JPH01100434U - - Google Patents
Info
- Publication number
- JPH01100434U JPH01100434U JP19515987U JP19515987U JPH01100434U JP H01100434 U JPH01100434 U JP H01100434U JP 19515987 U JP19515987 U JP 19515987U JP 19515987 U JP19515987 U JP 19515987U JP H01100434 U JPH01100434 U JP H01100434U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- frame
- mask
- glass mask
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 2
- 239000002826 coolant Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Description
第１図は本考案の実施例の正面図、第２図は本
考案の実施例の平面図である。
１……上マスクホルダー、２……下マスクホル
ダー、７……冷却用金属管、８……チユーブ、１
１……被露光材。
FIG. 1 is a front view of an embodiment of the present invention, and FIG. 2 is a plan view of an embodiment of the present invention. 1... Upper mask holder, 2... Lower mask holder, 7... Metal tube for cooling, 8... Tube, 1
1... Material to be exposed.
Claims (1)
ームと該フレームを固定するホルダーからなる露
光装置の露光部において、前記ホルダーに当接し
て、冷却材を流すための金属管を配置したことを
特徴とするマスクホルダーの冷却装置。 A mask comprising a glass mask, a frame for bonding the glass mask, and a holder for fixing the frame in an exposure unit of the exposure device, in which a metal tube for flowing a coolant is arranged in contact with the holder. Cooling device for the holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19515987U JPH01100434U (en) | 1987-12-23 | 1987-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19515987U JPH01100434U (en) | 1987-12-23 | 1987-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100434U true JPH01100434U (en) | 1989-07-05 |
Family
ID=31485851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19515987U Pending JPH01100434U (en) | 1987-12-23 | 1987-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100434U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010099062A (en) * | 2008-09-25 | 2010-05-06 | Nihon Univ | Subsurface environment controller and subsurface environment control method for plant planted in vessel |
-
1987
- 1987-12-23 JP JP19515987U patent/JPH01100434U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010099062A (en) * | 2008-09-25 | 2010-05-06 | Nihon Univ | Subsurface environment controller and subsurface environment control method for plant planted in vessel |
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