JPH01156539U - - Google Patents
Info
- Publication number
- JPH01156539U JPH01156539U JP1988054255U JP5425588U JPH01156539U JP H01156539 U JPH01156539 U JP H01156539U JP 1988054255 U JP1988054255 U JP 1988054255U JP 5425588 U JP5425588 U JP 5425588U JP H01156539 U JPH01156539 U JP H01156539U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reaction tube
- cap
- wafer
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988054255U JPH01156539U (da) | 1988-04-21 | 1988-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988054255U JPH01156539U (da) | 1988-04-21 | 1988-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156539U true JPH01156539U (da) | 1989-10-27 |
Family
ID=31280191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988054255U Pending JPH01156539U (da) | 1988-04-21 | 1988-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156539U (da) |
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1988
- 1988-04-21 JP JP1988054255U patent/JPH01156539U/ja active Pending