JPH01129830U - - Google Patents
Info
- Publication number
- JPH01129830U JPH01129830U JP2560488U JP2560488U JPH01129830U JP H01129830 U JPH01129830 U JP H01129830U JP 2560488 U JP2560488 U JP 2560488U JP 2560488 U JP2560488 U JP 2560488U JP H01129830 U JPH01129830 U JP H01129830U
- Authority
- JP
- Japan
- Prior art keywords
- support
- semiconductor wafer
- support plate
- moves
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図は本考案の実施例を示す平面図、第２図
は第１図Ａ―Ａ面図、第３図は従来の搬送装置の
一例を示す平面図、第４図は第３図Ｂ―Ｂ面図を
示す。
６ａ，６ａ……支持板、６ｂ，６ｃ，６ｄ……
凹部、７……テーブル。
Fig. 1 is a plan view showing an embodiment of the present invention, Fig. 2 is a view taken along line A-A in Fig. 1, Fig. 3 is a plan view showing an example of a conventional conveying device, and Fig. 4 is Fig. 3 B. -Shows B-side view. 6a, 6a...Support plate, 6b, 6c, 6d...
Recessed part, 7...table.
Claims (1)
し半導体ウエハの一部を支持する同心半円上の凹
部を内方に向かつて順次深く形成した一対の支持
板と、半導体ウエハを支持して支持板に対し相対
的に水平動し支持板の対向面間で上下動するテー
ブルとを具備したことを特徴とする半導体ウエハ
搬送装置。 A pair of support plates that are separated and arranged in parallel to each other, have concentric semicircular concave portions that support a portion of the semiconductor wafer, and that support a portion of the semiconductor wafer. 1. A semiconductor wafer transfer device comprising: a table that moves horizontally relative to a support plate and moves up and down between opposing surfaces of the support plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560488U JPH01129830U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2560488U JPH01129830U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129830U true JPH01129830U (en) | 1989-09-04 |
Family
ID=31246483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2560488U Pending JPH01129830U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129830U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146971A (en) * | 1984-08-13 | 1986-03-07 | Mita Ind Co Ltd | Destaticizing method of photosensitive drum |
-
1988
- 1988-02-26 JP JP2560488U patent/JPH01129830U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146971A (en) * | 1984-08-13 | 1986-03-07 | Mita Ind Co Ltd | Destaticizing method of photosensitive drum |