JPH01104034U - - Google Patents

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Publication number
JPH01104034U
JPH01104034U JP19757387U JP19757387U JPH01104034U JP H01104034 U JPH01104034 U JP H01104034U JP 19757387 U JP19757387 U JP 19757387U JP 19757387 U JP19757387 U JP 19757387U JP H01104034 U JPH01104034 U JP H01104034U
Authority
JP
Japan
Prior art keywords
pitch
wafer
holder
groove
explanatory diagrams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19757387U
Other languages
English (en)
Other versions
JPH0225236Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19757387U priority Critical patent/JPH0225236Y2/ja
Publication of JPH01104034U publication Critical patent/JPH01104034U/ja
Application granted granted Critical
Publication of JPH0225236Y2 publication Critical patent/JPH0225236Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案によるウエーハ・ホールダの平
面図、第２図はその一部切断立面図、第３図、第
４図及び第５図はウエーハ・ホールダの動作説明
図、第６Ａ図、第６Ｂ図及び第６Ｃ図はピツチ切
替動作の説明図、第７図及び第８図は移載機の説
明図、第９図及び第１０図は移送ボートの説明図
である。 １……ウエーハ・ホールダ、２，３……挾持腕
、４……溝、５……支承突部、６，８……ロツド
、７，９……連結部材、１０……ウエーハ、１１
……ばね、１２……案内ロツド、１３，１４……
挿通孔、１５……軸、１６……モータ、１７……
カム、１８……カム・フオロア、３０……移載機
、３１……カセツト、３２……移載位置、３３…
…押上機、４０……ホールダ駆動装置、５０……
移送ボート、５１……横部材、５２……側杆、５
３……溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. １対の可動挾持腕の対向面にピツチＰで形成し
    た直線状溝のうちピツチｎＰ（ｎは自然数）ごと
    の溝の下端部分にウエーハが保持される支承突部
    を設けてなるピツチ切替用ウエーハ・ホールダ。
JP19757387U 1987-12-28 1987-12-28 Expired JPH0225236Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19757387U JPH0225236Y2 (ja) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19757387U JPH0225236Y2 (ja) 1987-12-28 1987-12-28

Publications (2)

Publication Number Publication Date
JPH01104034U true JPH01104034U (ja) 1989-07-13
JPH0225236Y2 JPH0225236Y2 (ja) 1990-07-11

Family

ID=31488119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19757387U Expired JPH0225236Y2 (ja) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH0225236Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06163500A (ja) * 1992-11-26 1994-06-10 Sugai:Kk 基板の洗浄方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06163500A (ja) * 1992-11-26 1994-06-10 Sugai:Kk 基板の洗浄方法およびその装置

Also Published As

Publication number Publication date
JPH0225236Y2 (ja) 1990-07-11

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