JPH01106565U - - Google Patents
Info
- Publication number
- JPH01106565U JPH01106565U JP49288U JP49288U JPH01106565U JP H01106565 U JPH01106565 U JP H01106565U JP 49288 U JP49288 U JP 49288U JP 49288 U JP49288 U JP 49288U JP H01106565 U JPH01106565 U JP H01106565U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- substrate
- ejected
- gas
- plasma cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49288U JPH01106565U (2) | 1988-01-06 | 1988-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49288U JPH01106565U (2) | 1988-01-06 | 1988-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106565U true JPH01106565U (2) | 1989-07-18 |
Family
ID=31199567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49288U Pending JPH01106565U (2) | 1988-01-06 | 1988-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106565U (2) |
-
1988
- 1988-01-06 JP JP49288U patent/JPH01106565U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01106565U (2) | ||
| JPH01106564U (2) | ||
| JPS63187326U (2) | ||
| JPH0318165U (2) | ||
| JPH02113333U (2) | ||
| JPS62110264U (2) | ||
| JPH0186227U (2) | ||
| JPS59129872U (ja) | プラズマエツチング装置 | |
| JPH0272577U (2) | ||
| JPS60169257U (ja) | プラズマｃｖｄ装置 | |
| JPH0418452U (2) | ||
| JPS62183516U (2) | ||
| JPS6232136U (2) | ||
| JPS60118236U (ja) | プラズマエツチング装置用電極 | |
| JPS62145334U (2) | ||
| JPH0426569U (2) | ||
| JPH01118936U (2) | ||
| JPS61203544U (2) | ||
| JPS6340799U (2) | ||
| JPS62116586U (2) | ||
| JPS62157186U (2) | ||
| JPS6289140U (2) | ||
| JPS5842157U (ja) | 真空蒸着装置 | |
| JPH02108335U (2) | ||
| JPS641442U (2) |