JPH01109647A - Rotary anode for x-ray tube and its manufacture - Google Patents
Rotary anode for x-ray tube and its manufactureInfo
- Publication number
- JPH01109647A JPH01109647A JP26529687A JP26529687A JPH01109647A JP H01109647 A JPH01109647 A JP H01109647A JP 26529687 A JP26529687 A JP 26529687A JP 26529687 A JP26529687 A JP 26529687A JP H01109647 A JPH01109647 A JP H01109647A
- Authority
- JP
- Japan
- Prior art keywords
- brazing
- alloy layer
- heat storage
- layer
- ray tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000463 material Substances 0.000 claims abstract description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 18
- 239000010439 graphite Substances 0.000 claims abstract description 18
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 14
- 229910001182 Mo alloy Inorganic materials 0.000 claims abstract description 11
- 229910001080 W alloy Inorganic materials 0.000 claims abstract description 9
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 7
- 238000002844 melting Methods 0.000 claims abstract description 6
- 230000008018 melting Effects 0.000 claims abstract description 5
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 238000005219 brazing Methods 0.000 claims description 43
- 238000005338 heat storage Methods 0.000 claims description 23
- 239000011232 storage material Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 abstract description 5
- 238000005476 soldering Methods 0.000 abstract 3
- 238000012360 testing method Methods 0.000 description 26
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 15
- 239000000945 filler Substances 0.000 description 12
- 239000002648 laminated material Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910004696 Ti—Cu—Ni Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、Ｘ４！管用回転陽極の製造方法に関し、特に
高負荷用のＸ線管用回転陽極の製造方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to X4! The present invention relates to a method of manufacturing a rotating anode for a tube, and particularly to a method of manufacturing a rotating anode for a high-load X-ray tube.
［従来の技術］
一般に、Ｘ線管用回転陽極（以下、ターゲットと呼ぶ）
は、その特性として、高負荷に耐え、且つ、高融点であ
ることが要求される。そこで、従来は、Ｒｅ −Ｗ ／
Ｍ ｏ張り合わせ材料がＸ線管用ターゲットとして用
いられている。さらに、ターゲットの特性を向上させた
高負荷用のターゲットとして用いるために、ターゲット
自身を大型化（大径化、厚板化）して、ターゲットの蓄
熱容量を大きくする方法が採用されている。[Prior art] Generally, a rotating anode for an X-ray tube (hereinafter referred to as a target)
is required to withstand high loads and have a high melting point. Therefore, conventionally, Re −W /
Mo laminate materials have been used as targets for X-ray tubes. Furthermore, in order to use the target as a high-load target with improved target characteristics, a method has been adopted in which the target itself is made larger (larger diameter, thicker plate) to increase the heat storage capacity of the target.
しかしながら、金属からなるターゲットの大型化は、一
方で、熱容量を増大させることができるものの、ターゲ
ット自身の質量をも増大させることになり、このため、
高速回転中の回転機構に種々の不都合を生じさせ、また
、定常回転数に到達するまでの時間を長くしてしまう等
、の問題があった。However, while increasing the size of a metal target can increase its heat capacity, it also increases the mass of the target itself.
There have been problems such as causing various inconveniences to the rotating mechanism during high-speed rotation, and prolonging the time it takes to reach a steady rotational speed.
そこで、近年は、熱容量が大きく、且つ、軽量であるグ
ラファイトを蓄熱材として用いて、Ｒｅ−Ｗ ／ Ｍ
ｏ張り合わせ材料のＭｏ側に、蓄熱材をろう付けにより
接合して組み合わせた構造の高負荷用のターゲットが研
究されている。Therefore, in recent years, graphite, which has a large heat capacity and is lightweight, has been used as a heat storage material for Re-W/M.
o A high-load target with a structure in which a heat storage material is bonded to the Mo side of the bonded material by brazing is being researched.
一般にグラフディトと高融点金属との結合に用いられる
従来のろう材には、特開昭６１−１１１９７９号公報に
記載されるように、Ｔｉ−Ｃｕ−Ｎｉ。Conventional brazing filler metals generally used for bonding Graphite and high-melting point metals include Ti-Cu-Ni, as described in JP-A-61-111979.
Ｔｉ−Ｃｕ−３ｔ、Ｔｉ−７８ＡＴｉ−７８Ａ。Ti-Cu-3t, Ti-78ATi-78A.
Ｆｅ−３６〜４５Ｎｉ−Ｔｉ、３５Ａｕ−３５Ｎｉ３０
Ｍ ｏや、或いはＭｏ−Ｃｏ、Ｚｒ−Ｔｉ等が用いら
れていた。Fe-36~45Ni-Ti, 35Au-35Ni30
Mo, Mo--Co, Zr--Ti, etc. have been used.
［発明が解決しようとする問題点］
ところ゛が、上述の成分からなるろう材を用いた従来の
高負荷用のＸ線管用のターゲットは、ろう付け工程中又
は実際に使用される高真空中の高温（１２００℃）状態
においては、蓄熱材とろう材との境界、即ち、ろう付け
部付近の温度が、１０００〜１２００℃の高温になると
、グラファイトとろう材との境界に、ろう材成分による
金属炭化物が生成してしまう欠点がある。[Problems to be Solved by the Invention] However, the conventional target for high-load X-ray tubes using a brazing filler metal made of the above-mentioned components is not suitable for use during the brazing process or in the high vacuum in which it is actually used. When the temperature at the boundary between the heat storage material and the brazing material, that is, near the brazing part, reaches a high temperature of 1000 to 1,200°C, the brazing material components will be absorbed at the boundary between the graphite and the brazing material. There is a drawback that metal carbides are generated due to
すなわち、金属炭化物は、一般に硬くて脆弱であるばか
りでなく、生成時に体積変化が生じるなめ、Ｒｅ −Ｗ
／ Ｍ ｏ張り合わせ林料と蓄熱材との間に剥離が生
じ、耐熱性及び耐衝撃性を低減させ、抗折力の殆どない
実用に耐えないターゲットにしてしまうという問題があ
った。In other words, metal carbides are not only hard and brittle in general, but also undergo volume changes during formation;
/Mo There was a problem in that peeling occurred between the laminated forest material and the heat storage material, reducing heat resistance and impact resistance, making the target impractical with almost no transverse rupture strength.
そこで、本発明の目的は、上記欠点に鑑み、金属炭化物
の生じない高負荷用のＸ線管用回転陽極とその製造法を
提供することである。SUMMARY OF THE INVENTION In view of the above drawbacks, an object of the present invention is to provide a rotating anode for a high-load X-ray tube that does not generate metal carbides, and a method for manufacturing the same.
［問題点を解決するための手段］
本発明によれば、Ｍｏ又はＭｏ合金層にＷ又はＷ合金層
を張り合わせて形成された張り合わせ材料と、グラファ
イトを含む蓄熱材と、前記張り合わせ材料のうちのＭＯ
又はＭｏ合金層と前記蓄熱材との間に介在するＲｕ−Ｐ
ｄからなるろう材とを有し、前記張り合わせ材料と蓄熱
材とは、前記ろう材を介して接合されていることを特徴
とするＸ線管用回転陽極が得られる。[Means for Solving the Problems] According to the present invention, a bonding material formed by bonding a W or W alloy layer to a Mo or Mo alloy layer, a heat storage material containing graphite, and one of the bonding materials M.O.
Or Ru-P interposed between the Mo alloy layer and the heat storage material
A rotary anode for an X-ray tube is obtained, characterized in that the laminated material and the heat storage material are joined via the brazing material.
さらに、本発明によれば、Ｍｏ又はＭｏ合金層にＷ又は
Ｗ合金層を張り合わせて形成された張り合わせ材料と、
グラファイトを含む蓄熱材とＲｕ−Ｐｄからなるろう材
とを準備する準備工程と、前記張り合わせ材料のうちの
Ｍｏ又はＭｏ合金層と前記蓄熱材との間に、前記ろう材
を介在させて、真空中で、荷重を加えながら加熱し、前
記ろう材を溶解させた後冷却するろう付け工程とを有す
ることを特徴とするＸ線管用回転陽極のＩ！！遣方法が
得られる。Furthermore, according to the present invention, a bonded material formed by bonding a W or W alloy layer to a Mo or Mo alloy layer;
A preparation step of preparing a heat storage material containing graphite and a brazing material made of Ru-Pd, and interposing the brazing material between the Mo or Mo alloy layer of the laminated material and the heat storage material, and I! of a rotating anode for an X-ray tube, which comprises a brazing step of heating while applying a load, melting the brazing material, and then cooling. ! You can find out how to send money.
即ち、本発明は、Ｗ又は、Ｗ合金（Ｒｅ−Ｗ。That is, the present invention is directed to W or a W alloy (Re-W).
Ｔｈａ２ Ｗ、Ｒｕ Ｗ、Ｚｒｏ２ Ｗ等）とＭｏ又
はＭｏ合金（Ｈｆ−Ｍｏ、ＺｒＯｘ −Ｍｏ。Tha2 W, Ru W, Zro2 W, etc.) and Mo or Mo alloy (Hf-Mo, ZrOx-Mo.
Ａ＋ｉ０ｉ Ｍｏ、Ｃｏ Ｍｏ等）とからなる張り
合わせ材料のＭｏ側に、グラファイトを含む蓄熱材をろ
う付けする場合に、そのろう材としてＲｕ−Ｐｄを使用
するものである。これは、ろう材が剥離の原因となる炭
化物を生成せず、また、溶解したろう材はグラファイト
に良く溶解し、いわゆる混合層が形成されるため、良好
な接合強度を発揮し、一方、ＭＯＩＩ］！Ｉとの濡れ性
も非常に良く、均一なろう付けが可能だからである。し
かも、ろう材によるガス成分（特に、水素ガス）を吸収
するゲッター効果が発揮されることにより、Ｘ線管内部
のＷｔＪｉガス成分を吸収し、より高真空にするように
作用して、結果的に、耐電圧性に優れたＸ線管を形成す
ることになる。When a heat storage material containing graphite is brazed to the Mo side of a bonded material consisting of A+i0i Mo, Co Mo, etc.), Ru-Pd is used as the brazing material. This is because the brazing filler metal does not produce carbides that cause peeling, and the melted brazing filler metal dissolves well in graphite, forming a so-called mixed layer, so it exhibits good bonding strength. ]! This is because the wettability with I is also very good and uniform brazing is possible. Moreover, the getter effect of absorbing gas components (especially hydrogen gas) by the brazing material absorbs the WtJi gas components inside the X-ray tube, working to create a higher vacuum, resulting in In addition, an X-ray tube with excellent voltage resistance is formed.
また、ＲｕとＰｄからなるろう材の化学組成は、Ｒｕが
５〜３０重量％残部Ｐｄが好ましく、最も好ましくはＲ
ｕが５〜２０ｆ！量％残部Ｐｄであり、この数値限定を
したのは、純パラジウムろう材及びＲｕが重量で４０％
以上残部Ｐｄの化学組成のろう材は、ヒートサイクル試
験においてグラファイト部分が破断を生ずる為で、また
、最も好ましくは、Ｒｕが５〜２０重量％残部Ｐｄとし
たのは、純パラジウムろう材及びＲｕが重量３０％以上
残部Ｐｄの化学組成のろう材は、接合部の高温抗折力が
弱いからである。Further, the chemical composition of the brazing filler metal consisting of Ru and Pd is preferably 5 to 30% by weight of Ru and the balance being Pd, and most preferably R
u is 5~20f! The balance is Pd by weight, and this value is limited because the pure palladium brazing filler metal and Ru are 40% by weight.
This is because the graphite portion of the brazing filler metal with the above-mentioned chemical composition with the balance being Pd causes breakage in the heat cycle test, and most preferably, the reason why the balance Pd is 5 to 20% by weight is that the pure palladium brazing filler metal This is because a brazing filler metal having a chemical composition of 30% or more by weight and the balance being Pd has a weak high-temperature transverse rupture strength at the joint.
［実施例コ 本発明の実施例について図面を参照して説明する。[Example code] Embodiments of the present invention will be described with reference to the drawings.
まず、第１図に示すＸ線管用回転陽極（ターゲット）は
、断面台形で中空の円錐形状のＭＯ層１と、このＭＯ層
１の母線がなす傾斜面上に張り合わせた５％Ｒｅ−Ｗ合
金層２とからなる外径１２５市、中心部厚さ８市の張り
合わせ材料３と、この張り合わせ材料３のうちのＭＯ層
１の底面に、Ｒｕ−Ｐｄからなるろう材４を介して接合
された外径１２Ｏｎ＋ｎ、厚さ１５Ｉｌ！＋の高純度、
高密度のグラファイトからなる蓄熱材５とから構成され
ている。First, the rotating anode (target) for an X-ray tube shown in FIG. A laminated material 3 with an outer diameter of 125 mm and a center thickness of 8 mm consisting of layer 2 was bonded to the bottom surface of MO layer 1 of this laminated material 3 via a brazing material 4 made of Ru-Pd. Outer diameter 12On+n, thickness 15Il! + high purity,
The heat storage material 5 is made of high-density graphite.
次に、製造方法について、説明する。Next, the manufacturing method will be explained.
まず、準備工程において、断面台形で中空の円錐形状の
ＭＯ層１と５％Ｒｅ−Ｗ合金層２とを張り合わせ、上述
した製品形状に成形した外径１２５州、中心部厚さ８−
の張り合わせ材料３と、外径１２０ｍ＋、厚さ１５ｍｇ
＋の高純度、高密度のグラファイトからなる蓄熱材５と
、３５ｇの粉末状又は箔状のＲｕ−Ｐｄからなるろう材
４とを準備する。First, in the preparation process, a hollow conical MO layer 1 with a trapezoidal cross section and a 5% Re-W alloy layer 2 are laminated together and formed into the above-mentioned product shape with an outer diameter of 125 mm and a center thickness of 8 mm.
Laminating material 3, outer diameter 120m+, thickness 15mg
A heat storage material 5 made of high-purity, high-density graphite and a brazing material 4 made of 35 g of powdered or foiled Ru-Pd are prepared.
尚、張り合わせ材料３のうちのＭｏ層１の外周に、ろう
付け時に蓄熱材５のずれを防止する枠６を取り付ける。A frame 6 is attached to the outer periphery of the Mo layer 1 of the bonding material 3 to prevent the heat storage material 5 from shifting during brazing.
次に、ろう付け工程において、この張り合わせ材料３の
うちのＭｏ層１の底面と蓄熱材５との間に、ろう材４を
３５ｇ（０，３〜０．４ｇ／ａａ）挾み込み、１０ ”
”Ｔｏｒｒ以下の高真空に維持された真空炉内に入れる
。真空炉内で、３００〜５００ｇ／ａａの荷重をかけな
がら、ろう材の融点１５５０〜１７５０℃以上の温度に
加熱し、ろう材を溶解させてろう材４を形成し、５〜３
０分保持する。その後、高真空を維持しながら室温まで
冷却する。Next, in the brazing process, 35 g (0.3 to 0.4 g/aa) of brazing material 4 is inserted between the bottom surface of the Mo layer 1 of this bonding material 3 and the heat storage material 5. ”
Place the brazing material in a vacuum furnace maintained at a high vacuum of less than Torr. In the vacuum furnace, while applying a load of 300 to 500 g/aa, heat the brazing material to a temperature above the melting point of 1550 to 1750°C. melt to form brazing filler metal 4,
Hold for 0 minutes. Thereafter, it is cooled to room temperature while maintaining a high vacuum.
このとき、ろう材層の厚さは０．１〜０．２ｒｕａとな
り、はみ出したろう材は切削等で除去し、完成品とする
。At this time, the thickness of the brazing material layer is 0.1 to 0.2 rua, and the protruding brazing material is removed by cutting or the like to obtain a finished product.
ここで、このターゲットのうち、蓄熱材５をろう材４と
の境界、すなわち、ろう付け部をＸ線回折法により分析
しなところ、剥離等の原因になる金属炭化物の生成は見
られなかった。When the boundary between the heat storage material 5 and the brazing material 4 of this target, that is, the brazed part, was analyzed by X-ray diffraction, no formation of metal carbide that could cause peeling etc. was observed. .
また、ろう付け部の接合強度を評価するために、張り合
わせ材料３と蓄熱材５との接合部、すなわち、ろう材４
を中心に集中荷重を加える抗折力試験をおこなった。In addition, in order to evaluate the joint strength of the brazed part, the joint part between the laminate material 3 and the heat storage material 5, that is, the brazing material 4
A transverse rupture strength test was conducted in which a concentrated load was applied to the specimen.
その方法が第２図及び第３図を参照して説明される。第
２図は、本発明の実施例に係る高温抗折試験の試験片を
、第３図は、高温試験機を示す。The method will be explained with reference to FIGS. 2 and 3. FIG. 2 shows a test piece for a high-temperature bending test according to an example of the present invention, and FIG. 3 shows a high-temperature testing machine.
まず、モリブデンとグラファイトとの張り合わせ材から
、モリブデン７とグラファイト８材の接合部分りを中心
にして、長さ３０關１幅（ｗ）５１Ｉｍ。First, from the laminated material of molybdenum and graphite, the length is 30 cm and the width (w) is 51 Im, centering on the joint of molybdenum 7 and graphite 8 materials.
厚さ（ｔ）ｌａｎｅの第２乃至第５の試験片１０゜１０
、・・・を得た。次に、第３図に示すように、各試験片
１０，１０．・・・を順次試験機に硬質棒材１１．１２
を支持端としてセットした。この状態で、ろう付け部９
に集中荷重（Ｌ）を硬質棒材１３を介して加えた。支持
端に置かれた硬質棒材１１．１２の水平圧１１ｉ１（ス
パンｄ）は２０關で、抗折力（Ｆ）は、荷重（Ｌ）を段
階的に調節することにより、１／ １０ｋＩｒ／ ｆｉ
ｌｌ”の位まで測定可能である。Second to fifth test pieces with thickness (t) lane 10°10
I got... Next, as shown in FIG. 3, each test piece 10, 10. 11.12 of the hard bar material is sequentially put into the testing machine.
was set as the supporting end. In this state, the brazed part 9
A concentrated load (L) was applied through the hard bar 13. The horizontal pressure 11i1 (span d) of the hard bar 11.12 placed at the supporting end is 20 degrees, and the transverse rupture force (F) is 1/10 kIr/ by adjusting the load (L) stepwise. fi
It is possible to measure up to the 11th digit.
真空度１０−’Ｔｏｒｒ以下の炉中で、上記試験片を１
２００℃、１０分間加熱し、試験片１０，１０゜・・・
、破断の最少荷重（Ｌｎｉｎ）を測定し抗折力（Ｆ）を
次の計算式を用いて計算しな、その結果を表１に示す。The above test piece was placed in a furnace at a vacuum level of 10-' Torr or less.
Heating at 200°C for 10 minutes, test piece 10,10°...
, the minimum load at break (Lnin) was measured, and the transverse rupture strength (F) was calculated using the following formula. The results are shown in Table 1.
ここで、Ｗは試験片の幅５ｍ＋ｎ、ｔは試験片の厚さ１
ｍｍ、ｄはスパン２０ｗｍ 、 Ｌｌｌｌｉｎは破断
時の最小荷重である。Here, W is the width of the test piece 5m+n, and t is the thickness of the test piece 1
mm and d are the span 20wm, and Llllin is the minimum load at breakage.
次に、ヒートサイクル試験について述べる。Next, a heat cycle test will be described.
水素中にて、タングステン板の通電加熱体１５の上に、
上記抗折試験片と同一形状のろう付け試験片を置き、次
の条件にて電流の通電、遮断をくり返し、ろう付け部９
の破断の有無を確認した。In hydrogen, on top of the tungsten plate electrical heating element 15,
A brazed test piece having the same shape as the bending test piece above was placed, and the current was repeatedly applied and cut off under the following conditions.
The presence or absence of breakage was confirmed.
加熱温度１１００〜１３００℃、昇温時間３０秒降温時
間３０秒、サイクル１０回
その結果を表１に示す。あわせて、同条件でなされた、
比較例筒１．第６の試験片についても併記する。Table 1 shows the results of 10 cycles at a heating temperature of 1,100 to 1,300° C., a heating time of 30 seconds and a cooling time of 30 seconds. In addition, under the same conditions,
Comparative example cylinder 1. The sixth test piece will also be described.
表 １
以下余白
ここで、ヒートサイクル試験欄のＯ印は、破断無しを示
す。Table 1 Margin below Here, the O mark in the heat cycle test column indicates no breakage.
表１から、Ｒｕ５〜２０重量％、残部Ｐｄの化学組成の
ろう材を使用したものは、殆ど抗折力のない従来のター
ゲットに比べ高温抗折力（Ｆ）が大きく、かつヒートサ
イクル試験においても破断が無い。From Table 1, it can be seen that those using a brazing filler metal with a chemical composition of 5 to 20% by weight of Ru and the balance Pd have a higher high temperature transverse rupture strength (F) than the conventional target with almost no transverse rupture strength, and in the heat cycle test. There is no breakage either.
一方、室温における抗折試験の結果、表１の化学組成の
ろう材を使用した試験片１０は、全て、ろう件部９では
破断せず、グラファイト母材８で□破断し、母材８より
大きな接合強度を有することが確認された。On the other hand, as a result of the bending test at room temperature, all of the test pieces 10 using the brazing filler metal with the chemical composition shown in Table 1 did not break at the solder joint 9, but broke at the graphite base material 8, and It was confirmed that the bonding strength was high.
［発明の効果］
以上の説明のとおり、本発明によれば、剥離の原因とな
る金属炭化物を生成せず、また、グラファイトに良く溶
解して良好な接合強度を発揮し、一方、Ｍｏ側との濡れ
性も非常に良く、均一なろう付けが可能ななめ、常温は
もとより高温での接合強度が優れており、さらに、高温
での温度変化に対しても破断されない、Ｘ線管用回転陽
極が得られる。さらに、本発明によれば、ガス成分（特
に、水素ガス）を吸収するゲッター効果を有し、Ｘ線管
内部の微量ガス成分を吸収し、より高真空にするように
作用する耐電圧性に優れたＸ線管用回転陽極が得られる
。[Effects of the Invention] As explained above, according to the present invention, metal carbide that causes peeling is not generated, and it dissolves well in graphite to exhibit good bonding strength. A rotating anode for X-ray tubes that has very good wettability and can be brazed uniformly, has excellent bonding strength at both room temperature and high temperature, and does not break even under temperature changes at high temperatures. It will be done. Furthermore, according to the present invention, it has a getter effect that absorbs gas components (especially hydrogen gas), absorbs trace gas components inside the X-ray tube, and has voltage resistance that acts to create a higher vacuum. An excellent rotating anode for an X-ray tube can be obtained.
第１図は、本発明の一実施例に係るＸ線管用回転陽極を
示す断面図、第２図は、本発明の効果を確認するために
使用される高温抗折試験片を示す図、第３図は、第２図
に示された試験片を試験する高温抗折試験機を示す図、
第４図は、第２図の試験片のし−トサイクル試験を説明
するための図であ°る。
図中１はＭｏ層、２はＲｅ−Ｗ合金層、３は張り合わせ
材料、４はろう材、５は蓄熱材、６は枠、９はろう付接
合部、１０は試験片＝＃＃＃溝字である。
第１図
第２図
第３図
第４ｙＡ
手続補正台（自発）
昭和６３年６月２０［］FIG. 1 is a sectional view showing a rotating anode for an X-ray tube according to an embodiment of the present invention, FIG. 2 is a view showing a high temperature bending test piece used to confirm the effects of the present invention, and FIG. FIG. 3 is a diagram showing a high-temperature bending tester for testing the test piece shown in FIG. 2;
FIG. 4 is a diagram for explaining a seat cycle test of the test piece of FIG. 2. In the figure, 1 is a Mo layer, 2 is a Re-W alloy layer, 3 is a bonding material, 4 is a brazing material, 5 is a heat storage material, 6 is a frame, 9 is a brazed joint, 10 is a test piece = ### groove It is a character. Figure 1 Figure 2 Figure 3 Figure 4yA Procedure correction table (voluntary) June 20, 1988 []
Claims (1)
て形成された張り合わせ材料と、グラファイトを含む蓄
熱材と、Ｒｕ−Ｐｄからなるろう材とを有し、前記ろう
材を、前記張り合わせ材料のうちのＭｏ又はＭｏ合金層
と前記蓄熱材との間に介在させて、前記張り合わせ材料
と蓄熱材とを接合したことを特徴とするＸ線管用回転陽
極。 ２）Ｍｏ又はＭｏ合金層にＷ又はＷ合金層を張り合わせ
て形成された張り合わせ材料と、グラファイトを含む蓄
熱材と、Ｒｕ−Ｐｄからなるろう材とを準備する準備工
程と、前記張り合わせ材料のうちのＭｏ又はＭｏ合金層
と前記蓄熱材との間に、前記ろう材を介在させて、真空
中で、荷重を加えながら加熱し、前記ろう材を溶解させ
た後冷却するろう付け工程とを有することを特徴とする
Ｘ線管用回転陽極の製造方法。[Scope of Claims] 1) A bonding material formed by bonding a W or W alloy layer to a Mo or Mo alloy layer, a heat storage material containing graphite, and a brazing material made of Ru-Pd; A rotating anode for an X-ray tube, characterized in that the bonding material and the heat storage material are joined by interposing a material between the Mo or Mo alloy layer of the bonding material and the heat storage material. 2) A preparation step of preparing a bonding material formed by bonding a W or W alloy layer to a Mo or Mo alloy layer, a heat storage material containing graphite, and a brazing material made of Ru-Pd; and a brazing step of interposing the brazing material between the Mo or Mo alloy layer and the heat storage material, heating in vacuum while applying a load, melting the brazing material, and then cooling. A method for manufacturing a rotating anode for an X-ray tube, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26529687A JPH01109647A (en) | 1987-10-22 | 1987-10-22 | Rotary anode for x-ray tube and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26529687A JPH01109647A (en) | 1987-10-22 | 1987-10-22 | Rotary anode for x-ray tube and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01109647A true JPH01109647A (en) | 1989-04-26 |
| JPH0426178B2 JPH0426178B2 (en) | 1992-05-06 |
Family
ID=17415233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26529687A Granted JPH01109647A (en) | 1987-10-22 | 1987-10-22 | Rotary anode for x-ray tube and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01109647A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0939427A1 (en) * | 1998-02-27 | 1999-09-01 | Tokyo Tungsten Co., Ltd. | Rotary anode for X-ray tube comprising a Mo-containing layer and a W-containing layer laminated to each other and method of producing the same |
| US7065178B2 (en) * | 2003-04-30 | 2006-06-20 | Siemens Aktiengesellschaft | Rotating anode x-ray tube |
| JP2008147188A (en) * | 2006-12-08 | 2008-06-26 | General Electric Co <Ge> | Convection cooled X-ray tube target and manufacturing method thereof |
| CN108453413A (en) * | 2018-03-30 | 2018-08-28 | 西安瑞鑫科金属材料有限责任公司 | A kind of palladium ruthenium binary alloy brazing material |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144290A (en) * | 1977-04-18 | 1978-12-15 | Gen Electric | Method of bonding anode target |
| JPS53144289A (en) * | 1977-04-18 | 1978-12-15 | Gen Electric | Anode disk for rotary anode xxray tube |
| JPS5925152A (en) * | 1982-07-17 | 1984-02-09 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Rotary anode x-ray tube |
-
1987
- 1987-10-22 JP JP26529687A patent/JPH01109647A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144290A (en) * | 1977-04-18 | 1978-12-15 | Gen Electric | Method of bonding anode target |
| JPS53144289A (en) * | 1977-04-18 | 1978-12-15 | Gen Electric | Anode disk for rotary anode xxray tube |
| JPS5925152A (en) * | 1982-07-17 | 1984-02-09 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Rotary anode x-ray tube |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0939427A1 (en) * | 1998-02-27 | 1999-09-01 | Tokyo Tungsten Co., Ltd. | Rotary anode for X-ray tube comprising a Mo-containing layer and a W-containing layer laminated to each other and method of producing the same |
| US7065178B2 (en) * | 2003-04-30 | 2006-06-20 | Siemens Aktiengesellschaft | Rotating anode x-ray tube |
| JP2008147188A (en) * | 2006-12-08 | 2008-06-26 | General Electric Co <Ge> | Convection cooled X-ray tube target and manufacturing method thereof |
| CN108453413A (en) * | 2018-03-30 | 2018-08-28 | 西安瑞鑫科金属材料有限责任公司 | A kind of palladium ruthenium binary alloy brazing material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0426178B2 (en) | 1992-05-06 |
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