JPH0113519Y2 - - Google Patents

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Publication number
JPH0113519Y2
JPH0113519Y2 JP2936484U JP2936484U JPH0113519Y2 JP H0113519 Y2 JPH0113519 Y2 JP H0113519Y2 JP 2936484 U JP2936484 U JP 2936484U JP 2936484 U JP2936484 U JP 2936484U JP H0113519 Y2 JPH0113519 Y2 JP H0113519Y2
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JP
Japan
Prior art keywords
conductor
electrode
opening
film
electrode terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2936484U
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Japanese (ja)
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JPS60144398U (en
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Priority to JP2936484U priority Critical patent/JPS60144398U/en
Publication of JPS60144398U publication Critical patent/JPS60144398U/en
Application granted granted Critical
Publication of JPH0113519Y2 publication Critical patent/JPH0113519Y2/ja
Granted legal-status Critical Current

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Description

【考案の詳細な説明】 本考案は、良好且つ堅牢な接合構造を有する高
分子圧電体膜からの電極端子の取り出し構造、あ
るいは高分子圧電体膜と導体との接合構造に関す
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a structure for taking out electrode terminals from a piezoelectric polymer film having a good and robust bonding structure, or a structure for bonding a piezoelectric polymer film and a conductor.

近年、振動センサー、マイクロホン、スピーカ
ー等の用途に電気機械変換素子として、フツ化ビ
ニリデン系樹脂等からなる単層または複層(バイ
モルフ)の高分子圧電体膜が広く用いられはじめ
ている。例えば振動センサーについては、従来、
PZT等のセラミツク圧電体膜の両面に蒸着等に
より電極膜を設け、それぞれの電極膜にリード線
を半田付けしたものが用いられていたが、このよ
うなセラミツク製の振動センサーには、被検体が
曲面をなす場合には追随性が悪いため測定精度が
落ること、また測定可能な振動数が500Hz以下で
あつて、例えばタービン等の10kHz程度にも達す
る高周波振動の測定が不可能なこと、等の不都合
があるのに対して、このような欠点のない高分子
圧電体膜を用いるセンサーは、本質的に適してい
る。
In recent years, single-layer or multi-layer (bimorph) polymeric piezoelectric films made of vinylidene fluoride-based resins have begun to be widely used as electromechanical transducers in applications such as vibration sensors, microphones, and speakers. For example, regarding vibration sensors,
In the past, electrode films were provided on both sides of a ceramic piezoelectric film such as PZT by vapor deposition, and lead wires were soldered to each electrode film. If the surface is curved, the measurement accuracy will be reduced due to poor followability, and the measurable frequency is 500Hz or less, making it impossible to measure high-frequency vibrations that reach about 10kHz, such as those of turbines. , etc. However, a sensor using a polymer piezoelectric film that does not have these drawbacks is essentially suitable.

しかしながら、このような高分子圧電体膜を電
気機械変換素子として使用する際の、大きな問題
点として電極からのリード線の取り出し構造が、
一般に脆くなり、振動条件下等での継続的使用に
耐え得ないということがある。例えば、最も基本
的な発想として、上記セラミツク製の振動センサ
ーについて説明したのと同様に、高分子圧電体膜
上に設けた電極膜にリード線を半田付けするの
は、高分子圧電体膜自体が熱により劣化するので
不適当である。
However, when using such a polymer piezoelectric film as an electromechanical transducer, a major problem is the structure for taking out the lead wires from the electrodes.
Generally, they become brittle and may not be able to withstand continuous use under vibration conditions. For example, the most basic idea is that, similar to the ceramic vibration sensor described above, soldering the lead wires to the electrode film provided on the polymer piezoelectric film is based on the polymer piezoelectric film itself. is unsuitable because it deteriorates due to heat.

上述の事情に鑑み、本考案の主要な目的は、高
分子圧電体膜からの耐久性ある電極取り出し構造
を提供することにある。
In view of the above circumstances, the main purpose of the present invention is to provide a durable electrode extraction structure from a polymer piezoelectric film.

本考案者らは、上述の目的を達成するために、
まず金属粉、カーボン粉末等を各種樹脂バインダ
ーに分散させてなる導電性接着剤あるいは、低融
点半田等(本明細書では、これらを総称して「良
導電性接着剤」と称する)を用いて、リード線を
高分子圧電体膜上の電極膜に接合することを試み
た。しかしながら、これら良導電性接着剤は、比
較的脆く、振動センサー等の電気機械変換素子と
しての使用において加わる継続的振動には、とて
も耐え得ない。
In order to achieve the above-mentioned purpose, the present inventors
First, a conductive adhesive made by dispersing metal powder, carbon powder, etc. in various resin binders, or a low melting point solder (herein, these are collectively referred to as "good conductive adhesives") is used. , we attempted to bond a lead wire to an electrode film on a polymer piezoelectric film. However, these highly conductive adhesives are relatively brittle and cannot withstand continuous vibrations applied during use as electromechanical transducers such as vibration sensors.

次いで本考案者らは、第1図に示すように、高
分子圧電体膜1の両面に設けた電極膜2aおよび
2b上に、別途半田3によりリード線4aおよび
4bをそれぞれ接合したCu片5aおよび5bを、
まず、エポキシ系樹脂接着剤等の接着力に優れる
非導電性接着剤6により固定し、このCu片5a
および5bと電極膜2aおよび2bとの導通は導
電片5aおよび5bの側壁に沿つて、これを囲む
ように良導電性接着剤7を盛つて確保することを
試みた。しかしながら、この場合も、良導電性接
着剤による接続部7は、振動センサー等に加えら
れる繰り返し振動により容易に破壊し、実用に耐
えないものであつた。
Next, as shown in FIG. 1, the present inventors attached a Cu piece 5a to which lead wires 4a and 4b were separately bonded with solder 3 to electrode films 2a and 2b provided on both sides of the polymer piezoelectric film 1, respectively. and 5b,
First, the Cu piece 5a is fixed with a non-conductive adhesive 6 having excellent adhesive strength such as an epoxy resin adhesive.
5b and the electrode films 2a and 2b was attempted to be ensured by applying a highly conductive adhesive 7 along and surrounding the side walls of the conductive pieces 5a and 5b. However, in this case as well, the connection portion 7 made of a highly conductive adhesive was easily destroyed by repeated vibrations applied to the vibration sensor, etc., and was not suitable for practical use.

しかしながら本考案者らは、更に研究した結
果、第1図の例と同様に、二種の接着剤を用いな
がら、より強制的に問題のある良導電性接着剤に
は、振動応力が伝達しにくいような使用形態にす
れば、良好な接合構造が得られることを見出し
て、本考案に到達した。
However, as a result of further research, the present inventors found that while using two types of adhesives, similar to the example shown in Figure 1, vibration stress is transmitted to the highly conductive adhesive, which has a more forced problem. We discovered that a good joint structure could be obtained by using a type of use that is difficult to use, and arrived at the present invention.

本考案は高分子圧電体膜の電極端子取り出し構
造体は、上述の知見に基づくものであり、より詳
しくは、高分子圧電体膜の少なくとも1面に設け
た電極膜に、端部近傍に開口を有する導体を、該
開口部の周囲において非良導電性接着剤を介して
接合し、該開口部において前記電極膜と導体とを
良導電性接着剤により電気的に接続してなること
を特徴とするものである。
The present invention is based on the above-mentioned findings, and the present invention is based on the above-mentioned knowledge. is bonded around the opening via a non-conductive adhesive, and the electrode film and the conductor are electrically connected at the opening via a highly conductive adhesive. That is.

すなわち、本考案の電極端子取り出し構造体に
おいては、高分子圧電体膜上の電極膜に、導電性
は乏しいが接着力に優れた非良導電性接着剤によ
り導体を接合し、且つ高分子圧電体膜の振動応力
が伝達し難い該導体の開口部において機械的に弱
い良導電性接着剤により導体と高分子圧電体膜上
の電極膜との電気的導通を確保することにより、
全体として、電気的導通が良好で且つ耐久性にも
優れた接合構造が得られる。
That is, in the electrode terminal extraction structure of the present invention, a conductor is bonded to the electrode film on the polymer piezoelectric film using a non-conductive adhesive that has poor conductivity but excellent adhesive strength, and By ensuring electrical continuity between the conductor and the electrode film on the polymer piezoelectric film using a mechanically weak and highly conductive adhesive at the opening of the conductor where the vibration stress of the body membrane is difficult to transmit.
Overall, a bonded structure with good electrical conductivity and excellent durability can be obtained.

以下、本考案を実施例について図面を参照しつ
つ更に具体的に説明する。
Hereinafter, the present invention will be described in more detail with reference to the drawings.

第2図は、本考案の一実施例にかかる振動セン
サー用電極端子取り出し構造体の、第1図に対応
する厚さ方向模式断面図であり、第3図は同実施
例の平面図である。この実施例において、高分子
圧電体膜1の両面には、Al,Ni,Cr等の蒸着膜
からなる電極膜2aおよび2bが設けられ、全体
として振動センサーのセンサー部をなす圧電素子
10を形成している。圧電素子10の寸法の一例
を挙げれば、長さ15mm、巾が3mm、厚さが約0.03
mmであり、その厚さのほとんどは圧電体膜1が占
め、電極膜2a,2bの各々の厚さは500Å程度
である。さてこの電極膜2a,2bの各々には、
エポキシ系樹脂、シアノアクリレート系樹脂、ウ
レタン系樹脂、シリコーン系樹脂、フエノール系
樹脂、アクリル酸エステル系樹脂、ブチラール系
樹脂、ニトリル系ゴム、クロロプレン系ゴム等の
非導電性接着剤あるいはこれに少量の金属もしく
はカーボン等の導電性粉末を加えた低導電性接着
剤(本明細書では、これらを総称して「非良導電
性接着剤」と称する)により、たとえば外径2
mm、内径1mm、厚さ0.05mmのCu、真ちゆう等から
なる導電体リング15a,15bを接合する。ま
たこの導電体リングには、予め、半田3によりリ
ード線4a,4bがそれぞれ接続されている。次
いで、このようにして接着した導電体リング15
a,15bの開口に良導電性接着剤17を盛つ
て、これら導電性リング15a,15bと、電極
膜2a,2bとの導通を確保する。
FIG. 2 is a schematic cross-sectional view in the thickness direction corresponding to FIG. 1 of an electrode terminal extraction structure for a vibration sensor according to an embodiment of the present invention, and FIG. 3 is a plan view of the same embodiment. . In this embodiment, electrode films 2a and 2b made of vapor-deposited films of Al, Ni, Cr, etc. are provided on both sides of a polymeric piezoelectric film 1, forming a piezoelectric element 10 that forms the sensor part of a vibration sensor as a whole. are doing. To give an example of the dimensions of the piezoelectric element 10, the length is 15 mm, the width is 3 mm, and the thickness is approximately 0.03 mm.
mm, most of the thickness is occupied by the piezoelectric film 1, and the thickness of each of the electrode films 2a and 2b is about 500 Å. Now, in each of these electrode films 2a and 2b,
Non-conductive adhesives such as epoxy resins, cyanoacrylate resins, urethane resins, silicone resins, phenolic resins, acrylic ester resins, butyral resins, nitrile rubbers, chloroprene rubbers, etc., or a small amount of these For example, an outer diameter of 2
Conductive rings 15a and 15b made of Cu, brass, etc., each having an inner diameter of 1 mm and a thickness of 0.05 mm are joined. Further, lead wires 4a and 4b are connected in advance to this conductor ring with solder 3, respectively. Next, the conductor ring 15 bonded in this way
A highly conductive adhesive 17 is placed in the openings of rings a and 15b to ensure conduction between these conductive rings 15a and 15b and electrode films 2a and 2b.

良導電性接着剤17としては、ポリエチレン、
ポリプロピレン、ABS、シリコーン樹脂等のバ
インダー樹脂中に、その100重量部に対して、100
〜1000重量部程度の金属粉あるいはカーボン粉末
を分散させてなる導電性樹脂接着剤あるいは、例
えば重量比で、Sn/Pb/Bi/In=12/18/49/
21(融点57.8℃)、Sn/Bi/In=17/57/26(融点
78.9℃)等の組成を有する融点が80℃以下の低融
点半田を用いることができる。
As the conductive adhesive 17, polyethylene,
100 parts by weight of binder resin such as polypropylene, ABS, silicone resin, etc.
A conductive resin adhesive made by dispersing ~1000 parts by weight of metal powder or carbon powder, or, for example, a weight ratio of Sn/Pb/Bi/In=12/18/49/
21 (melting point 57.8℃), Sn/Bi/In=17/57/26 (melting point
A low melting point solder having a composition such as 78.9°C) and a melting point of 80°C or lower can be used.

上記においては、電極膜に接合されるべき導体
が、リード線4a,4bと接合された導電体リン
グ15a,15bである例について述べた。しか
し、この接合されるべき導体は、第4図a(平面
図)および第4図b(正面図)に示すように先端
25aをリング状に巻回し且つ圧延等により偏平
化したリード線25であつてもよいし、また第5
図a(平面図)第5図b(正断面図)に示すように
端部近傍に開口35を設けた帯状導体35であつ
てもよい。
In the above, an example has been described in which the conductor to be joined to the electrode film is the conductor rings 15a, 15b joined to the lead wires 4a, 4b. However, the conductor to be joined is a lead wire 25 whose tip 25a is wound into a ring shape and flattened by rolling or the like, as shown in FIG. 4a (top view) and FIG. 4b (front view). There may be a fifth
As shown in Figure a (plan view) and Figure 5 b (front sectional view), it may be a strip-shaped conductor 35 having an opening 35 near the end.

更に、高分子圧電体膜1上に設けた電極2aま
たは2bがNi,Cr等の比較的耐熱性の良い材料
からなる場合には、第2図に対応して第6図(但
し、上面接合構造のみ)に示すように、電極膜2
a上のリング15aの開口内の位置に半田または
低融点半田18を盛り、その後、低融点半田また
は導電性樹脂接着剤17を盛ることにより、より
一層強固で且つ電気的導電も良好な接合構造とす
ることができる。
Furthermore, if the electrode 2a or 2b provided on the polymer piezoelectric film 1 is made of a material with relatively good heat resistance, such as Ni or Cr, FIG. 6 corresponds to FIG. structure only), the electrode film 2
By applying solder or low melting point solder 18 to the position inside the opening of ring 15a on a, and then applying low melting point solder or conductive resin adhesive 17, a bonding structure that is even stronger and has good electrical conductivity can be achieved. It can be done.

なお、上記の例においては本考案の電極端子取
り出し構造体の好ましい適用例として、振動セン
サーについて述べたが、高分子圧電体膜を複層化
し、あるいは他の薄膜体との積層体としたバイモ
ルフ、パイロセンサー等の用途にも、同様の電極
端子取り出し構造体が採用し得る。
In the above example, a vibration sensor was described as a preferable application example of the electrode terminal extraction structure of the present invention. A similar electrode terminal extraction structure can also be used for applications such as pyrosensors and the like.

上述したように、本考案によれば、高分子圧電
体膜上に導体を接合するに際して、非良導電性接
着剤と良導電性接着剤の二種の接着剤を用い、強
度的の問題のある良導電性接着剤を接合すべき導
体に設けた開口内に適用して高分子圧電体膜に加
わる振動応力の影響を受けにくくすることによ
り、良好な電気的接続と機械的耐久性を兼ね備え
た電極端子取り出し構造体が提供される。
As mentioned above, according to the present invention, when bonding a conductor onto a polymer piezoelectric film, two types of adhesives, a non-conductive adhesive and a highly conductive adhesive, are used to solve the problem of strength. A good electrical connection and mechanical durability are achieved by applying a certain highly conductive adhesive to the opening in the conductor to be bonded to make it less susceptible to vibrational stress applied to the piezoelectric polymer film. An electrode terminal extraction structure is provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案者らが本考案以前に試験した電
極端子取り出し構造体の一例の厚さ方向断面図、
第2図および第6図はそれぞれ本考案の実施例に
かかる電極端子取り出し構造体の厚さ方向断面
図、第3図は第2図の実施例の平面図、第4図a
および第5図aはそれぞれ接合されるべき導体の
例を示す平面図、第4図bおよび第5図bはそれ
ぞれ対応する正面図および正断面図である。 1……高分子圧電体膜、2a,2b……電極、
3……半田、4a,4b……リード線、15a,
15b……導電体リング、16……非良導電性接
着剤、17……良導電性接着剤、18……半田、
25……先端をリング化したリード線、35……
先端近傍に開口を設けた帯状導体。
FIG. 1 is a cross-sectional view in the thickness direction of an example of an electrode terminal extraction structure that the present inventors tested before the present invention;
2 and 6 are respectively sectional views in the thickness direction of an electrode terminal extraction structure according to an embodiment of the present invention, FIG. 3 is a plan view of the embodiment of FIG. 2, and FIG. 4a
5A and 5A are plan views showing examples of conductors to be joined, respectively, and FIGS. 4B and 5B are a corresponding front view and a front sectional view, respectively. 1... Polymer piezoelectric film, 2a, 2b... Electrode,
3... Solder, 4a, 4b... Lead wire, 15a,
15b...Conductor ring, 16...Poor conductive adhesive, 17...Good conductive adhesive, 18...Solder,
25...Lead wire with ring tip, 35...
A strip-shaped conductor with an opening near the tip.

Claims (1)

【実用新案登録請求の範囲】 1 高分子圧電体膜の少なくとも1面に設けた電
極膜に、端部近傍に開口を有する導体を、該開
口部の周囲において非良導電性接着剤を介して
接合し、該開口部において前記電極膜と導体と
を良導電性接着剤により電気的に接続してなる
ことを特徴とする、高分子圧電体膜の電極端子
取り出し構造体。 2 前記端部近傍に開口を有する導体が、導電体
リングとリード線との接合体である実用新案登
録請求の範囲第1項に記載の電極端子取り出し
構造体。 3 前記端部近傍に開口を有する導体が、端部近
傍に開口を設けた帯状導体である実用新案登録
請求の範囲第1項に記載の電極端子取り出し構
造体。 4 前記端部近傍に開口を有する導体が、端部を
リング状に巻回し且つ偏平化したリード線であ
る実用新案登録請求の範囲第1項に記載の電極
端子取り出し構造体。 5 前記開口部において前記電極膜と導体とが、
予め該開口部から露出する電極膜上に盛られた
半田を介してこれを覆う良導電性接着剤により
電気的に接続されている実用新案登録請求の範
囲第1項ないし第4項のいずれかに記載の電極
端子取り出し構造体。 6 前記高分子圧電体膜の両面にそれぞれ電極膜
を設け、これら電極膜の各々に、端部近傍に開
口を有する導体を接合し、且つ電気的に接続し
てなる実用新案登録請求の範囲第1項ないし第
5項のいずれかに記載の電極端子取り出し構造
体。
[Claims for Utility Model Registration] 1. An electrode film provided on at least one surface of a polymeric piezoelectric film is provided with a conductor having an opening near the end via a non-conductive adhesive around the opening. 1. An electrode terminal extraction structure of a polymer piezoelectric film, characterized in that the electrode film and the conductor are electrically connected at the opening by a highly conductive adhesive. 2. The electrode terminal extraction structure according to claim 1, wherein the conductor having an opening near the end is a joined body of a conductor ring and a lead wire. 3. The electrode terminal extraction structure according to claim 1, wherein the conductor having an opening near the end is a strip-shaped conductor having an opening near the end. 4. The electrode terminal lead-out structure according to claim 1, wherein the conductor having an opening near the end is a lead wire whose end is wound into a ring shape and flattened. 5 In the opening, the electrode film and the conductor are
Any one of claims 1 to 4 of the utility model registration claims, which are electrically connected by a highly conductive adhesive covering the electrode film through solder which is applied in advance on the electrode film exposed from the opening. The electrode terminal extraction structure described in . 6. Utility model registration claim No. 6, in which electrode films are provided on both sides of the polymer piezoelectric film, and a conductor having an opening near the end is bonded to each of these electrode films and electrically connected. The electrode terminal extraction structure according to any one of Items 1 to 5.
JP2936484U 1984-03-02 1984-03-02 Electrode terminal extraction structure Granted JPS60144398U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2936484U JPS60144398U (en) 1984-03-02 1984-03-02 Electrode terminal extraction structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2936484U JPS60144398U (en) 1984-03-02 1984-03-02 Electrode terminal extraction structure

Publications (2)

Publication Number Publication Date
JPS60144398U JPS60144398U (en) 1985-09-25
JPH0113519Y2 true JPH0113519Y2 (en) 1989-04-20

Family

ID=30528106

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JPS60144398U (en)

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JP2003125492A (en) * 2001-10-16 2003-04-25 Taiyo Yuden Co Ltd Piezoelectric acoustic device

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