is placed, and the arm includes a tip-side arm section as a supported part to which the hand is rotatably connected at the tip end, and a base-side arm section as a supporting part to which the base end of the tip-side arm section is rotatably connected at the tip end.

In the present invention, for example, a horizontal articulated robot includes a main body portion as a support portion to which the base end of an arm is rotatably connected, and the arm includes a base-end arm portion as a supported portion to which the base end of the arm is rotatably connected to the main body portion.

In the present invention, the horizontal articulated robot includes a hand on which an object to be transported is mounted and which is rotatably connected to the tip of the arm. The hand includes an end surface abutment member located at the tip of the hand and having an abutment surface against which the end surface of the object to be transported abuts; a pressing member which presses the object to be transported toward the abutment surface; a movement mechanism located inside the base end of the hand and moving the pressing member; and a cover which covers the movement mechanism from above. Preferably, the base end of the pressing member is connected to the movement mechanism, and the cover covers the base end portion of the pressing member from above. With this configuration, for example, the cover can prevent liquid that has fallen from the object to be transported from adhering to the base end portion of the pressing member. Therefore, for example, the cover can prevent liquid that has fallen from the object to be transported from seeping into the base end portion of the hand.

In the present invention, the horizontal articulated robot includes a hand on which an object to be transported is mounted and which is rotatably connected to the tip of the arm. The hand includes an end surface abutment member located at the tip of the hand and having an abutment surface against which the end surface of the object to be transported abuts; a pressing member that presses the object to be transported toward the abutment surface; a movement mechanism located inside the base end of the hand and moving the pressing member; and a cover that covers the movement mechanism from above. The movement mechanism includes a slide shaft to which the base end of the pressing member is fixed at its tip, and a shaft holding member that slidably holds the slide shaft. The shaft holding member has a through hole through which the slide shaft is inserted, and the slide shaft is slidable linearly relative to the shaft holding member. Preferably, the tip of the slide shaft is formed with a flange that extends radially outward from the slide shaft. With this configuration, for example, the flange can prevent liquid that has fallen from the object to be transported from passing through the through hole in the shaft holding member and entering the base end of the hand.

As described above, the horizontal articulated robot of the present invention makes it possible to prevent liquid from seeping into the interior of the horizontal articulated robot through the joints.

1 is a plan view of a horizontal articulated robot according to an embodiment of the present invention; FIG. 2 is a side view of the horizontal articulated robot shown in FIG. 1 . FIG. 2 is a plan view of the hand and arm shown in FIG. 1 in a state where the arm is extended. FIG. 4 is a cross-sectional view taken along the line EE in FIG. 3. FIG. 5 is an enlarged view of a portion F in FIG. 4 . FIG. 5 is an enlarged view of a portion G in FIG. 4 . FIG. 5 is an enlarged view of a portion H in FIG. 4 . FIG. 4 is a cross-sectional view taken along the line JJ in FIG. 3.

The following describes an embodiment of the present invention with reference to the drawings.

(General configuration of horizontal articulated robot)
Fig. 1 is a plan view of a horizontal articulated robot 1 according to an embodiment of the present invention, and Fig. 2 is a side view of the horizontal articulated robot 1 shown in Fig. 1.

In this embodiment, the horizontal articulated robot 1 (hereinafter referred to as "robot 1") is an industrial robot for transporting semiconductor wafers 2 (hereinafter referred to as "wafers 2"), which are objects to be transported. The wafers 2 are formed in a circular disk shape. In this embodiment, a predetermined process using a liquid is performed on the wafers 2, and the robot 1 transports the wafers 2 after the process.

The robot 1 comprises a hand 3 on which a wafer 2 is placed, an arm 4 to which the hand 3 is rotatably connected at its tip end, and a main body 5 to which the base end of the arm 4 is rotatably connected. The robot 1 also comprises a horizontal movement mechanism (not shown) that moves the main body 5 linearly in the horizontal direction. The robot 1 in this embodiment comprises two hands 3 and two arms 4, with one hand 3 rotatably connected to each of the two arms 4. The base ends of the two arms 4 are rotatably connected to the main body 5.

The arm 4 is composed of two arms, a first arm 7 and a second arm 8, which are connected to each other so that they can rotate relative to each other. The arm 4 operates horizontally. Specifically, the arm 4 extends and retracts horizontally. The first arm 7 and the second arm 8 are hollow. The base end of the first arm 7 is rotatably connected to the main body 5. The base end of the second arm 8 is rotatably connected to the tip end of the first arm 7. The hand 3 is rotatably connected to the tip end of the second arm 8. In this embodiment, the second arm 8 is the tip arm, and the first arm 7 is the base arm.

The first arm unit 7 rotates relative to the main body unit 5, with the vertical direction as its axis of rotation. The second arm unit 8 rotates relative to the first arm unit 7, with the vertical direction as its axis of rotation. The hand 3 rotates relative to the second arm unit 8, with the vertical direction as its axis of rotation. The first arm unit 7 is positioned above the main body unit 5, and the second arm unit 8 is positioned above the first arm unit 7. The hand 3 is positioned above the second arm unit 8. The connection between the first arm unit 7 and the main body unit 5 is joint unit 10. The connection between the first arm unit 7 and the second arm unit 8 is joint unit 11. The connection between the second arm unit 8 and the hand 3 is joint unit 12.

In this embodiment, in the relationship between the hand 3 and the second arm unit 8, the second arm unit 8 serves as a support unit, and the hand 3 serves as a supported unit that is disposed above the second arm unit 8 (support unit) and rotatably connected to the second arm unit 8. Furthermore, in the relationship between the first arm unit 7 and the second arm unit 8, the first arm unit 7 serves as a support unit, and the second arm unit 8 serves as a supported unit that is disposed above the first arm unit 7 (support unit) and rotatably connected to the first arm unit 7. Furthermore, in the relationship between the main body unit 5 and the first arm unit 7, the main body unit 5 serves as a support unit, and the first arm unit 7 serves as a supported unit that is disposed above the main body unit 5 (support unit) and rotatably connected to the main body unit 5.

(Configuration of main body, arm and hand)
Fig. 3 is a plan view of the hand 3 and the arm 4 in a state in which the arm 4 shown in Fig. 1 is extended. Fig. 4 is a cross-sectional view taken along the line E-E in Fig. 3. Fig. 5 is an enlarged view of a portion F in Fig. 4. Fig. 6 is an enlarged view of a portion G in Fig. 4. Fig. 7 is an enlarged view of a portion H in Fig. 4.

The main body 5 includes a hollow case body 14. A hollow pivot shaft 15 is disposed inside the case body 14 and is rotatable relative to the case body 14 with the vertical direction as the axial direction of the pivot. The main body 5 also includes a disk-shaped cover 16 fixed to the upper end of the case body 14 so as to cover an opening formed at the upper end of the case body 14, and a cylindrical fixing member 17 fixed to the case body 14 or the cover 16. The outer shape of the cover 16 is larger than the outer shape of the case body 14. A pulley 18 is fixed to the fixing member 17.

The pivot shaft 15 is formed in a generally cylindrical shape with its axial direction extending vertically. The fixed member 17 is also formed in a generally cylindrical shape with its axial direction extending vertically. The pivot shaft 15 is located on the inner periphery of the fixed member 17. A through-hole is formed in the center of the cover 16, into which a portion of the fixed member 17 is positioned, and the fixed member 17 is fixed to the center of the cover 16. The upper end of the fixed member 17 is located above the top surface of the cover 16, and the lower end of the fixed member 17 is located below the top surface of the cover 16.

The upper end of the pivot shaft 15 is located above the upper surface of the cover 16. The base end of the first arm portion 7 is fixed to the upper end of the pivot shaft 15. A motor (not shown) is located inside the case body 14 to rotate the pivot shaft 15 relative to the case body 14. The pivot shaft 15 is connected to this motor via, for example, a pulley, a belt, and a reducer.

The first arm section 7 comprises an arm section main body 21 formed in the shape of a long, hollow box, and two flat covers 22 and 23 (see Figure 4). The upper surface of the arm section main body 21 is open except for the tip end of the arm section main body 21. The lower surface of the arm section main body 21 is open except for the base end of the arm section main body 21. The cover 22 is fixed to the upper surface of the arm section main body 21 so as to cover the opening formed in the upper surface of the arm section main body 21. The cover 23 is fixed to the lower surface of the arm section main body 21 so as to cover the opening formed in the lower surface of the arm section main body 21.

A through-hole that penetrates vertically is formed in the underside of the base end of the arm main body 21. A through-hole that penetrates vertically is formed in the upper surface of the tip end of the arm main body 21. The first arm 7 includes a fixed member 24 that is fixed to the base end of the arm main body 21, and a hollow fixed shaft 25 and bearing presser member 26 that are fixed to the tip end of the arm main body 21. A pulley 27 is fixed to the fixed shaft 25.

The second arm section 8 comprises an arm section main body 29 formed in the shape of a long, hollow box, and two flat covers 30 and 31 (see Figure 4). The upper surface of the arm section main body 29 is open except for the tip end of the arm section main body 29. The lower surface of the arm section main body 29 is open except for the base end of the arm section main body 29. The cover 30 is fixed to the upper surface of the arm section main body 29 so as to cover the opening formed in the upper surface of the arm section main body 29. The cover 31 is fixed to the lower surface of the arm section main body 29 so as to cover the opening formed in the lower surface of the arm section main body 29.

A through-hole that penetrates vertically is formed in the underside of the base end of the arm main body 29. A through-hole that penetrates vertically is formed in the upper surface of the tip end of the arm main body 29. The second arm 8 includes a cylindrical fixing member 32 that is fixed to the base end of the arm main body 29, and a cylindrical fixing member 34 that is fixed to the tip end of the arm main body 29. A pulley 33 is fixed to the fixing member 32.

The hand 3 comprises a wafer mounting section 36 on which the wafer 2 is mounted, a hand base 37 constituting the base end of the hand 3, and a fixed member 38 fixed to the hand base 37. A pulley 39 is fixed to the fixed member 38. The wafer mounting section 36 is formed in the shape of a generally Y-shaped flat plate. The wafer mounting section 36 is fixed to the tip of the hand base 37. The hand base 37 is formed in a hollow shape. A more specific configuration of the hand 3 will be described later.

(Joint configuration)
5, the upper end 17a of the fixing member 17, which is the portion disposed above the upper surface of the cover 16, is composed of a large diameter portion 17b, a medium diameter portion 17c having a smaller outer diameter than the large diameter portion 17b, and a small diameter portion 17d having a smaller outer diameter than the medium diameter portion 17c. The large diameter portion 17b, the medium diameter portion 17c, and the small diameter portion 17d are disposed in this order from the bottom up. The lower surface of the large diameter portion 17b is in contact with the upper surface of the cover 16. A sealing member such as an O-ring is disposed between the lower surface of the large diameter portion 17b and the upper surface of the cover 16 to prevent liquid from entering the inner periphery of the large diameter portion 17b.

As described above, in the joint unit 10, the pivot shaft 15 is disposed on the inner periphery of the fixed member 17. The upper end 17a of the fixed member 17 forms part of the outer periphery of the main body unit 5 in the joint unit 10. Specifically, the upper end 17a forms the upper end of the outer periphery of the main body unit 5 in the joint unit 10. In this embodiment, the fixed member 17 is an annular support member that forms part of the outer periphery of the main body unit 5 in the joint unit 10.

The rotating shaft 15 is rotatably supported on the fixed member 17 via a bearing 42. The pulley 18 is fixed to the upper end of the small diameter portion 17d of the fixed member 17. The upper end of the rotating shaft 15 and the upper end 17a of the fixed member 17 are inserted into through holes formed in the underside of the base end of the arm main body 21. The upper end and small diameter portion 17d of the rotating shaft 15 are located inside the base end of the arm main body 21. The pulley 18 and bearing 42 are also located inside the base end of the arm main body 21.

The fixed member 24 is fixed to the base end of the arm main body 21 inside the base end side of the arm main body 21. The fixed member 24 is also fixed to the upper end of the rotation shaft 15 and is rotatably supported by the fixed member 17 via a bearing 42. Therefore, the arm main body 21 is rotatable relative to the fixed member 17. In other words, the first arm 7 is rotatable relative to the fixed member 17 and the case body 14.

The base end portion of the arm main body 21 constitutes the outer peripheral portion of the first arm section 7 at the joint section 10. The underside of the arm main body 21 is located below the upper end of the medium diameter section 17c of the fixing member 17. A cylindrical covering portion 21a is formed at the base end of the arm main body 21, covering (surrounding) the upper end of the medium diameter section 17c and the small diameter section 17d from the radial outside of the joint section 10. In other words, the arm main body 21 has a cylindrical covering portion 21a that covers the upper portion of the fixing member 17 from the radial outside of the joint section 10 over the entire circumference. In this embodiment, the arm main body 21 is a supported member that constitutes the outer peripheral portion of the first arm section 7 at the joint section 10.

The lower surface of the cylindrical covering portion 21a forms part of the lower surface of the arm main body 21. The lower surface of the cylindrical covering portion 21a is located below the upper end of the medium diameter portion 17c. In other words, the lower surface of the cylindrical covering portion 21a is located below the upper surface of the small diameter portion 17d, and the lower end of the cylindrical covering portion 21a is located below the upper end of the fixing member 17.

In the joint portion 11, the fixed shaft 25 is disposed inside the tip side of the arm main body 21. The fixed shaft 25 is formed in a long, thin cylindrical shape with its axis extending in the vertical direction. The lower end of the fixed shaft 25 is fixed to the arm main body 21. The pulley 27 is fixed to the upper end of the fixed shaft 25. The pulley 27 is disposed inside the base end side of the arm main body 29. The bearing presser member 26 is formed in an annular shape. The bearing presser member 26 is also formed in a flat, cylindrical shape with a short length in the vertical direction.

The bearing presser member 26 is fixed to the upper surface of the tip of the arm main body 21. The upper end of the bearing presser member 26 is located higher than the upper surface of the arm main body 21 and the upper surface of the cover 22. The bearing presser member 26 forms part of the outer peripheral surface of the first arm section 7 at the joint section 11. Specifically, the bearing presser member 26 forms the upper end of the outer peripheral surface of the first arm section 7 at the joint section 11. The bearing presser member 26 functions to press the bearing 45 (described below) from above. In this embodiment, the bearing presser member 26 is an annular support member that forms part of the outer peripheral portion of the first arm section 7 at the joint section 11.

The fixed member 32 is fixed to the underside of the base end of the arm main body 29. The outer surface of the upper end of the fixed member 32 contacts the inner surface of a through hole formed in the underside of the base end of the arm main body 29. The pulley 33 is fixed to the lower end of the fixed member 32. The fixed member 32 is inserted into the inner periphery of the bearing presser member 26, and the lower end of the fixed member 32 and the pulley 33 are positioned inside the tip end of the arm main body 21. A belt (not shown) is stretched between the pulley 33 and the pulley 18.

The fixed shaft 25 is disposed on the inner periphery of the fixed member 32 and pulley 33. The fixed member 32 and pulley 33 are rotatably supported on the fixed shaft 25 via bearings 44. The fixed member 32 and pulley 33 are also rotatably supported on the tip of the arm main body 21 and the bearing presser member 26 via bearings 45. Therefore, the fixed member 32 is rotatable relative to the arm main body 21 and the fixed shaft 25. In other words, the second arm 8 is rotatable relative to the first arm 7.

The base end portion of the arm main body 29 constitutes the outer peripheral portion of the second arm section 8 at the joint section 11. A recess 29b is formed on the underside of the base end of the arm main body 29, in which the upper end of the bearing presser member 26 is positioned. The recess 29b is formed in an annular shape that is recessed upward. The underside of the arm main body 29 is positioned below the upper end of the bearing presser member 26. In this embodiment, the arm main body 29 is the supported member that constitutes the outer peripheral portion of the second arm section 8 at the joint section 11.

The outer portion of the recess 29b in the radial direction of the joint portion 11 forms a cylindrical cover 29a that completely covers the upper end of the bearing presser member 26 from the radial outside of the joint portion 11. That is, a cylindrical cover 29a that completely covers the upper end of the bearing presser member 26 from the radial outside of the joint portion 11 is formed at the base end of the arm main body 29, and the arm main body 29 has a cylindrical cover 29a that completely covers the upper portion of the bearing presser member 26 from the radial outside of the joint portion 11. As described above, the underside of the arm main body 29 is located below the upper end of the bearing presser member 26, and the lower end of the cylindrical cover 29a is located below the upper end of the bearing presser member 26.

At the joint portion 12, a cylindrical hollow shaft portion 29c is formed inside the arm portion main body 29, protruding upward from the lower end side of the arm portion main body 29. The fixing member 34 is formed in an annular shape. The fixing member 34 is also formed in a flat cylindrical shape with a short vertical length. The fixing member 34 is fixed to the upper surface side of the tip of the arm portion main body 29. The upper end of the fixing member 34 is located above the upper surface of the arm portion main body 29 and the upper surface of the cover 30. The fixing member 34 forms part of the outer circumferential surface of the second arm portion 8 at the joint portion 12. Specifically, the fixing member 34 forms the upper end of the outer circumferential surface of the second arm portion 8 at the joint portion 12. In this embodiment, the fixing member 34 is an annular support side member that forms part of the outer circumferential portion of the second arm portion 8 at the joint portion 12.

The fixed member 38 is cylindrical and has a flange 38b. The fixed member 38 is fixed to the underside of the hand base 37. The pulley 39 is fixed to the lower end of the fixed member 38. The upper end of the pulley 39 and the lower end of the fixed member 38 are inserted into the inner periphery of the fixed member 34. The lower end of the pulley 39 is located inside the distal end of the arm main body 29. A belt (not shown) is stretched between the pulley 39 and the pulley 27. The hollow shaft 29c is located on the inner periphery of the pulley 39. The fixed member 38 and the pulley 39 are rotatably supported by the hollow shaft 29c via bearings 47. Therefore, the fixed member 38 and the pulley 39 are rotatable relative to the arm main body 29. In other words, the hand 3 is rotatable relative to the second arm 8.

The flange 38b of the fixed member 38 is formed in a circular ring shape that extends radially outward from the joint 12. The flange 38b is formed on the lower portion of the fixed member 38. The fixed member 38 forms part of the outer peripheral surface of the hand 3 at the joint 12. Specifically, the fixed member 38 forms the lower end of the outer peripheral surface of the hand 3 at the joint 12. A recess 38c is formed on the lower surface of the flange 38b, in which the upper end of the fixed member 34 is positioned. The recess 38c is formed in a circular ring shape that is recessed upward. The lower surface of the flange 38b is positioned lower than the upper end of the fixed member 34. In this embodiment, the fixed member 38 is a supported member that forms part of the outer peripheral portion of the hand 3 at the joint 12.

The outer portion of the recess 38c in the radial direction of the joint portion 12 forms a cylindrical covering portion 38a that completely covers the upper end portion of the fixing member 34 from the radial outside of the joint portion 12. That is, the fixing member 38 is formed with a cylindrical covering portion 38a that completely covers the upper end portion of the fixing member 34 from the radial outside of the joint portion 12, and the fixing member 38 is provided with a cylindrical covering portion 38a that completely covers the upper portion of the fixing member 34 from the radial outside of the joint portion 12. As described above, the lower surface of the flange 38b is located below the upper end of the fixing member 34, and the lower end of the cylindrical covering portion 38a is located below the upper end of the fixing member 34.

(Hand Composition)
FIG. 8 is a cross-sectional view taken along the line JJ in FIG.

In addition to the wafer mounting portion 36, hand base 37, and fixed member 38, the hand 3 also includes two edge contact members 48 with contact surfaces against which the edge of the wafer 2 contacts, two wafer mounting members 49 on which the wafer 2 is placed, a pressing member 50 that presses the wafer 2 against the contact surfaces of the edge contact members 48, and a movement mechanism 51 that moves the pressing member 50. The hand base 37 includes a hand base main body 53 and a cover 54 fixed to the top surface of the hand base main body 53.

The end surface abutment members 48 are arranged at two locations on the tip of the generally Y-shaped wafer mounting section 36. That is, the end surface abutment members 48 are arranged on the tip side of the hand 3. The wafer mounting members 49 are arranged on the base end side of the wafer mounting section 36. The wafer 2 is mounted on the two end surface abutment members 48 and two wafer mounting members 49.

The pressing member 50 comprises two rollers 56 that contact the edge surface of the wafer 2, a roller holding member 57 that rotatably holds the two rollers 56, and a base material 58 to which the roller holding member 57 is fixed. The rollers 56 are attached at two locations to the tip of the approximately Y-shaped roller holding member 57. The base material 58 is formed as a long, narrow rectangular flat plate with its thickness extending vertically. The base material 58 forms the base end portion of the pressing member 50. The roller holding member 57 is fixed to the tip, which is one end of the base material 58 in the longitudinal direction.

The movement mechanism 51 is disposed inside the hand base 37. That is, the movement mechanism 51 is disposed inside the base end side of the hand 3. Specifically, a recess that recesses downward from the top surface of the hand base main body 53 is formed in the hand base main body 53, and the movement mechanism 51 is disposed in this recess. The movement mechanism 51 includes an air cylinder 60 as a drive source, a slide shaft 61 that slides horizontally using the power of the air cylinder 60, and a shaft holding member 62 that slidably holds the slide shaft 61.

The air cylinder 60 is fixed to the hand base main body 53. The slide shaft 61 is formed in a long, thin cylindrical shape. The base end of the slide shaft 61, which is one end of the slide shaft 61 in the axial direction, is attached to the rod of the air cylinder 60. The base end of the substrate 58 is fixed to the tip of the slide shaft 61, which is the other end of the slide shaft 61 in the axial direction. In other words, the base end of the pressing member 50 is fixed to the tip of the slide shaft 61. The base end of the pressing member 50 is also connected to the movement mechanism 51.

A flange 61a is formed on the tip of the slide shaft 61, extending radially outward from the slide shaft 61. In this embodiment, the tip of the slide shaft 61 forms the flange 61a. The flange 61a is formed in an annular shape. When viewed in the axial direction of the slide shaft 61, the outer shape of the flange 61a is larger than the outer shape of the base material 58.

The shaft holding member 62 is formed in the shape of a rectangular parallelepiped block. The shaft holding member 62 is fixed to the hand base main body 53. A through hole 62a is formed in the shaft holding member 62, through which the slide shaft 61 is inserted. The slide shaft 61 is capable of sliding linearly relative to the shaft holding member 62. The air cylinder 60 moves the slide shaft 61 and pressing member 50 between a wafer holding position (see Figures 1 and 3) where the two rollers 56 contact the edge surface of the wafer 2, and a retracted position where the two rollers 56 are retracted away from the edge surface of the wafer 2.

The cover 54, which is fixed to the upper surface of the hand base body 53, covers the moving mechanism 51 from above. The cover 54 also covers the base end portion of the pressing member 50 from above. Specifically, the cover 54 covers most of the base material 58 from above when the pressing member 50 is positioned in the retracted position, and covers the base end portion of the base material 58 from above when the pressing member 50 is positioned in the wafer holding position. Even when the pressing member 50 is positioned in the wafer holding position, the tip of the slide shaft 61 is positioned below the cover 54, and the flange portion 61a is covered from above by the cover 54.

(Main effects of this embodiment)
As described above, in this embodiment, the main body 5 includes the annular fixing member 17 that forms part of the outer circumferential portion of the main body 5 at the joint 10, and the first arm 7 disposed above the main body 5 includes the arm main body 21 that forms the outer circumferential portion of the first arm 7 at the joint 10. In addition, in this embodiment, the arm main body 21 includes a cylindrical covering portion 21a that covers the entire upper periphery of the fixing member 17 from the radial outside of the joint 10, and the lower end of the cylindrical covering portion 21a is disposed below the upper end of the fixing member 17. Therefore, in this embodiment, unless liquid that has passed below the cylindrical covering portion 21a at the joint 10 passes above the fixing member 17, the liquid will not penetrate from the joint 10 into the main body 5. Therefore, in this embodiment, it is possible to prevent liquid that has dropped from the wafer 2 from penetrating from the joint 10 into the main body 5.

In this embodiment, the first arm 7 includes an annular bearing holder member 26 that forms part of the outer periphery of the first arm 7 at the joint 11, and the second arm 8, which is disposed above the first arm 7, includes an arm main body 29 that forms part of the outer periphery of the second arm 8 at the joint 11. Furthermore, in this embodiment, the arm main body 29 includes a cylindrical cover 29a that covers the entire upper periphery of the bearing holder member 26 from the radial outside of the joint 11, and the lower end of the cylindrical cover 29a is disposed below the upper end of the bearing holder member 26. Therefore, in this embodiment, unless liquid that passes below the cylindrical cover 29a at the joint 11 passes above the bearing holder member 26, the liquid will not penetrate from the joint 11 into the interior of the first arm 7. Therefore, in this embodiment, it is possible to prevent liquid that has fallen from the wafer 2 from penetrating from the joint 11 into the interior of the first arm 7.

In this embodiment, the second arm 8 includes an annular fixing member 34 that forms part of the outer periphery of the second arm 8 at the joint 12, and the hand 3 disposed above the second arm 8 includes a fixing member 38 that forms part of the outer periphery of the hand 3 at the joint 12. Furthermore, in this embodiment, the fixing member 38 includes a cylindrical covering portion 38a that covers the entire upper periphery of the fixing member 34 from the radial outside of the joint 12, and the lower end of the cylindrical covering portion 38a is disposed below the upper end of the fixing member 34. Therefore, in this embodiment, unless liquid that passes below the cylindrical covering portion 38a at the joint 12 passes above the fixing member 38, the liquid will not penetrate from the joint 12 into the interior of the second arm 8. Therefore, in this embodiment, it is possible to prevent liquid that has fallen from the wafer 2 from penetrating from the joint 12 into the interior of the second arm 8.

In this embodiment, the base end portion of the pressing member 50, whose base end is connected to the moving mechanism 51, is covered from above by a cover 54 that covers the moving mechanism 51 arranged inside the hand base 37 from above. Specifically, at least the base end portion of the substrate 58 is covered from above by the cover 54. Therefore, in this embodiment, for example, liquid that has fallen from the wafer 2 is less likely to adhere to at least the base end portion of the substrate 58. Therefore, in this embodiment, for example, the cover 54 can prevent liquid that has fallen from the wafer 2 from penetrating into the interior of the hand base 37.

In this embodiment, the slide shaft 61, to whose tip the base end of the pressing member 50 is fixed, is slidably held by a shaft holding member 62, which has a through hole 62a through which the slide shaft 61 is inserted. A flange 61a that extends radially outward from the tip of the slide shaft 61 is formed. Therefore, in this embodiment, for example, the flange 61a can prevent liquid that has fallen from the wafer 2 from passing through the through hole 62a of the shaft holding member 62 and entering the interior of the hand base 37.

(Other embodiments)
The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications can be made without departing from the spirit of the present invention.

In the above-described embodiment, the flange 61a formed on the tip side of the slide shaft 61 does not have to be the tip of the slide shaft 61. That is, the flange 61a only needs to be formed between the base end of the substrate 58 and the shaft holding member 62 in the axial direction of the slide shaft 61. Also, in the above-described embodiment, the arm 4 may be composed of three or more arm portions rotatably connected to each other. Furthermore, in the above-described embodiment, the robot 1 may have only one hand 3 and one arm 4. Also, in the above-described embodiment, the robot 1 may transport objects other than wafers 2. Also, in the above-described embodiment, the robot 1 is a robot for transporting objects, but the robot to which the present invention is applied may be a robot used for other purposes.

1. Robot (horizontal articulated robot)
2. Wafer (semiconductor wafer, transport object)
3 Hand (supported part)
4 Arm 5 Main body (support part)
7 First arm portion (supporting portion, supported portion, base end arm portion)
8. Second arm portion (supporting portion, supported portion, distal arm portion)
10-12 joint portion 17 fixed member (support side member)
21 Arm body (supported member)
21a Cylindrical cover portion 26 Bearing pressing member (support side member)
29 Arm body (supported member)
29a Cylindrical covering portion 34 Fixed member (supporting side member)
38 Fixed member (supported side member)
38a Cylindrical cover portion 48 End surface abutment member 50 Pressing member 51 Moving mechanism 54 Cover 61 Slide shaft 61a Flange portion 62 Shaft holding member 62a Through hole

Claims (6)

In a horizontal articulated robot whose arm moves horizontally,
a support portion and a supported portion disposed above the support portion and rotatably connected to the support portion,
the support portion includes an annular support side member that forms at least a part of an outer peripheral portion of the support portion at a joint portion that is a connecting portion between the support portion and the supported portion,
the supported portion includes a supported-side member that forms at least a part of an outer peripheral portion of the supported portion at the joint portion,
the supported member includes a cylindrical covering portion that covers at least an upper portion of the supporting member from the radial outside of the joint portion over the entire circumference,
a lower end of the cylindrical covering portion is disposed below an upper end of the support member ,
a first gap, which is a gap formed between the cylindrical cover portion and the support-side member, at an outer end in a radial direction of the joint portion, which is an open opening;
A horizontal articulated robot characterized in that the entire first gap is formed above the lower end of the opening, and when a space connected to the upper end of the first gap is formed inside the joint portion, the entire space is formed above the opening . a hand as the supported part on which the transport object is placed,
2. The horizontal articulated robot according to claim 1, wherein the arm includes a distal arm portion as the support portion to which the hand is rotatably connected at a distal end thereof. A hand is provided on which an object to be conveyed is placed,
2. The horizontal articulated robot according to claim 1, wherein the arm comprises a tip-side arm portion as the supported portion to which the hand is rotatably connected at its tip end, and a base-side arm portion as the supporting portion to which the base end side of the tip-side arm portion is rotatably connected at its tip end. a main body portion as the support portion to which a base end side of the arm is rotatably connected,
2. The horizontal articulated robot according to claim 1, wherein the arm includes a base-end arm portion as the supported portion, the base end of which is rotatably connected to the main body portion. a hand on which an object to be conveyed is placed and which is rotatably connected to the tip end of the arm;
the hand includes an end surface abutting member that is disposed on the tip side of the hand and has an abutting surface with which an end surface of the transported object abuts, a pressing member that presses the transported object toward the abutting surface, a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member, and a cover that covers the moving mechanism from above,
a base end of the pressing member is connected to the moving mechanism,
2. The horizontal articulated robot according to claim 1 , wherein the cover covers a base end portion of the pressing member from above. a hand on which an object to be conveyed is placed and which is rotatably connected to the tip end of the arm;
the hand includes an end surface abutting member that is disposed on the tip side of the hand and has an abutting surface with which an end surface of the transported object abuts, a pressing member that presses the transported object toward the abutting surface, a moving mechanism that is disposed inside the base end side of the hand and moves the pressing member, and a cover that covers the moving mechanism from above,
the moving mechanism includes a slide shaft to the tip of which the base end of the pressing member is fixed, and a shaft holding member that slidably holds the slide shaft,
The shaft holding member has a through hole through which the slide shaft is inserted,
The slide shaft is slidable linearly relative to the shaft holding member,
2. The horizontal articulated robot according to claim 1 , wherein a flange portion extending radially outward from the tip end of the slide shaft is formed.