JPH01113183U - - Google Patents
Info
- Publication number
- JPH01113183U JPH01113183U JP6806988U JP6806988U JPH01113183U JP H01113183 U JPH01113183 U JP H01113183U JP 6806988 U JP6806988 U JP 6806988U JP 6806988 U JP6806988 U JP 6806988U JP H01113183 U JPH01113183 U JP H01113183U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- pump section
- backflow
- conduit
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 7
- 239000000112 cooling gas Substances 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Description
第１図は本考案の一実施例としての３段ルーツ
型真空ポンプの概要を示す図、第２図は第１図の
３段ルーツ型真空ポンプの構成を示す断面図、第
３図は第２図の―断面図、第４図、第５図、
および第６図はそれぞれ他の実施例を示す図、第
７図は従来の３段ルーツ型真空ポンプの機器の配
列を示す図である。
符号の説明、１…第１ポンプ区分、１１…ケー
シング、１２…ロータ、１３…吸込口、１４…吐
出口、１６１，１６２…逆流冷却用気体の流入口
、２…第１・第２ポンプ区分間隔壁、３…第１・
第２ポンプ区分間管路、３１，３２，３３…連結
管路、３４，３５…逆流管路、３６…冷却器、４
…第２ポンプ区分、４１…ケーシング、４２…ロ
ータ、４３…吸込口、４４…吐出口、４６１，４
６２…逆流冷却用気体の流入口、５…第２・第３
ポンプ区分間隔壁、６…第２・第３ポンプ区分間
管路、６１，６２，６３…連結管路、６４，６５
…逆流管路、６６…冷却器、７…第３ポンプ区分
、７１…ケーシング、７２…ロータ、７３…吸込
口、７４…吐出口、７６１，７６２…逆流冷却用
気体の流入口、８…第３ポンプ区分吐出管路、８
１，８２…吐出管路、８３，８４…逆流管路、８
５…冷却器、９１…第１シヤフト、９２…第２シ
ヤフト、９３…タイミングギアセツト、９４…軸
受機構、９５…軸封機構、Ｐ…ポンプ装置、Ｇ１
３…第１ポンプ区分の吸込気体、Ｇ１４…第１ポ
ンプ区分の吐出気体、Ｇ４３…第２ポンプ区分の
吸込気体、Ｇ４４…第２ポンプ区分の吐出気体、
Ｇ７３…第３ポンプ区分の吸込気体、Ｇ７４…第
３ポンプ区分の吐出気体、Ｒ…逆流冷却用気体、
Ｐ１…初段ルーツ型真空ポンプ、Ｐ２…第２段ル
ーツ型真空ポンプ、Ｐ３…第３段ルーツ型真空ポ
ンプ、Ｃ１…冷却器、Ｃ２…冷却器。
FIG. 1 is a diagram showing an outline of a three-stage roots-type vacuum pump as an embodiment of the present invention, FIG. 2 is a sectional view showing the configuration of the three-stage roots-type vacuum pump of FIG. 1, and FIG. - Cross-sectional view of Figure 2, Figure 4, Figure 5,
and FIG. 6 are views showing other embodiments, respectively, and FIG. 7 is a view showing the arrangement of equipment of a conventional three-stage Roots vacuum pump. Explanation of symbols, 1...First pump section, 11...Casing, 12...Rotor, 13...Suction port, 14...Discharge port, 161, 162...Inflow port for backflow cooling gas, 2...First and second pump section Interval wall, 3...1st.
Pipe line between second pump section, 31, 32, 33... Connection pipe line, 34, 35... Backflow pipe line, 36... Cooler, 4
...Second pump section, 41...Casing, 42...Rotor, 43...Suction port, 44...Discharge port, 461,4
62...Inflow port for backflow cooling gas, 5...Second and third
Pump section partition wall, 6... Pipe line between second and third pump sections, 61, 62, 63... Connection pipe line, 64, 65
...Backflow pipe line, 66...Cooler, 7...Third pump section, 71...Casing, 72...Rotor, 73...Suction port, 74...Discharge port, 761, 762...Inflow port for backflow cooling gas, 8...No. 3 pump segment discharge line, 8
1, 82...Discharge pipe line, 83, 84...Reverse flow pipe line, 8
5... Cooler, 91... First shaft, 92... Second shaft, 93... Timing gear set, 94... Bearing mechanism, 95... Shaft sealing mechanism, P... Pump device, G1
3... Suction gas of the first pump section, G14... Discharge gas of the first pump section, G43... Suction gas of the second pump section, G44... Discharge gas of the second pump section,
G73... Suction gas of the third pump section, G74... Discharge gas of the third pump section, R... Backflow cooling gas,
P1...First-stage Roots-type vacuum pump, P2...Second-stage Roots-type vacuum pump, P3...Third-stage Roots-type vacuum pump, C1...Cooler, C2...Cooler.
Claims (1)
形成され、各ポンプ区分に共通の２個の軸が設け
られ、これら軸に支承されるロータが設けられ、
各ポンプ区分には吸込口、吐出口、および逆流冷
却用気体の流入口が設けられ、各ポンプ区分の吐
出口と次段のポンプ区分の吸込口を連結する連結
管路が設けられ、該連結管路には冷却器が設けら
れ、該連結管路からは各ポンプ区分へ逆流気体を
導く逆流管路が分岐させられ、該複数のポンプ区
分に対して単一のロータ駆動用電動機、単一のロ
ータ回転規制用タイミングギアセツトおよび単一
組の軸受機構が設けられることを特徴とする単一
機械形態を有する逆流冷却式多段ルーツ型真空ポ
ンプ。 A Roots-type vacuum pump is formed by a plurality of pump sections, each pump section being provided with two common shafts and a rotor supported on these shafts;
Each pump section is provided with a suction port, a discharge port, and an inlet for backflow cooling gas, and a connecting pipe is provided that connects the discharge port of each pump section with the suction port of the next pump section. The conduit is provided with a cooler, and a backflow conduit is branched from the connecting conduit to direct the backflow gas to each pump section, and a single rotor drive electric motor, a single 1. A multi-stage roots-type vacuum pump with reverse flow cooling and having a single machine configuration, characterized in that a timing gear set for regulating rotor rotation and a single set of bearing mechanisms are provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6806988U JPH01113183U (en) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6806988U JPH01113183U (en) | 1988-05-25 | 1988-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01113183U true JPH01113183U (en) | 1989-07-31 |
Family
ID=31293398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6806988U Pending JPH01113183U (en) | 1988-05-25 | 1988-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01113183U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012066782A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device coupling structure and vacuum exhaust system |
| WO2012066780A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device coupling structure and vacuum exhaust system |
| WO2012066781A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device connection structure and vacuum exhaust system |
| JP2016008531A (en) * | 2014-06-23 | 2016-01-18 | 株式会社荏原製作所 | Vacuum pump device |
| JP2020037921A (en) * | 2018-09-05 | 2020-03-12 | 株式会社宇野澤組鐵工所 | Multi-stage roots pump |
| JP2020037922A (en) * | 2018-09-05 | 2020-03-12 | 株式会社宇野澤組鐵工所 | Multi-stage root type pump |
| JP2021067265A (en) * | 2020-06-24 | 2021-04-30 | オリオン機械株式会社 | Claw pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2489887A (en) * | 1946-07-11 | 1949-11-29 | Roots Connersville Blower Corp | Rotary pump |
| GB1350636A (en) * | 1970-06-03 | 1974-04-18 | Aerzener Maschf Gmbh | Rotary piston compressors |
-
1988
- 1988-05-25 JP JP6806988U patent/JPH01113183U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2489887A (en) * | 1946-07-11 | 1949-11-29 | Roots Connersville Blower Corp | Rotary pump |
| GB1350636A (en) * | 1970-06-03 | 1974-04-18 | Aerzener Maschf Gmbh | Rotary piston compressors |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012066782A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device coupling structure and vacuum exhaust system |
| WO2012066780A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device coupling structure and vacuum exhaust system |
| WO2012066781A1 (en) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Vacuum exhaust device connection structure and vacuum exhaust system |
| JP5645229B2 (en) * | 2010-11-17 | 2014-12-24 | 株式会社アルバック | Connection structure of vacuum exhaust device and vacuum exhaust system |
| JP2016008531A (en) * | 2014-06-23 | 2016-01-18 | 株式会社荏原製作所 | Vacuum pump device |
| JP2020037921A (en) * | 2018-09-05 | 2020-03-12 | 株式会社宇野澤組鐵工所 | Multi-stage roots pump |
| JP2020037922A (en) * | 2018-09-05 | 2020-03-12 | 株式会社宇野澤組鐵工所 | Multi-stage root type pump |
| JP2021067265A (en) * | 2020-06-24 | 2021-04-30 | オリオン機械株式会社 | Claw pump |
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