JPH01137530U - - Google Patents
Info
- Publication number
- JPH01137530U JPH01137530U JP3304388U JP3304388U JPH01137530U JP H01137530 U JPH01137530 U JP H01137530U JP 3304388 U JP3304388 U JP 3304388U JP 3304388 U JP3304388 U JP 3304388U JP H01137530 U JPH01137530 U JP H01137530U
- Authority
- JP
- Japan
- Prior art keywords
- introducer
- shutter
- rotational motion
- processing chamber
- vacuum processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304388U JPH01137530U (is) | 1988-03-11 | 1988-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304388U JPH01137530U (is) | 1988-03-11 | 1988-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137530U true JPH01137530U (is) | 1989-09-20 |
Family
ID=31259677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3304388U Pending JPH01137530U (is) | 1988-03-11 | 1988-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137530U (is) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11251298A (ja) * | 1998-03-02 | 1999-09-17 | Nec Kyushu Ltd | ドライエッチング装置とその起動方法 |
-
1988
- 1988-03-11 JP JP3304388U patent/JPH01137530U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11251298A (ja) * | 1998-03-02 | 1999-09-17 | Nec Kyushu Ltd | ドライエッチング装置とその起動方法 |
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