JPH01160832U - - Google Patents
Info
- Publication number
- JPH01160832U JPH01160832U JP4872888U JP4872888U JPH01160832U JP H01160832 U JPH01160832 U JP H01160832U JP 4872888 U JP4872888 U JP 4872888U JP 4872888 U JP4872888 U JP 4872888U JP H01160832 U JPH01160832 U JP H01160832U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- replaceable
- protrusion
- grooved recess
- lower hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の実施例を示す交換式ホツトプ
レートの分解斜視図、第２図はそのホツトプレー
トの着脱専用工具の側面図、第３図はその交換式
ホツトプレートのセツト状態を示す側面図、第４
図は従来のホツトプレートの全体斜視図、第５図
は本考案の他の実施例を示す交換式ホツトプレー
トの分解斜視図である。
１０，４０…下部ホツトプレート、１１，４１
…ヒータ、１２，５１…案内用突条体、２０，５
０…上部ホツトプレート、１３，５２…突起、１
４…固定ネジ、１５…窪み、２１，４２…凹部、
２２，４３…凹所、２３…着脱用溝、２４…ウエ
ハ搬送ケーブル用溝、３０…着脱専用工具。
Fig. 1 is an exploded perspective view of a replaceable hot plate showing an embodiment of the present invention, Fig. 2 is a side view of a tool dedicated to attaching and removing the hot plate, and Fig. 3 is a side view showing the set state of the replaceable hot plate. Figure, 4th
This figure is an overall perspective view of a conventional hot plate, and FIG. 5 is an exploded perspective view of a replaceable hot plate showing another embodiment of the present invention. 10, 40...Lower hot plate, 11, 41
...Heater, 12,51...Guiding protrusion, 20,5
0...Upper hot plate, 13, 52...Protrusion, 1
4... Fixing screw, 15... Recess, 21, 42... Recessed part,
22, 43... recess, 23... attachment/detachment groove, 24... wafer transfer cable groove, 30... attachment/detachment special tool.
Claims (1)
おいて、 (a) 下部ホツトプレートと、 (b) 上部ホツトプレートと、 (c) 前記下部ホツトプレートに前記上部ホツ
トプレートを係合する手段とを設け、 (d) 該上部ホツトプレートを前記下部ホツト
プレートに対して着脱自在にしてなる交換式ホツ
トプレート。 (2) 前記下部ホツトプレートに前記上部ホツト
プレートを位置決めする手段を具備してなる請求
項１記載の交換式ホツトプレート。 (3) 前記下部ホツトプレートには案内用突条体
を設けると共に、上部ホツトプレートには前記突
条体に嵌合される溝付凹部を形成してなる請求項
１記載の交換式ホツトプレート。 (4) 前記上部ホツトプレートには溝付凹部を形
成すると共に、下部ホツトプレートには前記溝付
凹部に嵌合される案内用突条体を設けてなる請求
項１記載の交換式ホツトプレート。[Claims for Utility Model Registration] (1) A hot plate used in a wafer processing process, comprising: (a) a lower hot plate; (b) an upper hot plate; and (c) the upper hot plate is connected to the lower hot plate. (d) a replaceable hot plate, comprising means for fitting the upper hot plate to and from the lower hot plate; 2. The replaceable hot plate according to claim 1, further comprising means for positioning said upper hot plate on said lower hot plate. (3) The replaceable hot plate according to claim 1, wherein the lower hot plate is provided with a guide protrusion, and the upper hot plate is formed with a grooved recess into which the protrusion is fitted. (4) The replaceable hot plate according to claim 1, wherein the upper hot plate is formed with a grooved recess, and the lower hot plate is provided with a guiding protrusion that is fitted into the grooved recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4872888U JPH01160832U (en) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4872888U JPH01160832U (en) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160832U true JPH01160832U (en) | 1989-11-08 |
Family
ID=31274862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4872888U Pending JPH01160832U (en) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160832U (en) |
-
1988
- 1988-04-13 JP JP4872888U patent/JPH01160832U/ja active Pending