JPH01156545U - - Google Patents
Info
- Publication number
- JPH01156545U JPH01156545U JP5320288U JP5320288U JPH01156545U JP H01156545 U JPH01156545 U JP H01156545U JP 5320288 U JP5320288 U JP 5320288U JP 5320288 U JP5320288 U JP 5320288U JP H01156545 U JPH01156545 U JP H01156545U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment apparatus
- integrated circuit
- semiconductor integrated
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000002791 soaking Methods 0.000 description 1
Description
第１図は本考案の実施例を示す側面図、第２図
は、従来の熱処理装置の側面図である。
１……ヒータ、２……均熱管、３……炉心管、
４……ガス導入口、５……熱電対、６……着火点
、７……円筒部。
FIG. 1 is a side view showing an embodiment of the present invention, and FIG. 2 is a side view of a conventional heat treatment apparatus. 1... Heater, 2... Soaking tube, 3... Furnace core tube,
4... Gas inlet, 5... Thermocouple, 6... Ignition point, 7... Cylindrical portion.
Claims (1)
えた半導体集積回路装置の熱処理装置において、
円筒型炉心管内にガス導入端側より内部温度を測
定する熱電対を入れる為の円筒部を有することを
特徴とする半導体集積回路装置の熱処理装置。 In a heat treatment apparatus for semiconductor integrated circuit devices equipped with a circular furnace tube having a gas introduction part and an open part,
A heat treatment apparatus for a semiconductor integrated circuit device, characterized in that the cylindrical reactor core tube has a cylindrical part for inserting a thermocouple for measuring internal temperature from the gas introduction end side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320288U JPH01156545U (en) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320288U JPH01156545U (en) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156545U true JPH01156545U (en) | 1989-10-27 |
Family
ID=31279194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5320288U Pending JPH01156545U (en) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156545U (en) |
-
1988
- 1988-04-19 JP JP5320288U patent/JPH01156545U/ja active Pending
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