JPH01100360U - - Google Patents
Info
- Publication number
- JPH01100360U JPH01100360U JP19677987U JP19677987U JPH01100360U JP H01100360 U JPH01100360 U JP H01100360U JP 19677987 U JP19677987 U JP 19677987U JP 19677987 U JP19677987 U JP 19677987U JP H01100360 U JPH01100360 U JP H01100360U
- Authority
- JP
- Japan
- Prior art keywords
- cooling tank
- sub
- lens
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例を説明するための図である。
１：鏡筒、２：主冷却槽、３：液体ヘリウム、
４：超伝導レンズ、５：超伝導コイル、６：シー
ルドケース、８：ライナチユーブ、９：試料、１
０：副冷却槽、１３，１４：熱シールド板、１６
，１７：Ｘ線遮蔽部材。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a diagram for explaining a conventional example. 1: lens barrel, 2: main cooling tank, 3: liquid helium,
4: Superconducting lens, 5: Superconducting coil, 6: Shield case, 8: Liner tube, 9: Sample, 1
0: Subcooling tank, 13, 14: Heat shield plate, 16
, 17: X-ray shielding member.
Claims (1)
と、該コイルを冷却するための主冷却槽と、該主
冷却槽を熱シールドするための副冷却槽とを備え
、前記副冷却槽内にＸ線を遮蔽するためのＸ線遮
蔽部材を設置したことを特徴とする電子顕微鏡等
における電子レンズ。 (2) 前記Ｘ線遮蔽部材として熱伝導性の高いも
のを使用し且つ副冷却槽内壁の上端部に固定した
ことを特徴とする実用新案登録請求の範囲第１項
記載の電子顕微鏡等における電子レンズ。[Claims for Utility Model Registration] (1) A superconducting coil for forming a lens magnetic field, a main cooling tank for cooling the coil, and a sub-cooling tank for heat shielding the main cooling tank. An electron lens for an electron microscope or the like, characterized in that an X-ray shielding member for shielding X-rays is installed in the sub-cooling tank. (2) The electron microscope, etc. described in claim 1 of the utility model registration claim, characterized in that the X-ray shielding member is made of a material with high thermal conductivity and is fixed to the upper end of the inner wall of the sub-cooling tank. lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19677987U JPH01100360U (en) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19677987U JPH01100360U (en) | 1987-12-25 | 1987-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100360U true JPH01100360U (en) | 1989-07-05 |
Family
ID=31487374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19677987U Pending JPH01100360U (en) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100360U (en) |
-
1987
- 1987-12-25 JP JP19677987U patent/JPH01100360U/ja active Pending
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