JPH01148199U - - Google Patents
Info
- Publication number
- JPH01148199U JPH01148199U JP4478688U JP4478688U JPH01148199U JP H01148199 U JPH01148199 U JP H01148199U JP 4478688 U JP4478688 U JP 4478688U JP 4478688 U JP4478688 U JP 4478688U JP H01148199 U JPH01148199 U JP H01148199U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- attached
- exhaust port
- sealing part
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Thermal Insulation (AREA)
Description
第１図は本考案の一実施例である真空排気部品
の構造を示す図である。
１……真空排気部品本体、３……シール部品セ
ツト軸、４……ベローズ、５……シール部品、６
……フタ、７……被真空排気物、８……シール部
品固定治具、９……フタ固定フランジ。
FIG. 1 is a diagram showing the structure of a vacuum evacuation component that is an embodiment of the present invention. 1... Vacuum exhaust parts main body, 3... Seal parts set shaft, 4... Bellows, 5... Seal parts, 6
. . . Lid, 7. Object to be evacuated, 8. Seal parts fixing jig, 9. Lid fixing flange.
Claims (1)
ル部品にベローズの一方を取り付け、該ベローズ
の他方は前記シール部品を内容間に収納し前記真
空排気口を大気から隔離するケースに取り付けて
、大気側から前記ベローズの軸方向に前記シール
部品を移動可能にしたことを特徴とする真空排気
部品の構造。 One of the bellows is attached to a removable sealing part that can seal the vacuum exhaust port, and the other bellows is attached to a case that houses the sealing part between the contents and isolates the vacuum exhaust port from the atmosphere, and A structure of a vacuum evacuation component, characterized in that the seal component is movable in the axial direction of the bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4478688U JPH01148199U (en) | 1988-04-04 | 1988-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4478688U JPH01148199U (en) | 1988-04-04 | 1988-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148199U true JPH01148199U (en) | 1989-10-13 |
Family
ID=31271135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4478688U Pending JPH01148199U (en) | 1988-04-04 | 1988-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148199U (en) |
-
1988
- 1988-04-04 JP JP4478688U patent/JPH01148199U/ja active Pending