JPH01146527U - - Google Patents

Info

Publication number
JPH01146527U
JPH01146527U JP4204088U JP4204088U JPH01146527U JP H01146527 U JPH01146527 U JP H01146527U JP 4204088 U JP4204088 U JP 4204088U JP 4204088 U JP4204088 U JP 4204088U JP H01146527 U JPH01146527 U JP H01146527U
Authority
JP
Japan
Prior art keywords
chuck
semiconductor frame
guide rail
claws
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4204088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0625956Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4204088U priority Critical patent/JPH0625956Y2/ja
Publication of JPH01146527U publication Critical patent/JPH01146527U/ja
Application granted granted Critical
Publication of JPH0625956Y2 publication Critical patent/JPH0625956Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP4204088U 1988-03-31 1988-03-31 半導体フレームの送り装置 Expired - Lifetime JPH0625956Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4204088U JPH0625956Y2 (ja) 1988-03-31 1988-03-31 半導体フレームの送り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4204088U JPH0625956Y2 (ja) 1988-03-31 1988-03-31 半導体フレームの送り装置

Publications (2)

Publication Number Publication Date
JPH01146527U true JPH01146527U (2) 1989-10-09
JPH0625956Y2 JPH0625956Y2 (ja) 1994-07-06

Family

ID=31268465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4204088U Expired - Lifetime JPH0625956Y2 (ja) 1988-03-31 1988-03-31 半導体フレームの送り装置

Country Status (1)

Country Link
JP (1) JPH0625956Y2 (2)

Also Published As

Publication number Publication date
JPH0625956Y2 (ja) 1994-07-06

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