JPH01138637U - - Google Patents
Info
- Publication number
- JPH01138637U JPH01138637U JP3365388U JP3365388U JPH01138637U JP H01138637 U JPH01138637 U JP H01138637U JP 3365388 U JP3365388 U JP 3365388U JP 3365388 U JP3365388 U JP 3365388U JP H01138637 U JPH01138637 U JP H01138637U
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- chuck
- supply source
- cleaning device
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims 2
Landscapes
- Gripping On Spindles (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Description
第１図は本考案の一実施例を示す正面断面図。
第２図は本装置を研削盤に組合わせた例を示す側
面図である。
１，１１……流体噴射板、２……穴、３，１３
……流体供給源、４……移動装置、５……ウエハ
、８……チヤツク面、１６……真空チヤツク。
FIG. 1 is a front sectional view showing an embodiment of the present invention.
FIG. 2 is a side view showing an example in which this device is combined with a grinding machine. 1, 11...fluid ejection plate, 2...hole, 3, 13
...fluid supply source, 4... moving device, 5... wafer, 8... chuck surface, 16... vacuum chuck.
Claims (1)
る２方向の穴を持つ流体噴射板と、流体噴射板の
移動装置からなり、チヤツクのワーク載置面とワ
ークの被載置面の両者を洗浄することを特徴とす
るチヤツク洗浄装置。 ２ 流体供給源の供給する流体が種類の異なる複
数の流体であることを特徴とする実用新案登録請
求の範囲第１項記載のチヤツク洗浄装置。[Claims for Utility Model Registration] 1. Consists of a fluid ejecting plate with holes in two directions, one of which is connected to a fluid supply source and the other facing, and a moving device for the fluid ejecting plate, which connects the workpiece mounting surface of the chuck and the workpiece. A chuck cleaning device characterized in that it cleans both of the mounting surfaces of the chuck. 2. The chuck cleaning device according to claim 1, wherein the fluid supplied by the fluid supply source is a plurality of different types of fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3365388U JPH01138637U (en) | 1988-03-16 | 1988-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3365388U JPH01138637U (en) | 1988-03-16 | 1988-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01138637U true JPH01138637U (en) | 1989-09-21 |
Family
ID=31260344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3365388U Pending JPH01138637U (en) | 1988-03-16 | 1988-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01138637U (en) |
-
1988
- 1988-03-16 JP JP3365388U patent/JPH01138637U/ja active Pending
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