JPH01104037U - - Google Patents
Info
- Publication number
- JPH01104037U JPH01104037U JP19874087U JP19874087U JPH01104037U JP H01104037 U JPH01104037 U JP H01104037U JP 19874087 U JP19874087 U JP 19874087U JP 19874087 U JP19874087 U JP 19874087U JP H01104037 U JPH01104037 U JP H01104037U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- shafts
- spring
- compressed fluid
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 6
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Discharge By Other Means (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は圧縮勝手のスプリングを用いた本案装
置の部分断面図、第２図は第１図の―線断面
図、第３図は引張勝手のスプリングを用いた本案
装置の要部の部分断面図、第４図は圧縮勝手のス
プリングを用いた本案装置の別の実施例の要部の
部分断面図である。
１……ウエハ、２……シリンダ、３，３……試
料挾持部材、５……圧縮流体供給管、７，７……
シヤフト、８，８……圧縮勝手スプリング、１３
……引張勝手スプリング。
Figure 1 is a partial sectional view of the proposed device using a compression spring, Figure 2 is a sectional view taken along the line - - in Figure 1, and Figure 3 is a partial sectional view of the main parts of the proposed device using a tension spring. FIG. 4 is a partial sectional view of a main part of another embodiment of the present device using a compression spring. 1... Wafer, 2... Cylinder, 3, 3... Sample holding member, 5... Compressed fluid supply pipe, 7, 7...
Shaft, 8, 8... Compression spring, 13
...Tensile spring.
Claims (1)
、該シリンダ内に圧縮流体を供給すべく前記シリ
ンダに連結された圧縮流体供給管と、前記シリン
ダ内で夫々の一端が相対向すべく該シリンダに挿
入された２本のシヤフトと、前記２本のシヤフト
をその長さ方向に付勢すべく前記シリンダ内に設
けたスプリングと、前記２本のシヤフトの前記シ
リンダ外にある他端に夫々固着された試料挾持部
材とを具備し、前記圧縮流体の供給によつてスプ
リングの付勢力に抗する力を与えて前記試料挾持
部材間の間隔を拡大または縮小すべく構成してあ
ることを特徴とする保持装置。 ２ 前記圧縮流体供給管は前記シリンダの支持部
材である実用新案登録請求の範囲第１項記載の保
持装置。 ３ 前記シヤフトと前記シリンダ内の一端と前記
シリンダの内端面との間夫々に圧縮勝手のスプリ
ングを設けた実用新案登録請求の範囲第１項記載
の保持装置。 ４ 前記２本のシヤフトの前記シリンダ内で相対
向する端面間に引張勝手のスプリングを張設した
実用新案登録請求の範囲第１項記載の保持装置。 ５ 前記２本のシヤフトの前記シリンダ内で相対
向する端面間に圧縮勝手のスプリングを張設した
実用新案登録請求の範囲第１項記載の保持装置。[Claims for Utility Model Registration] 1. A device for holding a plate-shaped object, including a cylinder, a compressed fluid supply pipe connected to the cylinder for supplying compressed fluid into the cylinder, and one end of each of the pipes connected to the cylinder to supply compressed fluid into the cylinder. two shafts inserted into the cylinder so as to face each other, a spring provided inside the cylinder to bias the two shafts in the longitudinal direction, and a spring inserted outside the cylinder of the two shafts. and sample clamping members fixed to the other ends of the sample clamping members, respectively, and is configured to apply a force against the biasing force of the spring by supplying the compressed fluid to enlarge or reduce the distance between the sample clamping members. A holding device characterized by: 2. The holding device according to claim 1, wherein the compressed fluid supply pipe is a support member for the cylinder. 3. The holding device according to claim 1, wherein compressible springs are provided between the shaft, one end of the cylinder, and the inner end surface of the cylinder. 4. The holding device according to claim 1, wherein a tensionable spring is provided between opposing end surfaces of the two shafts in the cylinder. 5. The holding device according to claim 1, wherein a compressible spring is stretched between opposing end surfaces of the two shafts in the cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19874087U JPH01104037U (en) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19874087U JPH01104037U (en) | 1987-12-25 | 1987-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104037U true JPH01104037U (en) | 1989-07-13 |
Family
ID=31489229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19874087U Pending JPH01104037U (en) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104037U (en) |
-
1987
- 1987-12-25 JP JP19874087U patent/JPH01104037U/ja active Pending