JPH01100901U

JPH01100901U -

Info

Publication number: JPH01100901U
Application number: JP19802687U
Authority: JP
Priority date: 1987-12-26
Filing date: 1987-12-26
Publication date: 1989-07-06

Description

[Brief explanation of the drawing]

第１図は本考案の第１の実施例を示す正断面図
、第２図は第２の実施例を示す正断面図、第３図
および第４図は前記第１または第２の実施例の使
用例を示す概略的斜視図、第５図は従来のクリー
ンルームにおける空気圧回路システムを概略的に
示す圧力回路図である。１……入力管路、２，３……排気管路、４，５
……出力管路、１ａ，２ａ，３ａ，４ａ，５ａ…
…開口、６……ノズル、７……デイフユーザ、８
……吸入ポート、９……吸入空間、１０，１０′
……マニホールドベース、１１……エアバルブ、
１２……シリンダ、１３……集塵ポート、１４…
…スペーサ。 FIG. 1 is a front sectional view showing the first embodiment of the present invention, FIG. 2 is a front sectional view showing the second embodiment, and FIGS. 3 and 4 are the first or second embodiment. FIG. 5 is a pressure circuit diagram schematically showing a conventional pneumatic circuit system in a clean room. 1... Input pipe line, 2, 3... Exhaust pipe line, 4, 5
...Output pipes, 1a, 2a, 3a, 4a, 5a...
...Opening, 6...Nozzle, 7...Diff user, 8
... Suction port, 9 ... Suction space, 10, 10'
...Manifold base, 11...Air valve,
12...Cylinder, 13...Dust collection port, 14...
…Spacer.

Claims

[Scope of utility model registration request]

In a manifold base 10, which is integrally attached to an air valve 11 for switching the direction of pressure air, and in which pipes 1...5 for input air, output air, discharge air, etc. are arranged for the air valve 11, the pipes An air valve characterized in that a nozzle 6 is formed in the middle of a required pipe among the channels 1...5, and a suction space 9 that is open to the atmosphere via a suction port 8 is formed at the tip of the nozzle 6. manifold base.