JPH01100359U - - Google Patents

Info

Publication number
JPH01100359U
JPH01100359U JP19678087U JP19678087U JPH01100359U JP H01100359 U JPH01100359 U JP H01100359U JP 19678087 U JP19678087 U JP 19678087U JP 19678087 U JP19678087 U JP 19678087U JP H01100359 U JPH01100359 U JP H01100359U
Authority
JP
Japan
Prior art keywords
electrode
charged particle
particle beam
beam device
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19678087U
Other languages
Japanese (ja)
Other versions
JPH0517797Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19678087U priority Critical patent/JPH0517797Y2/ja
Publication of JPH01100359U publication Critical patent/JPH01100359U/ja
Application granted granted Critical
Publication of JPH0517797Y2 publication Critical patent/JPH0517797Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図は本考案を実施した静電レ
ンズの一部を示す断面図および斜視図である。 １……接地電極、２……中間電極、３……電源
、４……絶縁碍子、５……排気孔、６……高抵抗
膜。 1 and 2 are a sectional view and a perspective view showing a part of an electrostatic lens embodying the present invention. 1... Ground electrode, 2... Intermediate electrode, 3... Power source, 4... Insulator, 5... Exhaust hole, 6... High resistance film.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 複数の電極が絶縁碍子を間に挾んで積層され、
該電極間に高電圧が印加される荷電粒子線装置に
おいて、該碍子表面に、一方の電極と他方の電極
とを電気的に接続する高抵抗物質を部分的に付着
するように構成したことを特徴とする荷電粒子線
装置における電極構造体。 Multiple electrodes are stacked with insulators in between,
In a charged particle beam device in which a high voltage is applied between the electrodes, a high resistance substance is partially attached to the surface of the insulator to electrically connect one electrode and the other electrode. An electrode structure in a charged particle beam device.
JP19678087U 1987-12-25 1987-12-25 Expired - Lifetime JPH0517797Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19678087U JPH0517797Y2 (en) 1987-12-25 1987-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19678087U JPH0517797Y2 (en) 1987-12-25 1987-12-25

Publications (2)

Publication Number Publication Date
JPH01100359U true JPH01100359U (en) 1989-07-05
JPH0517797Y2 JPH0517797Y2 (en) 1993-05-12

Family

ID=31487375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19678087U Expired - Lifetime JPH0517797Y2 (en) 1987-12-25 1987-12-25

Country Status (1)

Country Link
JP (1) JPH0517797Y2 (en)

Also Published As

Publication number Publication date
JPH0517797Y2 (en) 1993-05-12

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