JPH01125162U

JPH01125162U -

Info

Publication number: JPH01125162U
Application number: JP2226188U
Authority: JP
Priority date: 1988-02-22
Filing date: 1988-02-22
Publication date: 1989-08-25

Description

[Brief explanation of the drawing]

第１図は本考案の実施例を示す研磨装置の正面
図。第２図は同じく側面図。第３図は同じく平面
図である。第４図は加工物支持機構の縦断面図。
第５図は加工物支持機構に対する揺動機構を示す
、本発明要部の部分側面図である。第６図はＹロ
ボツトの正面図である。第７図及至第９図は研磨
作業を示す略図で、第７図は荒研磨作業時で、ａ
図は支軸および加工物の傾斜を示し、ｂ図は加工
物の加工状態を示し、第８図は中研磨作業時、第
９図は仕上研磨時のそれぞれの加工物の加工状態
を示す。２５……回転駆動軸、２６……支軸、２８……
係合軸、３３……第２弾性体、３４……第１弾性
体、Ｗ……加工物。 FIG. 1 is a front view of a polishing apparatus showing an embodiment of the present invention. Figure 2 is also a side view. FIG. 3 is also a plan view. FIG. 4 is a longitudinal sectional view of the workpiece support mechanism.
FIG. 5 is a partial side view of the main parts of the present invention, showing a swinging mechanism for the workpiece support mechanism. FIG. 6 is a front view of the Y robot. Figures 7 to 9 are schematic diagrams showing polishing work, and Figure 7 is during rough polishing work;
The figure shows the spindle and the inclination of the workpiece, the figure b shows the machining state of the workpiece, FIG. 8 shows the machining state of the workpiece during intermediate polishing, and FIG. 9 shows the machining state of the workpiece during final polishing. 25... Rotation drive shaft, 26... Support shaft, 28...
Engagement shaft, 33... second elastic body, 34... first elastic body, W... workpiece.

Claims

[Scope of utility model registration request]

A support shaft having a workpiece support part at the tip and a drive shaft which is rotationally driven by transmitting appropriate rotational power are aligned so that their axes are aligned and are rotatably supported by a hanging case via a bearing, and the end of the drive shaft is A through hole that penetrates in the axial direction is provided in the peripheral portion of the drive cylinder formed in the above, and an engagement shaft is positioned to face the through hole and extends from the base end of the support shaft, and is engaged with the through hole. A first spring body that enables transmission between the support shaft and the drive shaft by engagement with the shaft, and acts between the support shaft and the drive shaft in a direction toward the work surface with respect to the support shaft; and a support shaft. A workpiece support device including a floating support mechanism provided with a second spring body acting in a direction away from a processing surface.