JPH01124655U - - Google Patents

Info

Publication number
JPH01124655U
JPH01124655U JP2013288U JP2013288U JPH01124655U JP H01124655 U JPH01124655 U JP H01124655U JP 2013288 U JP2013288 U JP 2013288U JP 2013288 U JP2013288 U JP 2013288U JP H01124655 U JPH01124655 U JP H01124655U
Authority
JP
Japan
Prior art keywords
target
ion
ion implantation
ion beam
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2013288U priority Critical patent/JPH01124655U/ja
Publication of JPH01124655U publication Critical patent/JPH01124655U/ja
Pending legal-status Critical Current

Links

JP2013288U 1988-02-17 1988-02-17 Pending JPH01124655U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013288U JPH01124655U (bs) 1988-02-17 1988-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013288U JPH01124655U (bs) 1988-02-17 1988-02-17

Publications (1)

Publication Number Publication Date
JPH01124655U true JPH01124655U (bs) 1989-08-24

Family

ID=31236244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013288U Pending JPH01124655U (bs) 1988-02-17 1988-02-17

Country Status (1)

Country Link
JP (1) JPH01124655U (bs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000026950A1 (en) * 1998-10-30 2000-05-11 Applied Materials Inc. Method and device for ion implanting

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000026950A1 (en) * 1998-10-30 2000-05-11 Applied Materials Inc. Method and device for ion implanting
US6617594B1 (en) 1998-10-30 2003-09-09 Applied Materials, Inc. Method and device for ion implanting

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