JPH01118224U - - Google Patents
Info
- Publication number
- JPH01118224U JPH01118224U JP1332288U JP1332288U JPH01118224U JP H01118224 U JPH01118224 U JP H01118224U JP 1332288 U JP1332288 U JP 1332288U JP 1332288 U JP1332288 U JP 1332288U JP H01118224 U JPH01118224 U JP H01118224U
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- air bearing
- hydrostatic air
- stationary base
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002706 hydrostatic effect Effects 0.000 claims description 7
- 230000005291 magnetic effect Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
第１図は本考案第１実施例の静圧空気軸受装置
を示し、第２図はその静圧空気軸受部近傍を拡大
して示し、第３図〜第８図は他の実施例を説明す
る図である。他方、第９図は、従来の静圧空気軸
受装置を示す。
１：可動体、２：静圧空気軸受パツド、３ａ〜
３ｅ：固定側ガイド、４：固定側ベース、７ａ，
７ｂ：静圧空気軸受部、８，９，１２ａ，１２ｂ
，１３ａ，１３ｂ：磁石、１０，１１：突出部、
１４ａ，１４ｂ，１５ａ，１５ｂ：補助磁石対、
１６：磁路、１７ａ，１７ｂ，１８ａ，１８ｂ：
強磁性体。
Fig. 1 shows a hydrostatic air bearing device according to the first embodiment of the present invention, Fig. 2 shows an enlarged view of the vicinity of the hydrostatic air bearing, and Figs. 3 to 8 explain other embodiments. This is a diagram. On the other hand, FIG. 9 shows a conventional hydrostatic air bearing device. 1: Movable body, 2: Static pressure air bearing pad, 3a~
3e: Fixed side guide, 4: Fixed side base, 7a,
7b: Static pressure air bearing section, 8, 9, 12a, 12b
, 13a, 13b: magnet, 10, 11: protrusion,
14a, 14b, 15a, 15b: auxiliary magnet pair,
16: Magnetic path, 17a, 17b, 18a, 18b:
Ferromagnetic material.
Claims (1)
記固定側ベース及び前記可動体のそれぞれに磁気
吸引力を付与する磁石を取り付け、これら磁石の
間、或いは前記固定側ベース及び前記可動体のそ
れぞれに設けられた突出部の間に、傾斜面をもつ
静圧空気軸受部を形成したことを特徴とする静圧
空気軸受装置。 ２ 実用新案登録請求の範囲第１項記載の磁石の
両側に前記静圧空気軸受部を通過しない磁路を形
成する補助磁石を配置したことを特徴とする静圧
空気軸受装置。[Claims for Utility Model Registration] 1. A movable body is arranged opposite to a stationary base, and magnets that apply magnetic attraction force are attached to each of the stationary base and the movable body, and between these magnets or between the movable body and the movable body. A hydrostatic air bearing device, characterized in that a hydrostatic air bearing portion having an inclined surface is formed between protrusions provided on each of the stationary base and the movable body. 2 Utility Model Registration A hydrostatic air bearing device characterized in that auxiliary magnets forming a magnetic path that does not pass through the hydrostatic air bearing portion are arranged on both sides of the magnet according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1332288U JPH01118224U (en) | 1988-02-02 | 1988-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1332288U JPH01118224U (en) | 1988-02-02 | 1988-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118224U true JPH01118224U (en) | 1989-08-10 |
Family
ID=31223529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1332288U Pending JPH01118224U (en) | 1988-02-02 | 1988-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118224U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11294456A (en) * | 1998-04-09 | 1999-10-26 | Nippon Seiko Kk | Static pressure air bearing linear guide device |
| JP2003111352A (en) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | Substrate processing equipment |
-
1988
- 1988-02-02 JP JP1332288U patent/JPH01118224U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11294456A (en) * | 1998-04-09 | 1999-10-26 | Nippon Seiko Kk | Static pressure air bearing linear guide device |
| JP2003111352A (en) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | Substrate processing equipment |
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