JPH01148810U - - Google Patents
Info
- Publication number
- JPH01148810U JPH01148810U JP4511388U JP4511388U JPH01148810U JP H01148810 U JPH01148810 U JP H01148810U JP 4511388 U JP4511388 U JP 4511388U JP 4511388 U JP4511388 U JP 4511388U JP H01148810 U JPH01148810 U JP H01148810U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- light
- irradiates
- components
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4511388U JPH01148810U (da) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4511388U JPH01148810U (da) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148810U true JPH01148810U (da) | 1989-10-16 |
Family
ID=31271435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4511388U Pending JPH01148810U (da) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148810U (da) |
-
1988
- 1988-04-01 JP JP4511388U patent/JPH01148810U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0457747U (da) | ||
| JPS63157737U (da) | ||
| JPH0376313U (da) | ||
| JPS606223U (ja) | フオトマスク検査機 | |
| JPS62134001U (da) | ||
| JPH01121807U (da) | ||
| JPS58144346U (ja) | 照明装置 | |
| JPS644436U (da) | ||
| JPH0238768U (da) | ||
| JPS603771U (ja) | エレベ−タの位置表示装置 | |
| JPS62160574U (da) | ||
| JPS6069273U (ja) | エレベ−タの照明装置 | |
| JPS60166144U (ja) | 投影露光装置 | |
| JPH02146842U (da) | ||
| JPH03104754U (da) | ||
| JPS63115745U (da) | ||
| JPS6222510U (da) | ||
| JPS6265480U (da) | ||
| JPH0448657U (da) | ||
| JPH01116476U (da) | ||
| JPS6052148U (ja) | コンソ−ルボツクス照明装置 | |
| JPS58146243U (ja) | ホトマスク | |
| JPS6011328U (ja) | 複写機の原稿照明装置 | |
| JPH0474500U (da) | ||
| JPS59178636U (ja) | 被写体位置表示機構 |