JPH01114664U - - Google Patents
Info
- Publication number
- JPH01114664U JPH01114664U JP1988007483U JP748388U JPH01114664U JP H01114664 U JPH01114664 U JP H01114664U JP 1988007483 U JP1988007483 U JP 1988007483U JP 748388 U JP748388 U JP 748388U JP H01114664 U JPH01114664 U JP H01114664U
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- rotates
- terminal
- substrate
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988007483U JPH01114664U (af) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988007483U JPH01114664U (af) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114664U true JPH01114664U (af) | 1989-08-02 |
Family
ID=31212528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988007483U Pending JPH01114664U (af) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114664U (af) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0452275A (ja) * | 1990-06-20 | 1992-02-20 | Hitachi Ltd | スパツタリング装置 |
-
1988
- 1988-01-22 JP JP1988007483U patent/JPH01114664U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0452275A (ja) * | 1990-06-20 | 1992-02-20 | Hitachi Ltd | スパツタリング装置 |