JPH01160652U - - Google Patents

Info

Publication number
JPH01160652U
JPH01160652U JP5702788U JP5702788U JPH01160652U JP H01160652 U JPH01160652 U JP H01160652U JP 5702788 U JP5702788 U JP 5702788U JP 5702788 U JP5702788 U JP 5702788U JP H01160652 U JPH01160652 U JP H01160652U
Authority
JP
Japan
Prior art keywords
disk
circuit
display device
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5702788U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5702788U priority Critical patent/JPH01160652U/ja
Publication of JPH01160652U publication Critical patent/JPH01160652U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の一実施例の構成を示すブロ
ツク図、第２図はデイスクの動きを説明するため
のデイスクの平面図、第３図はデイスク電流の時
間を示す波形図、第４図はデイスクの移動とイオ
ンビームの照射との関係を説明する概略図、第５
図は微分回路の出力波形を示す波形図、第６図は
この考案の他の実施例の構成を示すブロツク図、
第７図はデイスクの並進速度が変化する場合のデ
イスクの位置を説明するための概略図、第８図は
第６図のデイスク電流とデイスクの位置との関係
を示すグラフ、第９図は従来のイオン注入装置の
イオンビーム形状を測定する部分の構成の一例を
示すブロツク図、第１０図は第９図の多孔板の平
面図、第１１図は従来例における電流密度分布の
測定結果を示すグラフである。 １……デイスク、２……イオンビーム、３……
電流計測回路、４……微分回路、５……表示装置
。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) イオン照射対象物が周縁部に装填されて回
    転するとともに少なくとも外周縁がイオンビーム
    を横切るように並進移動するデイスクと、このデ
    イスクに流れるデイスク電流を計測する電流計測
    回路と、この電流計測回路の出力信号を時間微分
    する微分回路と、この微分回路の出力波形を表示
    する表示装置とを備えたイオン注入装置。 (2) 前記微分回路と前記表示装置との間に前記
    微分回路の出力を前記デイスクの並進移動速度で
    割る割算器を介挿した実用新案登録請求の範囲第
    (1)項記載のイオン注入装置。
JP5702788U 1988-04-26 1988-04-26 Pending JPH01160652U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5702788U JPH01160652U (ja) 1988-04-26 1988-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5702788U JPH01160652U (ja) 1988-04-26 1988-04-26

Publications (1)

Publication Number Publication Date
JPH01160652U true JPH01160652U (ja) 1989-11-08

Family

ID=31282882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5702788U Pending JPH01160652U (ja) 1988-04-26 1988-04-26

Country Status (1)

Country Link
JP (1) JPH01160652U (ja)

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