JPH01108927U - - Google Patents
Info
- Publication number
- JPH01108927U JPH01108927U JP1988003534U JP353488U JPH01108927U JP H01108927 U JPH01108927 U JP H01108927U JP 1988003534 U JP1988003534 U JP 1988003534U JP 353488 U JP353488 U JP 353488U JP H01108927 U JPH01108927 U JP H01108927U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafers
- grooves
- types
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988003534U JPH01108927U (da) | 1988-01-14 | 1988-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988003534U JPH01108927U (da) | 1988-01-14 | 1988-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108927U true JPH01108927U (da) | 1989-07-24 |
Family
ID=31205252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988003534U Pending JPH01108927U (da) | 1988-01-14 | 1988-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108927U (da) |
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1988
- 1988-01-14 JP JP1988003534U patent/JPH01108927U/ja active Pending