JPH01135733U - - Google Patents
Info
- Publication number
- JPH01135733U JPH01135733U JP3145988U JP3145988U JPH01135733U JP H01135733 U JPH01135733 U JP H01135733U JP 3145988 U JP3145988 U JP 3145988U JP 3145988 U JP3145988 U JP 3145988U JP H01135733 U JPH01135733 U JP H01135733U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer cleaning
- cleaning jig
- etching
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims 2
Landscapes
- Weting (AREA)
Description
第１図は本考案の一実施例を示す斜視図である
。第２図は従来のウエハー洗浄用治具を示し、第
２図ａは斜視図を、第２図ｂは第２図ａのＡ―Ａ
断面を示す。 １０……ウエハー洗浄用治具、１１，１２，１
５，１６……側面、１７……開孔、２０……ウエ
ハー。
。第２図は従来のウエハー洗浄用治具を示し、第
２図ａは斜視図を、第２図ｂは第２図ａのＡ―Ａ
断面を示す。 １０……ウエハー洗浄用治具、１１，１２，１
５，１６……側面、１７……開孔、２０……ウエ
ハー。
Claims (1)
- ウエハーの洗浄やエツチング等のため、ウエハ
ーを収納したままウエハーの洗浄液やエツチング
液等の中に沈められる枠状のウエハー洗浄用治具
において、前記ウエハー洗浄用治具の側面に複数
の開孔を形成したことを特徴とするウエハー洗浄
用治具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3145988U JPH01135733U (ja) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3145988U JPH01135733U (ja) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01135733U true JPH01135733U (ja) | 1989-09-18 |
Family
ID=31257331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3145988U Pending JPH01135733U (ja) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01135733U (ja) |
-
1988
- 1988-03-08 JP JP3145988U patent/JPH01135733U/ja active Pending