JPH01156541U - - Google Patents

Info

Publication number
JPH01156541U
JPH01156541U JP5498588U JP5498588U JPH01156541U JP H01156541 U JPH01156541 U JP H01156541U JP 5498588 U JP5498588 U JP 5498588U JP 5498588 U JP5498588 U JP 5498588U JP H01156541 U JPH01156541 U JP H01156541U
Authority
JP
Japan
Prior art keywords
organic film
gas
chemical solution
substrate
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5498588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5498588U priority Critical patent/JPH01156541U/ja
Publication of JPH01156541U publication Critical patent/JPH01156541U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である有機被膜の
除去装置を示す断面図、第２図は従来の有機被膜
の除去装置を示す断面図である。 図中、１は処理槽、２は薬液、３は酸化性気体
の気体供給装置、９は気体溶解装置、１２は除害
装置または再生装置である。なお、図中、同一符
号は同一もしくは相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基体に付着した有機被膜を薬液と酸化性気体を
    用いて除去する有機被膜の除去装置において、周
    辺雰囲気とは隔離した気体溶解装置を備えたこと
    を特徴とする有機被膜の除去装置。
JP5498588U 1988-04-21 1988-04-21 Pending JPH01156541U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5498588U JPH01156541U (ja) 1988-04-21 1988-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5498588U JPH01156541U (ja) 1988-04-21 1988-04-21

Publications (1)

Publication Number Publication Date
JPH01156541U true JPH01156541U (ja) 1989-10-27

Family

ID=31280893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5498588U Pending JPH01156541U (ja) 1988-04-21 1988-04-21

Country Status (1)

Country Link
JP (1) JPH01156541U (ja)

Similar Documents

Publication Publication Date Title
JPS636032U (ja)
JPS6426048U (ja)
JPS61171594U (ja)
JPS6319570U (ja)
JPS6377688U (ja)
JPS63162528U (ja)
JP3043577U (ja) 小窓付トイレのロータンク
JPS62106699U (ja)
JPS6357315U (ja)
JPS61193176U (ja)
JPS6249158U (ja)
JPH0273634U (ja)
JPH0327450U (ja)
JPS59105107U (ja) 医療機器用ホ−スカバ−
JPH047845U (ja)
JPH0322525U (ja)
JPS6237800U (ja)
JPS63167740U (ja)
JPS6426609U (ja)
JPS5882831U (ja) 排オゾン処理装置
JPS6456872U (ja)
JPS60119918U (ja) 脱臭装置
JPS61161359U (ja)
JPS63185435U (ja)
JPH0425231U (ja)