JPH01129834U - - Google Patents
Info
- Publication number
- JPH01129834U JPH01129834U JP2527388U JP2527388U JPH01129834U JP H01129834 U JPH01129834 U JP H01129834U JP 2527388 U JP2527388 U JP 2527388U JP 2527388 U JP2527388 U JP 2527388U JP H01129834 U JPH01129834 U JP H01129834U
- Authority
- JP
- Japan
- Prior art keywords
- metal arms
- chuck
- view
- grip
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
Description
第１図はこの考案の一実施例によるチヤツクア
ームを示す斜視図、第２図は第１図における線
―に沿つた断面図、第３図は第２図に対応した
他の実施例による断面図、第４図は従来のウエハ
カセツト搬送装置の概略斜視図、第５図は従来の
チヤツクアームを示す斜視図である。図において
７は金属性アーム、８は非金属性チヤツク部材で
ある。なお、図中同一符号は同一、又は相当部品
を示す。
Fig. 1 is a perspective view showing a chuck arm according to one embodiment of this invention, Fig. 2 is a sectional view taken along the line - in Fig. 1, and Fig. 3 is a sectional view of another embodiment corresponding to Fig. 2. 4 is a schematic perspective view of a conventional wafer cassette transfer device, and FIG. 5 is a perspective view showing a conventional chuck arm. In the figure, 7 is a metal arm, and 8 is a non-metallic chuck member. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
も一対の金属性アームと、この金属性アームに重
ね合わされ、上記被挾持物と直接接して挾持する
非金属性チヤツク部材とを備えたチヤツクアーム
。 A chuck arm comprising at least a pair of metal arms disposed to grip an object to be held, and a non-metallic chuck member overlaid on the metal arms and directly contacting and holding the object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527388U JPH01129834U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2527388U JPH01129834U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129834U true JPH01129834U (en) | 1989-09-04 |
Family
ID=31245866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2527388U Pending JPH01129834U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129834U (en) |
-
1988
- 1988-02-26 JP JP2527388U patent/JPH01129834U/ja active Pending
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