JPH01156540U - - Google Patents
Info
- Publication number
- JPH01156540U JPH01156540U JP5296588U JP5296588U JPH01156540U JP H01156540 U JPH01156540 U JP H01156540U JP 5296588 U JP5296588 U JP 5296588U JP 5296588 U JP5296588 U JP 5296588U JP H01156540 U JPH01156540 U JP H01156540U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- cleaning
- holding table
- cleaning solution
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図は本考案の石英管洗浄装置の一実施例を
示す縦断面図である。
1:洗浄槽、2:洗浄液、3:石英管、4:保
持台、5:支軸、6:傾斜調節棒、7:給液管、
8:排出管。
FIG. 1 is a longitudinal sectional view showing an embodiment of the quartz tube cleaning device of the present invention. 1: Cleaning tank, 2: Cleaning liquid, 3: Quartz tube, 4: Holding stand, 5: Support shaft, 6: Inclination adjustment rod, 7: Liquid supply pipe,
8: Discharge pipe.
Claims (1)
漬させて洗浄する石英管洗浄装置において、前記
石英管を水平状態に保持すると共に支軸を中心に
して両側が上下動する保持台を具え、該保持台の
一端に該保持台を上下させて前記石英管を傾斜さ
せ、該石英管中に存在する気泡並びに残留液を排
除する傾斜調節棒が設けてあることを特徴とする
石英管洗浄装置。 A quartz tube cleaning device for cleaning a quartz tube by filling a cleaning tank with a cleaning solution and immersing a quartz tube in the cleaning solution, the quartz tube cleaning device having a holding table that holds the quartz tube in a horizontal state and that moves up and down on both sides about a support shaft. , a quartz tube cleaning characterized in that an inclination adjustment rod is provided at one end of the holding table to tilt the quartz tube by raising and lowering the holding table to eliminate air bubbles and residual liquid present in the quartz tube. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296588U JPH01156540U (en) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296588U JPH01156540U (en) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156540U true JPH01156540U (en) | 1989-10-27 |
Family
ID=31278961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5296588U Pending JPH01156540U (en) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156540U (en) |
-
1988
- 1988-04-20 JP JP5296588U patent/JPH01156540U/ja active Pending
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