JPH01104637U - - Google Patents
Info
- Publication number
- JPH01104637U JPH01104637U JP1987201433U JP20143387U JPH01104637U JP H01104637 U JPH01104637 U JP H01104637U JP 1987201433 U JP1987201433 U JP 1987201433U JP 20143387 U JP20143387 U JP 20143387U JP H01104637 U JPH01104637 U JP H01104637U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- base
- elastic body
- holding device
- roughened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987201433U JPH01104637U (sr) | 1987-12-29 | 1987-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987201433U JPH01104637U (sr) | 1987-12-29 | 1987-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104637U true JPH01104637U (sr) | 1989-07-14 |
Family
ID=31491792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987201433U Pending JPH01104637U (sr) | 1987-12-29 | 1987-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104637U (sr) |
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1987
- 1987-12-29 JP JP1987201433U patent/JPH01104637U/ja active Pending