JPH01110256U - - Google Patents

Info

Publication number: JPH01110256U
Authority: JP; Japan
Prior art keywords: crucible; thin film; support; spacer; forming
Prior art date: 1988-01-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP278888U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0527485Y2 (

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-01-13

Filing date

1988-01-13

Publication date

1989-07-25

1988-01-13 Application filed filed Critical

1988-01-13 Priority to JP278888U priority Critical patent/JPH0527485Y2/ja

1989-07-25 Publication of JPH01110256U publication Critical patent/JPH01110256U/ja

1993-07-13 Application granted granted Critical

1993-07-13 Publication of JPH0527485Y2 publication Critical patent/JPH0527485Y2/ja

2003-01-13 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

125000006850 spacer group Chemical group 0.000 claims description 3
239000000463 material Substances 0.000 claims 3
239000010409 thin film Substances 0.000 claims 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
229910052799 carbon Inorganic materials 0.000 claims 1
238000001704 evaporation Methods 0.000 claims 1
238000010438 heat treatment Methods 0.000 claims 1
238000004519 manufacturing process Methods 0.000 claims 1
239000002184 metal Substances 0.000 claims 1
239000000758 substrate Substances 0.000 claims 1
238000010586 diagram Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)

JP278888U 1988-01-13 1988-01-13 Expired - Lifetime JPH0527485Y2 ( )

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP278888U JPH0527485Y2 ( )	1988-01-13	1988-01-13

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP278888U JPH0527485Y2 ( )	1988-01-13	1988-01-13

Publications (2)

Publication Number	Publication Date
JPH01110256U true JPH01110256U ( )	1989-07-25
JPH0527485Y2 JPH0527485Y2 ( )	1993-07-13

Family

ID=31506636

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP278888U Expired - Lifetime JPH0527485Y2 ( )	1988-01-13	1988-01-13

Country Status (1)

Country	Link
JP (1)	JPH0527485Y2 ( )

1988
- 1988-01-13 JP JP278888U patent/JPH0527485Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH0527485Y2 ( )	1993-07-13

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