JPH01134351U - - Google Patents
Info
- Publication number
- JPH01134351U JPH01134351U JP2965388U JP2965388U JPH01134351U JP H01134351 U JPH01134351 U JP H01134351U JP 2965388 U JP2965388 U JP 2965388U JP 2965388 U JP2965388 U JP 2965388U JP H01134351 U JPH01134351 U JP H01134351U
- Authority
- JP
- Japan
- Prior art keywords
- gear
- outer ring
- inner ring
- electrode
- rotatably
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図および第２図は、それぞれ、実施例に係
る電極駆動装置を示す概念図である。第３図は、
背景となる電極駆動装置を示す横断面図である。
第４図は第３図の装置の動作説明のための概念図
である。
２……イオン源、６……引出し電極、１２……
電極軸、１４……内輪、１６……外輪、１８……
固定ハウジング、２８……軸ガイド、３４……内
輪歯車、３８，３８′……固定歯車、４１，４２
……遊星歯車、４４……キヤリヤ、４６……中間
歯車。
FIG. 1 and FIG. 2 are conceptual diagrams each showing an electrode driving device according to an embodiment. Figure 3 shows
FIG. 2 is a cross-sectional view showing an electrode driving device as a background.
FIG. 4 is a conceptual diagram for explaining the operation of the apparatus shown in FIG. 3. 2...Ion source, 6...Extraction electrode, 12...
Electrode shaft, 14... Inner ring, 16... Outer ring, 18...
Fixed housing, 28... Shaft guide, 34... Internal gear, 38, 38'... Fixed gear, 41, 42
...Planetary gear, 44...Carrier, 46...Intermediate gear.
Claims (1)
電極軸が偏心して気密にかつ回転自在に挿通され
た内輪と、この内輪をそれにおける前記電極軸の
偏心と同じ距離だけ偏心して気密にかつ回転自在
に支持すると共に外部から回転駆動される外輪と
、この外輪を気密にかつ回転自在に支持する固定
ハウジングと、前記電極軸をイオン源の中心軸に
沿う方向に移動可能なようにガイドする軸ガイド
とを備える装置において、前記内輪にそれと同軸
状に内輪歯車を取り付け、前記固定ハウジングに
前記外輪と同軸状に固定歯車を取り付け、前記外
輪にキヤリヤを取り付け、このキヤリヤに第１お
よび第２の遊星歯車であつて互いに同じ軸に連結
されたものを回転自在に取り付けると共に、前者
は前記固定歯車と後者は前記内輪歯車とそれぞれ
噛み合うようにし、そして前記各歯車の歯数を、
前記外輪が１回転するときに前記内輪がそれと反
対方向に２回転する関係に選定していることを特
徴とするイオン源の電極駆動装置。 (2) 前記固定歯車として内歯車のものを用いて
それと前記第１の遊星歯車とが噛み合うようにし
、かつ前記第２の遊星歯車と前記内輪歯車との間
に両者に噛み合う中間歯車を設けた、請求項１記
載のイオン源の電極駆動装置。[Claims for Utility Model Registration] (1) An electrode shaft that supports the electrode of an ion source, an inner ring through which this electrode shaft is eccentrically inserted airtightly and rotatably, and an inner ring that supports the electrode shaft in an eccentric manner. an outer ring that is airtightly and rotatably supported eccentrically by the same distance as the ion source and rotatably driven from the outside; a fixed housing that airtightly and rotatably supports the outer ring; A device comprising a shaft guide movably guided in a direction, an inner ring gear is attached to the inner ring coaxially therewith, a fixed gear is attached to the fixed housing coaxially with the outer ring, and a carrier is attached to the outer ring. , first and second planetary gears connected to the same shaft are rotatably attached to this carrier, and the former meshes with the fixed gear and the latter meshes with the internal ring gear, respectively. The number of gear teeth,
An electrode driving device for an ion source, characterized in that the inner ring rotates twice in the opposite direction when the outer ring rotates once. (2) An internal gear is used as the fixed gear so that it meshes with the first planetary gear, and an intermediate gear is provided between the second planetary gear and the internal gear that meshes with both. An electrode driving device for an ion source according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965388U JPH0612603Y2 (en) | 1988-03-05 | 1988-03-05 | Electrode drive device for ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965388U JPH0612603Y2 (en) | 1988-03-05 | 1988-03-05 | Electrode drive device for ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01134351U true JPH01134351U (en) | 1989-09-13 |
| JPH0612603Y2 JPH0612603Y2 (en) | 1994-03-30 |
Family
ID=31254048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2965388U Expired - Lifetime JPH0612603Y2 (en) | 1988-03-05 | 1988-03-05 | Electrode drive device for ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612603Y2 (en) |
-
1988
- 1988-03-05 JP JP2965388U patent/JPH0612603Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612603Y2 (en) | 1994-03-30 |
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