JPH01152181A - 有機薄膜構造体及びその製造法 - Google Patents

有機薄膜構造体及びその製造法

Info

Publication number: JPH01152181A
Authority: JP; Japan
Prior art keywords: film structure; film; thickness; thin film; less
Prior art date: 1987-12-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP30944787A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0556791B2 (2

Inventor

Yutaka Takeya

豊竹谷

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

National Institute of Advanced Industrial Science and Technology AIST

Original Assignee

Agency of Industrial Science and Technology

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-12-09

Filing date

1987-12-09

Publication date

1989-06-14

1987-12-09 Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology

1987-12-09 Priority to JP30944787A priority Critical patent/JPH01152181A/ja

1989-06-14 Publication of JPH01152181A publication Critical patent/JPH01152181A/ja

1993-08-20 Publication of JPH0556791B2 publication Critical patent/JPH0556791B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 5
239000010408 film Substances 0.000 claims abstract description 30
239000010409 thin film Substances 0.000 claims abstract description 13
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 5
150000002430 hydrocarbons Chemical group 0.000 claims abstract description 4
239000004215 Carbon black (E152) Substances 0.000 claims abstract 2
229930195733 hydrocarbon Natural products 0.000 claims abstract 2
125000004432 carbon atom Chemical group C* 0.000 claims description 5
239000000126 substance Substances 0.000 claims description 4
150000001875 compounds Chemical class 0.000 claims description 3
238000009825 accumulation Methods 0.000 claims description 2
239000012528 membrane Substances 0.000 claims 1
238000000034 method Methods 0.000 abstract description 18
239000000463 material Substances 0.000 abstract description 6
JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 abstract description 3
UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 abstract description 2
239000000470 constituent Substances 0.000 abstract 2
230000001186 cumulative effect Effects 0.000 description 13
HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 8
239000000843 powder Substances 0.000 description 7
230000009102 absorption Effects 0.000 description 5
238000010521 absorption reaction Methods 0.000 description 5
150000001408 amides Chemical class 0.000 description 5
230000000052 comparative effect Effects 0.000 description 5
239000000758 substrate Substances 0.000 description 5
238000002441 X-ray diffraction Methods 0.000 description 4
230000006835 compression Effects 0.000 description 4
238000007906 compression Methods 0.000 description 4
ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
239000011521 glass Substances 0.000 description 3
239000007787 solid Substances 0.000 description 3
238000001228 spectrum Methods 0.000 description 3
238000001157 Fourier transform infrared spectrum Methods 0.000 description 2
DIKBFYAXUHHXCS-UHFFFAOYSA-N bromoform Chemical compound BrC(Br)Br DIKBFYAXUHHXCS-UHFFFAOYSA-N 0.000 description 2
230000008602 contraction Effects 0.000 description 2
239000012153 distilled water Substances 0.000 description 2
239000010931 gold Substances 0.000 description 2
239000003960 organic solvent Substances 0.000 description 2
230000010287 polarization Effects 0.000 description 2
LGXVIGDEPROXKC-UHFFFAOYSA-N 1,1-dichloroethene Chemical group ClC(Cl)=C LGXVIGDEPROXKC-UHFFFAOYSA-N 0.000 description 1
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
125000003368 amide group Chemical group 0.000 description 1
239000008346 aqueous phase Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
229950005228 bromoform Drugs 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
IAZDPXIOMUYVGZ-UHFFFAOYSA-N dimethyl sulfoxide Natural products CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 1
238000004821 distillation Methods 0.000 description 1
230000005684 electric field Effects 0.000 description 1
125000000524 functional group Chemical group 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
125000001165 hydrophobic group Chemical group 0.000 description 1
238000005259 measurement Methods 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
238000006116 polymerization reaction Methods 0.000 description 1
150000003222 pyridines Chemical class 0.000 description 1
239000010453 quartz Substances 0.000 description 1
230000005855 radiation Effects 0.000 description 1
239000002994 raw material Substances 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
239000002356 single layer Substances 0.000 description 1
239000002904 solvent Substances 0.000 description 1
238000003786 synthesis reaction Methods 0.000 description 1
230000007704 transition Effects 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1

Landscapes

Pyridine Compounds (AREA)
Manufacture Of Macromolecular Shaped Articles (AREA)

JP30944787A 1987-12-09 1987-12-09 有機薄膜構造体及びその製造法 Granted JPH01152181A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP30944787A JPH01152181A (ja)	1987-12-09	1987-12-09	有機薄膜構造体及びその製造法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP30944787A JPH01152181A (ja)	1987-12-09	1987-12-09	有機薄膜構造体及びその製造法

Publications (2)

Publication Number	Publication Date
JPH01152181A true JPH01152181A (ja)	1989-06-14
JPH0556791B2 JPH0556791B2 (2)	1993-08-20

Family

ID=17993111

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP30944787A Granted JPH01152181A (ja)	1987-12-09	1987-12-09	有機薄膜構造体及びその製造法

Country Status (1)

Country	Link
JP (1)	JPH01152181A (2)

1987
- 1987-12-09 JP JP30944787A patent/JPH01152181A/ja active Granted

Also Published As

Publication number	Publication date
JPH0556791B2 (2)	1993-08-20

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Legal Events

Date	Code	Title	Description
2007-12-09	EXPY	Cancellation because of completion of term