JPH01148766U - - Google Patents
Info
- Publication number
- JPH01148766U JPH01148766U JP1988046331U JP4633188U JPH01148766U JP H01148766 U JPH01148766 U JP H01148766U JP 1988046331 U JP1988046331 U JP 1988046331U JP 4633188 U JP4633188 U JP 4633188U JP H01148766 U JPH01148766 U JP H01148766U
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- liquid tank
- barrier
- molecules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046331U JPH01148766U (2) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046331U JPH01148766U (2) | 1988-04-06 | 1988-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148766U true JPH01148766U (2) | 1989-10-16 |
Family
ID=31272602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988046331U Pending JPH01148766U (2) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148766U (2) |
-
1988
- 1988-04-06 JP JP1988046331U patent/JPH01148766U/ja active Pending
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