JPH01137528U - - Google Patents

Info

Publication number
JPH01137528U
JPH01137528U JP3265088U JP3265088U JPH01137528U JP H01137528 U JPH01137528 U JP H01137528U JP 3265088 U JP3265088 U JP 3265088U JP 3265088 U JP3265088 U JP 3265088U JP H01137528 U JPH01137528 U JP H01137528U
Authority
JP
Japan
Prior art keywords
electrode
outer electrode
inner electrode
processing apparatus
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3265088U
Other languages
English (en)
Other versions
JPH0713216Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3265088U priority Critical patent/JPH0713216Y2/ja
Publication of JPH01137528U publication Critical patent/JPH01137528U/ja
Application granted granted Critical
Publication of JPH0713216Y2 publication Critical patent/JPH0713216Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図は本考案のプラズマ処理装置の電極構造
の斜視図、第２図は従来のプラズマ処理装置の電
極構造の斜視図である。 図中、１……外側電極、２ａ……外側電極の上
端、２ｂ……外側電極の下端、３……内側電極、
４ａ……内側電極の上端、４ｂ……内側電極の下
端、５……筒長、６……高周波電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. ２つの電極が同心円筒状に配されたプラズマ処
    理装置において、内側電極を外側電極よりも筒長
    を長くし、該内側電極を、該外側電極の両端部か
    ら突出させたことを特徴とするプラズマ処理装置
    。
JP3265088U 1988-03-14 1988-03-14 プラズマ処理装置 Expired - Lifetime JPH0713216Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3265088U JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3265088U JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH01137528U true JPH01137528U (ja) 1989-09-20
JPH0713216Y2 JPH0713216Y2 (ja) 1995-03-29

Family

ID=31259203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3265088U Expired - Lifetime JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0713216Y2 (ja)

Also Published As

Publication number Publication date
JPH0713216Y2 (ja) 1995-03-29

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