JPH01116437U - - Google Patents
Info
- Publication number
- JPH01116437U JPH01116437U JP1164188U JP1164188U JPH01116437U JP H01116437 U JPH01116437 U JP H01116437U JP 1164188 U JP1164188 U JP 1164188U JP 1164188 U JP1164188 U JP 1164188U JP H01116437 U JPH01116437 U JP H01116437U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- die bonding
- reflected light
- illuminates
- posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Die Bonding (AREA)
Description
第１図は本考案の実施例１を示す平面図、第２
図は同正面図、第３図は実施例２を示す側面図、
第４図は同正面図である。
１……チツプ、２……ヒートミンク、３……ス
チム、４……ヒータブロツク、５……クランプ、
６……光源、７……検出器、８……光量測定器、
９……クランプ回転用駆動モーター。
Figure 1 is a plan view showing the first embodiment of the present invention;
The figure is a front view of the same, FIG. 3 is a side view showing Embodiment 2,
FIG. 4 is a front view of the same. 1... Chip, 2... Heat mink, 3... Stim, 4... Heater block, 5... Clamp,
6... Light source, 7... Detector, 8... Light amount measuring device,
9... Drive motor for rotating the clamp.
Claims (1)
しくは、側面を照射する光源と、前記半導体チツ
プからの反射光を受光し、その反射光量に基いて
該半導体チツプの姿勢、位置関係を検知する補正
部とを有することを特徴とするダイボンデイング
装置。 It has a light source that illuminates the top or side surface of a semiconductor chip that is subjected to die bonding, and a correction unit that receives reflected light from the semiconductor chip and detects the posture and positional relationship of the semiconductor chip based on the amount of reflected light. A die bonding device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1164188U JPH01116437U (en) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1164188U JPH01116437U (en) | 1988-01-30 | 1988-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116437U true JPH01116437U (en) | 1989-08-07 |
Family
ID=31220374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1164188U Pending JPH01116437U (en) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116437U (en) |
-
1988
- 1988-01-30 JP JP1164188U patent/JPH01116437U/ja active Pending