JPH01129259U - - Google Patents
Info
- Publication number
- JPH01129259U JPH01129259U JP1988022326U JP2232688U JPH01129259U JP H01129259 U JPH01129259 U JP H01129259U JP 1988022326 U JP1988022326 U JP 1988022326U JP 2232688 U JP2232688 U JP 2232688U JP H01129259 U JPH01129259 U JP H01129259U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reaction tube
- holding
- substrate
- inclined plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022326U JPH01129259U (da) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022326U JPH01129259U (da) | 1988-02-24 | 1988-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129259U true JPH01129259U (da) | 1989-09-04 |
Family
ID=31240339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988022326U Pending JPH01129259U (da) | 1988-02-24 | 1988-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129259U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002261021A (ja) * | 2001-02-28 | 2002-09-13 | Japan Pionics Co Ltd | 気相成長装置及び気相成長方法 |
-
1988
- 1988-02-24 JP JP1988022326U patent/JPH01129259U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002261021A (ja) * | 2001-02-28 | 2002-09-13 | Japan Pionics Co Ltd | 気相成長装置及び気相成長方法 |