JPH01160830U - - Google Patents
Info
- Publication number
- JPH01160830U JPH01160830U JP4854088U JP4854088U JPH01160830U JP H01160830 U JPH01160830 U JP H01160830U JP 4854088 U JP4854088 U JP 4854088U JP 4854088 U JP4854088 U JP 4854088U JP H01160830 U JPH01160830 U JP H01160830U
- Authority
- JP
- Japan
- Prior art keywords
- bottom wall
- carrier
- valve
- wafers
- houses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図面は本考案の実施例を示し、第１図は処理槽
の製作説明図、第２図は一部切欠平面図、第３図
は第２図のＡ―Ａ線断面図、第４図は第３図のＢ
―Ｂ線断面図である。 １…処理槽、２…キヤリヤ、３…側壁、４…底
壁、１４…弁。
の製作説明図、第２図は一部切欠平面図、第３図
は第２図のＡ―Ａ線断面図、第４図は第３図のＢ
―Ｂ線断面図である。 １…処理槽、２…キヤリヤ、３…側壁、４…底
壁、１４…弁。
Claims (1)
- ウエハを支持するキヤリヤを収納し洗浄液が流
入する処理槽は、側壁及び底壁を一体的に形成し
てあり、該底壁は下方に向けて傾斜しかつ排水口
を有し、該排水口を開閉する弁は、作用杆を介し
エアシリンダで操作されるウエハ洗浄槽。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854088U JPH01160830U (ja) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854088U JPH01160830U (ja) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160830U true JPH01160830U (ja) | 1989-11-08 |
Family
ID=31274685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4854088U Pending JPH01160830U (ja) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160830U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146731B2 (ja) * | 1982-06-11 | 1986-10-15 | Matsushita Denki Sangyo Kk | |
| JPS62190729A (ja) * | 1986-02-17 | 1987-08-20 | Nec Corp | 水洗装置 |
-
1988
- 1988-04-11 JP JP4854088U patent/JPH01160830U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146731B2 (ja) * | 1982-06-11 | 1986-10-15 | Matsushita Denki Sangyo Kk | |
| JPS62190729A (ja) * | 1986-02-17 | 1987-08-20 | Nec Corp | 水洗装置 |