JPH01143782A - レーザビーム位置検出装置 - Google Patents

レーザビーム位置検出装置

Info

Publication number
JPH01143782A
JPH01143782A JP62301406A JP30140687A JPH01143782A JP H01143782 A JPH01143782 A JP H01143782A JP 62301406 A JP62301406 A JP 62301406A JP 30140687 A JP30140687 A JP 30140687A JP H01143782 A JPH01143782 A JP H01143782A
Authority
JP
Japan
Prior art keywords
laser beam
optical path
laser
ultrasonic
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62301406A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521672B2 (it
Inventor
Noriaki Sasaki
憲明 佐々木
Shuji Ogawa
小川　周治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62301406A priority Critical patent/JPH01143782A/ja
Publication of JPH01143782A publication Critical patent/JPH01143782A/ja
Publication of JPH0521672B2 publication Critical patent/JPH0521672B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP62301406A 1987-12-01 1987-12-01 レーザビーム位置検出装置 Granted JPH01143782A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62301406A JPH01143782A (ja) 1987-12-01 1987-12-01 レーザビーム位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62301406A JPH01143782A (ja) 1987-12-01 1987-12-01 レーザビーム位置検出装置

Publications (2)

Publication Number Publication Date
JPH01143782A true JPH01143782A (ja) 1989-06-06
JPH0521672B2 JPH0521672B2 (it) 1993-03-25

Family

ID=17896487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62301406A Granted JPH01143782A (ja) 1987-12-01 1987-12-01 レーザビーム位置検出装置

Country Status (1)

Country Link
JP (1) JPH01143782A (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6331693B1 (en) * 1999-06-28 2001-12-18 Cincinnati Incorporated Beam delivery system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6331693B1 (en) * 1999-06-28 2001-12-18 Cincinnati Incorporated Beam delivery system

Also Published As

Publication number Publication date
JPH0521672B2 (it) 1993-03-25

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