JPH01122834U - - Google Patents

Info

Publication number
JPH01122834U
JPH01122834U JP1316688U JP1316688U JPH01122834U JP H01122834 U JPH01122834 U JP H01122834U JP 1316688 U JP1316688 U JP 1316688U JP 1316688 U JP1316688 U JP 1316688U JP H01122834 U JPH01122834 U JP H01122834U
Authority
JP
Japan
Prior art keywords
storage type
vacuum
chamber
processing tank
type vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1316688U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1316688U priority Critical patent/JPH01122834U/ja
Publication of JPH01122834U publication Critical patent/JPH01122834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す側面図、第２
図は従来の技術を示す側面図である。 １……真空処理槽、２，２ａ，２ｂ……溜込み
式真空ポンプ、３，３ａ，３ｂ……バルブ、４，
４ａ，４ｂ……再生手段。

Claims (1)

    【実用新案登録請求の範囲】
  1. 溜込み式真空ポンプを真空処理槽の１室に複数
    台取り付け、該真空処理槽の１室が常に該溜込み
    式真空ポンプで排気できるように、それぞれの該
    溜込み式真空ポンプを独立して再生できる手段を
    含むことを特徴とする真空装置。
JP1316688U 1988-02-02 1988-02-02 Pending JPH01122834U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1316688U JPH01122834U (ja) 1988-02-02 1988-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1316688U JPH01122834U (ja) 1988-02-02 1988-02-02

Publications (1)

Publication Number Publication Date
JPH01122834U true JPH01122834U (ja) 1989-08-21

Family

ID=31223256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1316688U Pending JPH01122834U (ja) 1988-02-02 1988-02-02

Country Status (1)

Country Link
JP (1) JPH01122834U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05269361A (ja) * 1992-03-27 1993-10-19 Hitachi Ltd 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05269361A (ja) * 1992-03-27 1993-10-19 Hitachi Ltd 真空処理装置

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