JPH01155252U - - Google Patents

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Publication number
JPH01155252U
JPH01155252U JP5100788U JP5100788U JPH01155252U JP H01155252 U JPH01155252 U JP H01155252U JP 5100788 U JP5100788 U JP 5100788U JP 5100788 U JP5100788 U JP 5100788U JP H01155252 U JPH01155252 U JP H01155252U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
analysis
slit
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5100788U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5100788U priority Critical patent/JPH01155252U/ja
Publication of JPH01155252U publication Critical patent/JPH01155252U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例に係る荷電粒子
ビーム分析装置を示す概略平面図である。第２図
は、従来の荷電粒子ビーム分析装置の一例を示す
概略平面図である。第３図は、第２図の装置でポ
ールピースの出入口角を変化させた場合の一例を
示す概略平面図である。 ４……荷電粒子ビーム、６……分析電磁石、８
ａ，８ｂ……ポールピース、１０……分析スリツ
ト、２０……スリツト駆動機構、３０……制御装
置、α……入口角、β……出口角。

Claims (1)

    【実用新案登録請求の範囲】
  1. 荷電粒子ビームの運動量分析を行う分析電磁石
    であつてその入口部に入口角が可変の、出口部に
    出口角が可変のポールピースをそれぞれ有するも
    のと、この分析電磁石の下流側における荷電粒子
    ビームの軌道上に設けられた分析スリツトとを備
    える荷電粒子ビーム分析装置において、前記分析
    スリツトを荷電粒子ビームの中心軸に沿つて移動
    させるスリツト駆動機構と、前記分析電磁石の入
    口部ポールピースの入口角および出口部ポールピ
    ースの出口角に基づいて前記荷電粒子ビームの焦
    点位置を演算し、その焦点位置に分析スリツトが
    移動するように前記スリツト駆動機構を制御する
    制御装置とを設けたことを特徴とする荷電粒子ビ
    ーム分析装置。
JP5100788U 1988-04-15 1988-04-15 Pending JPH01155252U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (ja) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (ja) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01155252U true JPH01155252U (ja) 1989-10-25

Family

ID=31277036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5100788U Pending JPH01155252U (ja) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01155252U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

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